[Analysis Case] Observation of the Dispersion State of Abrasives in Polishing Slurry

We will introduce an example of visualizing abrasive particles in a grinding slurry.

Materials with fine particles dispersed in liquids, such as dispersions and slurries, are utilized in many fields including batteries, paints, and cosmetics. In these materials, the dispersion of particles significantly affects the performance and quality of the products, making the evaluation of the dispersion state very important. However, in conventional scanning electron microscope (SEM) observations, the process is conducted in a vacuum, which can lead to particle aggregation and structural changes due to drying, making it difficult to accurately assess the original dispersion state in the liquid. This document presents a case study of visualizing abrasive particles in polishing slurries using SEM observations with a liquid cell, which allows for the observation of liquids even in a vacuum. **Analysis Samples** - Diamond slurry - Alumina slurry **Analysis Method** We conducted SEM observations of polishing particles in slurries both with and without the use of a liquid cell. By using a liquid cell, we were able to visualize the dispersion state of fine particles in the liquid without the need for dilution or drying treatment, even for highly viscous slurry materials. SEM observations using a liquid cell enable the observation of the presence of fine particles in dispersions and slurries in their liquid state.

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