Dislocation observation using the SEM-ECCI method

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last updated：Jun 02, 2025

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The observation of dislocations in metallic materials has traditionally been done using TEM, but it has now become possible to observe dislocations using SEM.

An essential understanding of the processes of deformation and fracture in metallic materials requires the visualization of dislocation states. Traditionally, transmission electron microscopy (TEM) has been used to observe dislocations in metallic materials, but in recent years, observations using scanning electron microscopy (SEM) have also been attempted. This time, our company has also become capable of observing dislocations using SEM.

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Principle of Dislocation Observation by SEM-ECCI Method When observing crystalline samples under specific electron beam incidence conditions using SEM, a uniform brightness is obtained from the crystal, but around defects such as dislocations, distortion causes changes in image contrast. This contrast is utilized in a method called ECCI (Electron Channeling Contrast Imaging) for visualizing dislocations. Characteristics of this observation method: - Since it can be observed in bulk state, it requires less preprocessing compared to TEM, which necessitates thin film processing. - The observation area can be larger than that of TEM, making it advantageous for analyzing heterogeneous structures. - By combining it with EBSD analysis, the relationship between crystal orientation and crystal systems in heterogeneous structures can be understood. - It is possible to observe samples with fewer dislocations, which is difficult with XRD.