Ideal for embedding in a tray. Precisely measure the flow rate of the chemical solution.
In semiconductor manufacturing, the precise control of chemical flow is a crucial factor that affects product quality and yield. If the flow of chemicals is inappropriate, various issues can arise, such as poor wafer cleaning and uneven etching, which may adversely impact the performance of the final product. The compact and high-precision area flow meter NFM series contributes to addressing these challenges by providing accurate flow measurement and easy integration into panels. 【Application Scenarios】 - Chemical supply lines - Cleaning solution supply lines - Various gas supply lines 【Benefits of Implementation】 - Improved quality through precise monitoring of chemical flow - Effective use of panel space - Reduced environmental impact through compliance with RoHS directives
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【Features】 - Low-cost, compact, high-precision area flow meter - Minimal leakage, capable of handling gases at the ppm level - Panel-mounted type suitable for embedding in control panels - Compact and simple structure for easy installation - Compliant with RoHS directive 【Our Strengths】 Leveraging the technology cultivated as a domestic dew point meter manufacturer, we provide products tailored to our customers' needs. We offer optimal solutions not only with flow meters but also through combinations with related measuring instruments and devices, quickly addressing complex issues.
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● Purge air/nitrogen ● Flow management to measuring instruments Among other various aspects
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We introduce various measuring instruments and devices related to moisture management, including the domestic capacitive dew point meter TK-100 series, mirror-type dew point meters, oxygen concentration meters, humidifiers, and moisture meters for corrosive gases. By organically combining these, as well as through piping, line creation, and unitization, we provide custom-made products and respond quickly to complex issues.
