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  6. [Case Study of Local Exhaust Ventilation Equipment] Local Exhaust Ventilation Equipment Related to the Introduction of New Devices

[Case Study of Local Exhaust Ventilation Equipment] Local Exhaust Ventilation Equipment Related to the Introduction of New Devices

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last updated:Mar 10, 2026

三盛工業
三盛工業
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Balancing safety assurance and cost reduction! Introducing case studies of local exhaust systems in the semiconductor industry.

We would like to introduce a case of support provided to a customer who required the installation of new local exhaust equipment due to the introduction of new semiconductor-related devices. The installation space was limited, and there were significant layout constraints. Additionally, it was necessary to ensure effective measures against solvent exposure for workers. While the reuse of existing equipment was also being considered, the scope of modifications and their effectiveness were unclear. Our company proposed appropriate designs under these constraints, including conducting on-site and equipment surveys, designing enclosures with the minimum necessary airflow, and addressing modifications to existing equipment. We successfully implemented local exhaust equipment that met the customer's requirements. 【Case Overview】 ■Industry: Semiconductor-related ■Region: Tokyo ■Installation Location: Tokyo ■Challenges - Limited installation space with significant layout constraints - Need to ensure effective measures against solvent exposure for workers - Concerns about increased running costs due to excessive airflow *For more details, please download the PDF or feel free to contact us.

    Ventilation and Exhaust
【局所排気設備

[Case Study of Local Exhaust Ventilation Equipment] Local Exhaust Ventilation Equipment Related to the Introduction of New Devices

【局所排気設備 導入事例】新規装置導入に伴う局所排気設備編_1.jpg
【局所排気設備 導入事例】新規装置導入に伴う局所排気設備編_1.jpg 【局所排気設備 導入事例】新規装置導入に伴う局所排気設備編_2.jpg
  • Related Link - http://www.sansei-jp.com/
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【Summary of Other Cases】 ■Support Content - Conducting on-site and equipment surveys - Designing enclosures with the minimum required airflow - Responding to modifications of existing equipment - Designing under constraints - Proposing from a medium- to long-term perspective ■Results and Effects - Successfully introduced local exhaust equipment in line with customer requests - Ensured the safety of workers - Achieved stable operation without issues during use - Realized efficient operation while maintaining necessary capacity *For more details, please download the PDF or feel free to contact us.

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[Case Studies of Local Exhaust Systems] Local Exhaust Systems Related to the Introduction of New Equipment

[Case Studies of Local Exhaust Systems] Local Exhaust Systems Related to the Introduction of New Equipment

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三盛工業

三盛工業

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Sansho Industrial Co., Ltd. has been founded since 1966, always upholding the basic stance of "reliable work and trust." Our main business has been the design and construction of local exhaust systems, treatment equipment, and dust removal facilities. We are a company that prioritizes the safety of workers and the purification of the invaluable Earth's atmosphere. Additionally, harmful gases, dust, and high-temperature gases in the work environment pose health risks to workers. We believe that maintaining the lives and health of workers, as well as considering the workplace environment, is our responsibility.

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