Compact design precision liquid delivery unit for semiconductor manufacturing.
Cavro XCalibur
24,000 steps of high dispensing accuracy. Ideal for precision coating in semiconductor manufacturing processes.
The Cavro Xcalibur is a compactly designed precision liquid delivery engine that is ideal for semiconductor-related devices where miniaturization and high integration are required. Despite its slim housing with a 30mm stroke, it maintains the quantitative accuracy inherited from higher-end models. Its flexibility in installation allows for the construction of multi-channel liquid delivery lines with multiple pumps arranged in parallel, all within a minimal footprint. "I want to maintain high precision liquid delivery while making the device more compact" — this embodies the aesthetic functionality dedicated to making that ideal a reality. 【Usage Scenarios】 - Multi-channel chemical supply units: Suitable for multi-system supply systems that individually control and supply multiple different chemicals. - Benchtop and lab semiconductor evaluation devices: Ideal for integration into prototype coaters for research and development or small devices that evaluate material properties. - Integration into analysis and inspection modules: Functions as a sampling and dilution pump for analysis units that monitor chemical concentrations in real-time during semiconductor processes or impurity inspection devices. 【Why Xcalibur?】 - Short body design with a 30mm stroke. - Optimal for multi-channel liquid delivery. - Sufficient accuracy and reasonable introduction costs.
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basic information
**Features** - High precision: Dispensing accuracy of 0.05% CV/FS - High resolution: 24,000 steps - Compact: Handheld size - Durability: Integrated aluminum die-cast - Programming: RS232/RS485 interface **Strengths of Tecan** Tecan has a long-standing track record in the manufacturing and development of life science research support equipment. We provide products tailored to customer needs and support solutions to challenges in semiconductor manufacturing.
Price information
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Delivery Time
P3
Applications/Examples of results
Clinical testing, water quality testing, food testing, petroleum refining, semiconductor manufacturing processes, pharmaceutical testing, quality control, pharmaceutical production, chemical production.
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![[Case Study] Utilization of the OmniFlex Liquid Dispensing Robot and XCalibur Pump in the CD Spectrometer Sample Automation Device.](https://image.mono.ipros.com/public/catalog/image/01/cea/696408/IPROS28780544958347601850.jpeg?w=120&h=170)
Company information
Tecan is a company that was established in Switzerland in 1980, specializing in the manufacturing and development of life science research support equipment. With the support of many customers, we were able to celebrate our 30th anniversary in Japan in 2022. Tecan Japan operates two businesses. One is the life sciences business, which delivers Tecan-branded products such as automated pipetting systems and microplate readers to end-users. The other is the partnering business, which provides components and equipment as OEM products for partner companies. Our customers span a wide range of fields, including disease research, drug discovery, biotechnology, clinical testing (such as cancer diagnosis, infectious disease diagnosis, and testing centers), scientific analysis, and robotic surgery. Our mission is to improve people's lives and health. Tecan Japan aims to contribute to global health care innovation from the life sciences industry to clinics by supporting our customers' daily activities.
