Syringe pump capable of accurate and precise liquid delivery for semiconductor manufacturing equipment.
Tekan Cavro Pumps Series
Applying chemicals in semiconductor manufacturing 'more accurately and precisely.' Easily meet the equipment specifications.
In semiconductor manufacturing, where precise pattern formation and advanced process control are required, accurate dispensing of chemicals is essential. The Cavro pump series from Tecan provides optimal solutions for precise liquid delivery in the range of 1μl to 50ml, making it easy to integrate into customers' equipment. Syringe Pumps: Centris, Xcalibur, XLP6000 Multi-channel Syringe Pump: XMP6000 Delivery Speed: 17nl/min to 2.4L/min (actual dispensing volume monitored via encoder) Reliable liquid delivery at actual capacity without relying on flow controller adjustments. [Application Scenes] - Spin coating - Spray coating - Precise droplet dispensing of photoresist onto wafers - Slurry addition in chemical mechanical polishing (CMP) - Chemical formulation in cleaning and etching processes - Automatic titration adjustment - Automatic dilution - Additive management in plating processes (electrolytic and non-electrolytic) - Packaging processes, etc.
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basic information
**Technical Reasons for Choosing the Cavro Series** - High Resolution: Fine step control using stepping motors allows for extremely small dispensing. - Maintenance-Friendly: Designed for integration into equipment (OEM), minimizing downtime in cleanroom environments. - Diverse Syringe Materials: Capable of handling highly corrosive semiconductor chemicals by selecting appropriate materials (such as PTFE and ceramics). **Features** - Supports a wide range of liquid volumes from below 1μl to 50ml. - High precision liquid volume control (CV% within 0.05%). - Various types of pump lineup (syringe pumps, piston pumps, pipette modules). - Numerous achievements in OEM equipment integration. - Complies with ISO13485 for Class I medical devices and RoHS3 for environmental measures. **Strengths of Tecan** With many years of experience in the field of life science research support equipment, we provide precise liquid delivery technology. We offer optimal product selection and technical support tailored to our customers' needs.
Price information
- It varies depending on the product specifications and quantity.
Price range
P3
Delivery Time
※The following day to several weeks, depending on product specifications.
Applications/Examples of results
Chemical analysis devices, bioanalysis devices, in vitro diagnostic devices (Class I medical devices), trace analysis, water quality testing, food testing, petroleum refining, semiconductor manufacturing-related, particle analysis, factory production systems, etc.
Line up（6）
| Model number | overview |
|---|---|
| Centris | Ultra-high resolution syringe pump compatible with low flow applications. |
| XCalibur | Slim and high-performance syringe pump |
| XLP6000 | High-capacity and highly versatile syringe pump. |
| XMP6000 | Multi-channel pump for low-cost simultaneous pipetting and liquid delivery. |
| Pulssar PBC | Can be composed of various materials: Compact-sized piston pump. |
| ADP | Small pneumatic pipette module |
catalog（17）
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Company information
Tecan is a company that was established in Switzerland in 1980, specializing in the manufacturing and development of life science research support equipment. With the support of many customers, we were able to celebrate our 30th anniversary in Japan in 2022. Tecan Japan operates two businesses. One is the life sciences business, which delivers Tecan-branded products such as automated pipetting systems and microplate readers to end-users. The other is the partnering business, which provides components and equipment as OEM products for partner companies. Our customers span a wide range of fields, including disease research, drug discovery, biotechnology, clinical testing (such as cancer diagnosis, infectious disease diagnosis, and testing centers), scientific analysis, and robotic surgery. Our mission is to improve people's lives and health. Tecan Japan aims to contribute to global health care innovation from the life sciences industry to clinics by supporting our customers' daily activities.
