Precise supply of liquid medicine at a rate of 0.01 ml/min. Contributes to quality improvement in semiconductor manufacturing.
In the semiconductor manufacturing industry, accurate supply of chemicals is essential for the stable production of high-quality products. Particularly in the fine processing processes, even slight fluctuations in the flow rate or supply amount of chemicals can significantly impact product quality. Instability in chemical supply can lead to reduced yield and the occurrence of defective products, which can severely decrease production efficiency. The pulsation-free, metering pump 'Q' allows for micro-dosing at 0.01 mL increments, achieving long-term stable delivery. This addresses the challenges of chemical supply in the semiconductor manufacturing process and contributes to the stable production of high-quality products. 【Application Scenarios】 - Supply of resist liquid in photolithography processes - Supply of chemicals in etching processes - Supply of slurry in CMP processes - Supply of chemicals in cleaning processes 【Benefits of Implementation】 - Improved yield through stabilization of chemical supply amounts - Reduction in the rate of defective products - Increased efficiency of the manufacturing process - Stable supply of high-quality semiconductor products
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basic information
**Features** - Excellent quantitativeness and responsiveness - Long-lasting delivery accuracy - Continuous constant flow without pulsation - No leakage or alteration of the liquid - Resistant to pipeline blockage and dry running **Our Strengths** Takumina Co., Ltd. contributes to solving customer challenges as a leading company in precision pumps. With over 67 years of history, we have developed pump technology and a diverse product lineup that addresses the challenges of chemical supply in semiconductor manufacturing. We also offer rental machines and real liquid testing to provide optimal solutions for our customers.
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Price range
P3
Delivery Time
Applications/Examples of results
It is suitable for applications that require high precision and stability, such as continuous reaction tests. There are many applications and achievements. For more details, please visit our website.
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Company information
Takumina Co., Ltd. is a leading company in precision pumps, welcoming all challenges as a "fluid solutions" provider. With a history of over 67 years since its founding, it is a long-established manufacturer that was the first in Japan to start producing powered metering pumps. Before the widespread adoption of water supply systems, it began manufacturing and selling suction-type chlorine disinfection machines, and the difficult challenges faced by customers have shaped Takumina's "pump technology" over the years. Currently, our pumps continue to be chosen in various manufacturing processes that require severe precision, including electronic materials and pharmaceuticals. Our smooth flow pumps, which provide high-precision liquid delivery with a continuous, pulsation-free flow despite being diaphragm-type, are strong against slurries, contamination-free, and do not alter liquid quality. We offer fluid solutions used in various manufacturing, transfer, supply, and injection processes, starting with the water treatment field. Takumina is committed to understanding the characteristics of liquids and the various conditions of processes to propose optimal transfer systems. We provide suggestions from research and development to manufacturing processes. We also accept inquiries about rental machines and actual liquid tests. If you have any difficulties in choosing pumps or fluid transfer, please feel free to contact us.
