Development of superior coating equipment: Syringe Pump XLP6000

The flow rate of the expelled liquid can be adjusted to 0.3 μl/min, minimizing the use of expensive photoresist with nanoliter-level liquid volume adjustments!

Optimal for dropping resist liquid with spin coaters and slit coaters. Affordable with high reproducibility (CV value: 0.05%). Flow rate control from the start by a delivery unit that does not depend on external pressure and flow controllers! Single delivery volume range: 1nl to 50ml Volume adjustment unit: minimum 1nl (※) Flow rate range: 0.3μl/min to (5.2nl/sec to) Flow rate adjustment unit: 63nl/min to (1nl/sec) (※) ※ Depends on the capacity of the installed syringe Example: When a 10ml syringe is installed Volume adjustment unit: minimum 0.2μl to Flow rate range: 62.5μl/min to 500ml/min (1μl/sec to 8.3ml/sec) Flow rate adjustment unit: 12.5μl/min to (0.2μl/sec to) Equipped with a thorough management function for discharge volume and speed using an encoder, as well as a reporting function to notify errors in case of abnormalities. Easy operation linkage with I/O terminals. Maintenance timing is easily managed with the operation amount memory function. Robust design reduces service costs for embedded devices and contributes to a lower failure rate of the equipment. High resolution command with 6000 or 48,000 steps. Three-way valves to switch liquid paths and 12-port valves can be installed.

Syringe PumpPositive Displacement Pumpdispenser