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  4. Other measurement and measuring equipment
  5. Other measurement and measuring equipment
  6. Laser Autocollimator Smart LAC Sensor Head (H410)

Laser Autocollimator Smart LAC Sensor Head (H410)

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H410-175R

last updated:Mar 30, 2026

駿河精機
駿河精機
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Easy measurement of warping and tilt!

Measurement of workpiece tilt possible with a single-point irradiation! Repetitive reproducibility: 1 second (0.0003 degrees) - a laser autocollimator that achieves high precision and high resolution. 【Features】 - High performance in a palm-sized design - Laser wavelength lineup: Red (655nm) / Blue (450nm) / Green (520nm) / Infrared (852nm) - No initial calibration required - Compliant with KC/CE/FCC/FDA 【Applications】 - Measurement of semiconductor wafer warpage - Space-saving implementation and device integration - Angle adjustment of optical components - Angle measurement of optical elements with AR coating, etc.

    Other measurement and measuring equipment
H410_300_300_kon_.jpg

Laser Autocollimator Smart LAC Sensor Head (H410)

H410_300_300_kon_.jpg
H410_300_300_kon_.jpg
  • Suruga Seiki Laser Autocollimator Special Page
  • Special site - Product/service details - https://pr.mono.ipros.com/surugaseiki/product/

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basic information

Measurement range [± degrees] 1.75 Reproducibility [seconds] (Ave.) 1 Linearity [%] (Ave.) ±0.2~0.4 of F.S. Measurement wavelength [nm] 450±10~852±10 Output beam diameter [φmm] 1 Measurement distance to target [mm] ±0.50 degrees: 0~300 ±1.00 degrees: 0~200 ±1.75 degrees: 0~120 (Varies by measurement range) Laser output 0.39mW or less (Class 1) Weight [kg] 0.14 (excluding AC adapter) Compatible tilt stage HB10 * HPU-1000 and H410 are required for measurement. * Wavelength and beam diameter can be selected from standard products.

Price range

P3

Delivery Time

P3

Applications/Examples of results

<Camera Industry> Optical Element Tilt Alignment <Semiconductor> Wafer Warpage Measurement <Laser Processing> Optical Path Bending Mirror Angle Monitoring

Company information

駿河精機

駿河精機

Industrial Machinery

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Since its founding, Suruga Seiki has been supplying highly competitive products in the optical equipment market for 50 years. In rapidly developing mobile devices such as smartphones and tablets, as well as in the automotive sensor field, Suruga Seiki's technology has become indispensable. In recent years, the company has expanded into overseas markets in Europe, America, and Asia with application systems that further develop its core technology.

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