Removal of ultrafine particles below 45nm required for semiconductors and liquid crystals.
Concentrated control of output due to built-in CPU High-frequency ultrasonic cleaner capable of feedback on operating status
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basic information
【Features】 ○ The 3-digit digital display allows for constant monitoring of operational status, enabling high-precision management. ○ The oscillation status display can indicate upper and lower limit abnormalities, and contact output is also possible. ○ Thanks to a unique PLL method, it automatically oscillates at the optimal frequency even when the type of liquid, liquid depth, and liquid temperature (up to 70 degrees) change. ○ High-efficiency oscillation is possible. ○ For fine patterns of 65nm or less, a low-damage 2MHz frequency is used, compatible with 200mm and 300mm wafers. ○ No cleaning unevenness. ○ The power density is very high, and the cleaning ability is excellent. ○ The thickness of the plate is substantial, providing excellent mechanical strength and long lifespan. Safe for integration into cleaning tanks. ○ A quartz ultrasonic tank with a directly bonded transducer has been commercialized, emitting powerful ultrasound compared to traditional double-tank systems. ● For other functions and details, please download the catalog.
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Applications/Examples of results
【Applications】 ○ Si wafers, GaAs ○ Liquid crystal glass ○ Glass masks ○ Hard disks ○ Quartz oscillators ○ Thin-film magnetic heads ○ Brittle materials, etc. ○ Other ultra-precision cleaning
Company information
Kaijo has been providing total ultrasonic solutions globally that fit customer needs by incorporating cutting-edge electronics/mechatronics technology based on the ultrasonic technology cultivated since its founding in 1948. The ODM division aims to enable a wider range of customers to utilize these foundational technologies more than ever before. - Contract development (ODM) is available from a single unit. - We manufacture transducers and oscillators tailored to customer requests. - We have experimental and evaluation facilities equipped with clean rooms, providing a robust evaluation environment for prototypes. - Some rental units are also available, allowing customers to evaluate before placing an order. - Our Matsumoto facility (Nagano Prefecture) has a manufacturing line registered for medical device manufacturing and has obtained ISO13485 certification. ■ Contact phone (direct) 042-555-2398 ■ Contact email odm-info(at)kaijo.co.jp <Please change (at) to @>
