USB Simple Film Thickness Measurement Device
It measures optical film thickness from 300nm to 30μm (100μm) with good reproducibility, which was not possible with conventional contact methods.
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basic information
By irradiating light onto a transparent or translucent film and calculating the film thickness from the spectral information of the light, this method has garnered attention as a way to measure without damaging the sample and with good reproducibility. Since the sample is illuminated using optical fibers, it can be used anywhere, including inline applications. In combination with actuators, simple mapping of film thickness measurements can also be achieved.
Price information
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Delivery Time
P4
Applications/Examples of results
We would like to introduce measurable samples. 1) Film 2) Silicon, silicon nitride, silicon oxide 3) Adhesives, coatings 4) Dye films, oil films, color filter films 5) Air layers 6) Photoresist 7) Titanium oxide 8) Dielectric films, metal oxide films 9) UV-curable resin 10) Gallium arsenide 11) CD, MD, DVD 12) Polymer
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Company information
Mainly utilizing optical measurement, devices for various non-destructive, non-contact measurements and semiconductor manufacturing process inspections (such as film thickness measurement and plasma monitoring) are developed for both online and offline use.