Among the numerous spectroscopic devices, those aimed at measuring the brightness of light sources have been difficult to obtain until now...
The management of the thickness of various films and coating layers is rapidly growing in demand, starting from the production site. The management of transparency based on transmittance and color management using chromaticity are also inspection items that are attracting similar interest. The spectrometer that incorporates such light measurements into the high-speed inline process is the "Emprunner BTR-11," a new concept inline spectral inspection device that is compatible with various control signals and has safety measures in place. It is not subject to measurement limitations based on film width size or speed, and the built-in spectral component uses a spectrometer from Carl Zeiss, achieving a very high level of measurement reproducibility for film thickness and transmittance accuracy at the inline inspection level.
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basic information
The thickness of the film-coated membrane is measured using a halogen light interference method. Transmittance measurements are also performed simultaneously, allowing for automatic management of film thickness data and external signal output for abnormal values. The spectroscopic inspection device for film manufacturing lines can be positioned several dozen meters away from the control panel and operator's control unit, simultaneously controlling area sensors and encoders, thereby achieving a new film inspection that goes beyond the concept of spectral measurement.
Price information
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Delivery Time
※1.5 to 2 months
Applications/Examples of results
Measurement wavelength range: 400nm-900nm Target film thickness range: 1μm-100μm Film thickness reproducibility accuracy: less than 0.1μm Transmittance reproducibility accuracy: less than ±0.1% Absorbance data range: 0-3ABS Rotary encoder: 256 pulses/revolution
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Company information
Mainly utilizing optical measurement, devices for various non-destructive, non-contact measurements and semiconductor manufacturing process inspections (such as film thickness measurement and plasma monitoring) are developed for both online and offline use.
