Built-in encoder high-resolution and long-stroke positioning stage
This is a high-resolution positioning stage with an optical linear encoder built into the center of the stage to reduce detection errors. It has a stroke of 20mm with a resolution of either 50nm or 100nm (*1). Thanks to our in-house developed linear encoder and proprietary feedback control circuit, it offers high resolution, excellent positioning repeatability, and position retention after positioning. (*1) In combination with the feedback stage controllers FC-111 or FC-411.
Inquire About This Product
basic information
Minimum resolution: 50nm or 100nm Maximum moving speed: 10mm/sec (when using FC-411 or FC-111) Stroke: 20mm Compatible controllers: FC-411 or FC-111 ■For more details, please request documentation or download the catalog■
Price information
-
Delivery Time
Applications/Examples of results
The feedback stage system has been used in various fields in recent years. Typical application areas include information and communication, optics, semiconductors, and biotechnology. Examples: Positioning during MEMS inspection Delay stage in optical systems Microscope stage
catalog（4）
Download All Catalogs
Company information
The Sigma Koki Group, under the global brand "OptoSigma," is committed to its mission as a "light solution company" in both domestic and international markets, carrying the spirit of "gratitude," "challenge," and "creation." We will continue to actively expand our business and strive for sustainable growth as one united company. We sincerely ask for your understanding and support for the Sigma Koki Group as we pursue true "manufacturing" in the future.