A positioning stage with a built-in long-stroke encoder, featuring high resolution, high position reproducibility, and high position retention.
This is a high-resolution positioning stage with an optical linear encoder built into the center of the stage to minimize detection errors. It features a self-developed linear encoder and a proprietary feedback control circuit, providing high resolution, excellent positioning repeatability, and position retention after positioning. The stroke is '150mm' with a resolution of either '50nm' or '100nm' (*1). Due to the long stroke, it can perform both sample movement and precise positioning with just this one unit. (*1) In combination with the feedback stage controller FC-411 or FC-111.
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basic information
Minimum resolution: 50nm or 100nm Maximum movement speed: 10mm/sec (when using FC-411 or FC-111) Stroke: 150mm Compatible controllers: FC-411 or FC-111 ■For details, please request documentation or download the catalog■
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Applications/Examples of results
The feedback stage system has been used in various fields in recent years. Typical areas of use include information and communication, optics, semiconductors, and biotechnology. Examples include: positioning during MEMS inspection, optical system delay stages, and microscope stages.
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Company information
The Sigma Koki Group, under the global brand "OptoSigma," is committed to its mission as a "light solution company" in both domestic and international markets, carrying the spirit of "gratitude," "challenge," and "creation." We will continue to actively expand our business and strive for sustainable growth as one united company. We sincerely ask for your understanding and support for the Sigma Koki Group as we pursue true "manufacturing" in the future.