Frictionless High-Precision XY Stage for Wafer Inspection V-P01
V-P01 High Precision XY Stage
High-speed and high-precision wafer inspection is achieved by V-P01.
In the semiconductor industry, wafer inspection requires the detection of minute defects with high precision. The accuracy of the inspection is a crucial factor that influences product quality and yield. Especially as wafers become larger and more densely packed, faster and more accurate positioning becomes essential. The V-P01 achieves high-precision positioning and high-speed scanning through linear motor drive, contributing to the efficiency of wafer inspection. 【Usage Scenarios】 - Automated Optical Inspection (AOI) of wafers - Precision scanning of wafer surfaces - Positioning of fine patterns 【Benefits of Implementation】 - Reduction in inspection time - Improvement in inspection accuracy - Enhancement of yield
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basic information
【Features】 - Travel range up to 100 x 100 mm - High-resolution incremental linear encoder - 3-phase linear motor - Maximum load capacity 100 N 【Our Strengths】 Based on over 50 years of experience at our headquarters in Germany and 30 years of experience in our Japanese subsidiary, we provide piezo stages and actuators adopted by research institutions and equipment manufacturers worldwide, leveraging our precision control technology. With a rich lineup and technical expertise, we propose optimal solutions tailored to our customers' needs.
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Applications/Examples of results
- Medical industry - Laser cutting - Scanning - Biotechnology - Measurement - AOI (Automated Optical Inspection) - Microscopic inspection *For more details, please refer to the catalog or feel free to contact us.
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Company information
The German headquarters, with over 50 years of experience and 30 years as a Japanese corporation, presents new solutions from PI, a company specializing in precision positioning products. We offer the world's number one piezo stages and actuators, as well as hexapod positioning products. Additionally, we are enhancing our lineup of linear motor-driven products and high-precision air bearing stages. In positioning, attention to the foundation is also crucial, and we provide granite bases, enabling us to propose composite systems as well. Please take a look at our diverse lineup that provides cutting-edge technology to production sites around the world, advanced equipment, and various fields of cutting-edge research.
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