PI Japan Product Lineup

The V-731 is an XY linear motor stage that achieves high-precision positioning and excellent operational stability. It employs an ironless three-phase linear motor, enabling direct drive that is unaffected by friction or backlash, allowing for smooth and highly responsive operation. It maintains stable running performance even at low speeds while suppressing vibrations at high speeds. Additionally, the cross roller guide ensures high rigidity and high guiding accuracy. Equipped with a non-contact incremental linear encoder, it is not influenced by non-linearity, mechanical backlash, or elastic deformation. It is a high-performance stage ideal for a variety of applications that require precise positioning.

• Linear motor
• Other machine elements

The F-836 3D alignment system is composed of a laminated structure of the L-836 series linear stages. Equipped with high-resolution stepping motors, high-precision ball circulation guides, and high-precision linear encoders, it is ideal for applications that require high resolution, high reproducibility, and high-speed operation, all in a compact size. The F-836 XYZ system provides three or six degrees of freedom linear axes for 3D alignment. Furthermore, it is possible to expand the degrees of freedom in the future by integrating a goniometer.

• Other optical parts

The H-811.x2IHP is a compact hexapod that combines high speed, compactness, and high precision. Thanks to parallel kinematics, it achieves high-precision positioning in a compact design with six axes. With sub-micron level reproducibility and high dynamics, it is ideal for applications requiring precise alignment and high-speed operation. The brushless DC motor and high-rigidity design provide the dynamics necessary for active alignment applications even under external interference. Additionally, operation simulations and automatic alignment functions provided by dedicated software streamline system construction and operation.

• Brushless DC Motor
• Actuator

Do you have any of these concerns in a vacuum environment? - Positioning accuracy is unstable in a vacuum environment - Worried about wear and gas release effects - Want to configure within limited installation space Due to these challenges, standard products cannot fully demonstrate their performance in a vacuum environment. PI's vacuum-compatible products achieve high precision, low outgassing, and UHV compatibility, with numerous achievements in semiconductor, analytical equipment, and research applications. We have a list of vacuum-compatible products available on our website. For more details, please download and check the catalog below. Additionally, you can view products not listed in this catalog on the product page of our official website. Please be sure to check them out as well.

• Other machine elements

The P-611.3 NanoCube is an ultra-compact piezo nano-positioning stage that enables XYZ three-axis control. Despite its compact size of 44×44×44mm, it achieves a maximum travel distance of 120µm and a resolution of 0.2nm, making it ideal for research and industrial applications that require nanometer-level positioning. The high-precision flexure guide structure ensures smooth operation without backlash, accommodating high-speed scanning and high-precision alignment. Additionally, it features PI's proprietary PICMA® piezo actuators, which prevent failures due to humidity and leakage currents. This results in a lifespan that is up to ten times longer compared to conventional polymer-insulated actuators.

• Actuator
• Other machine elements

The A-60x PIglide RT is a high-precision rotary module that employs non-contact air bearing technology. Its structure eliminates friction, resulting in no stick-slip or breakaway torque, achieving extremely smooth rotational motion. It has high precision performance with eccentricity and flatness below 200nm, making it ideal for applications such as precision measurement and optical alignment due to its high rigidity design. Additionally, it requires no maintenance as it does not use lubricating oil, and it generates no particles, allowing it to be used in cleanroom environments. By combining it with motors and encoders, it enables the construction of flexible systems as a high-precision rotary stage.

• Metal bearings
• Other machine elements

The P-733.Z is a high-stiffness piezo Z nano-positioning stage that combines nanometer-level resolution with high-speed response performance. It features a travel range of 100µm and a clear aperture of 50×50mm, making it suitable for applications such as positioning in microscopes and masks/wafers. Non-contact capacitive sensors enable measurements with sub-nanometer resolution. It also achieves a maximum resolution of 0.3nm and high repeatability. The flexure guide structure eliminates wear and backlash, allowing for stable high-precision positioning over long periods. It employs PI's proprietary PICMA(R) actuators, achieving up to 10 times the lifespan compared to conventional polymer-insulated actuators.

• Actuator
• Piezoelectric Devices
• Sensors

The P-736 is a high-precision piezo Z-stage optimized for microscopy applications. It features a travel range of 100µm or 200µm, enabling fast step motion and excellent settling performance for focus control and high-speed Z-scanning in microscopes. Its slim design (approximately 20mm in height) facilitates easy integration into microscope systems. It employs non-contact capacitive sensors for position feedback, achieving nanometer-level resolution and high repeatability. The drive unit utilizes PI's proprietary PICMA® piezo actuators, ensuring high reliability and long lifespan, as well as dynamic Z-axis control with fast response.

• Actuator
• Piezoelectric Devices
• Sensors

The L-306 is a Z-stage that achieves high-precision positioning despite its compact design. It features a return drive structure using belt gears, resulting in a compact size (installation area of 63×63mm). It is easy to combine with an XY stage. The drive system employs either a 2-phase stepping motor or a closed-loop DC motor, allowing configurations tailored to specific applications and control systems. Additionally, it uses cross roller guides, providing high rigidity, reduced friction due to low preloading, and smooth operation. Furthermore, it boasts high guiding accuracy and load-bearing performance. The forced-holding rolling element cage prevents cage creep.

• Actuator
• encoder
• Other machine elements

In semiconductor manufacturing, even slight displacements or vibrations of the wafer stage and precision positioning mechanisms can significantly impact processing accuracy and product yield. As semiconductor processes continue to miniaturize, it is crucial to measure displacements at the nanometer level with high precision. The D-510 PISeca is a high-resolution sensor that employs capacitive non-contact displacement measurement. With sub-nanometer resolution and high-bandwidth measurements of up to 10 kHz, it accurately detects minute displacements of the wafer stage and equipment vibrations, contributing to enhanced position control accuracy and process stabilization in semiconductor manufacturing equipment. 【Application Scenarios】 - Position feedback for wafer stages - Nano position control for semiconductor manufacturing equipment - Vibration measurement of wafer surfaces - Precision alignment systems - Semiconductor inspection equipment 【Benefits of Implementation】 - High-precision displacement measurement at the nanometer level - Reduced impact on wafers through non-contact measurement - High-precision monitoring of equipment vibrations - Stabilization of semiconductor processes and improvement of yield

• Sensors
• Converters and Transducers
• Other electronic parts

In the field of precision machining, high-precision displacement measurement at the nanometer level is required to improve machining accuracy and equipment performance. Even slight vibrations or positional shifts can significantly impact machining accuracy and product quality. The D-510 is a high-resolution sensor that employs non-contact displacement measurement using capacitive methods. With sub-nanometer resolution, it can perform high-precision position feedback and vibration measurement in precision machining equipment, contributing to the stabilization of the machining process and improvement of accuracy. [Application Scenarios] - Position feedback for precision machining equipment - Position control in micro-machining processes - Precision positioning systems - Semiconductor manufacturing equipment - Precision vibration measurement [Benefits of Implementation] - High-precision displacement measurement at the nanometer level - Reduced impact on the object being measured due to non-contact measurement - Improved machining accuracy - High-precision monitoring of equipment vibrations

• Sensors
• Converters and Transducers
• Other electronic parts

In the field of research and development, there is a demand for the precise measurement of nanoscale minute displacements and vibrations. Particularly in research on nano-measurement and precision positioning, high-resolution and high-response sensors significantly influence experimental accuracy and reproducibility. The D-510 is a high-resolution sensor that employs a capacitive method for non-contact displacement measurement. With sub-nanometer resolution and a high bandwidth of up to 10 kHz, it enables the measurement of nano-level displacements and high-dynamics vibrations. It is ideal for high-precision measurements and nano-positioning control in research and development applications. 【Application Scenarios】 - Nano-positioning research - Material property evaluation - Precision vibration measurement - Nanometrology - Precision measurement instruments for research 【Benefits of Implementation】 - High-precision displacement measurement at the nano level - Reduced impact on samples due to non-contact measurement - Analysis of dynamic behavior through high-bandwidth measurement - Improved reproducibility and reliability of experimental data

• Sensors
• Converters and Transducers
• Other electronic parts

In the field of precision machinery, high-precision displacement measurement at the nanometer level is required to enhance product performance and processing accuracy. Particularly in high-precision positioning, microfabrication, and precision measurement, it is crucial to accurately measure even slight changes in displacement. Insufficient measurement accuracy can lead to a decline in product quality and variations in equipment performance. The D-050 / D-100 is a high-resolution sensor that employs a capacitive method for non-contact displacement measurement. With a maximum resolution of 0.01nm, it enables precise displacement measurement at the nanoscale, contributing to high-precision position control in precision machinery and precision measurement systems. 【Application Scenarios】 - Precision positioning devices - Precision measurement instruments - Semiconductor manufacturing equipment - Nano positioning systems - Precision measurement in clean environments 【Benefits of Implementation】 - High-precision displacement measurement at the nanometer level - Reduced impact on the object being measured due to non-contact measurement - Realization of high-precision positioning control - High-precision feedback control in multi-axis systems

• Sensors
• Converters and Transducers
• Other electronic parts

In the field of nanotechnology, it is important to accurately measure minute displacements and deformations of materials and structures at the nanometer level. In particular, sensors capable of detecting slight changes in displacement with high resolution are required for nanomaterial evaluation, nanomeasurement, and nanopositioning. The D-050 / D-100 is a high-resolution sensor that employs a capacitive method for non-contact displacement measurement. With a maximum resolution of 0.01 nm, it enables nanometer-scale displacement measurement and high-precision position control, facilitating high-accuracy measurements in nanotechnology research and nanomeasurement systems. 【Application Scenarios】 - Evaluation of nanomaterial properties - Measurement of thin film thickness - Precise measurement of surface shapes 【Benefits of Implementation】 - Enables high-precision measurements at the nanometer scale - Minimizes the impact on materials through non-contact measurement - Allows real-time correction through multi-axis control

• Sensors
• Converters and Transducers
• Other electronic parts

The X-365 is a modular XY gantry system equipped with a high-performance coreless linear motor. Its design reduces thermal effects, ensuring stable operation, and the absolute encoder with nanometer resolution guarantees high reproducibility. With its highly customizable configuration, it can accommodate a wide range of applications, including laser processing and inspection processes.

• Mechanical Design

In experimental research and development, precise positioning is essential. In particular, when fine adjustments are required or setups in limited spaces are necessary, compact and high-precision linear stages are needed. The M-11x type linear stage achieves high precision and a variety of axis configurations while being compact, contributing to the efficiency and accuracy of research and development. There is also a type suitable for vacuum (10-6 hPa). 【Usage Scenarios】 - Optical experiments - Microscope observations - Precision measurements - Microfabrication 【Benefits of Implementation】 - Reduction in experimental setup time - Improvement in experimental accuracy - Space-saving - Adaptability to various experiments

• Actuator
• Cartesian Robot
• encoder

In the optical industry, adjustment work requires precise positioning. In particular, the positioning of lenses and mirrors is a crucial factor that affects the performance of optical systems. Even minor misalignments can lead to a decrease in image quality and a deterioration in measurement accuracy. The M-11x series linear stage achieves high-precision positioning despite its compact size, streamlining the adjustment work of optical systems. 【Usage Scenarios】 - Position adjustment of lenses and mirrors - Fiber alignment - Precise positioning of optical components 【Benefits of Implementation】 - Improved optical performance through high-precision positioning - Reduced working time - Increased efficiency of adjustment work

• Actuator
• Cartesian Robot
• encoder

In microscopic observation, maintaining high precision focus on the observation target is essential. Especially under conditions of long-term observation or environmental fluctuations, focus drift can affect the quality of observation. The N-472 series is a piezo micro-positioning actuator equipped with position feedback from an incremental encoder. It achieves high-resolution positioning through an inertial drive (stick-slip) method, ensuring stable maintenance of the microscope's focus position over extended periods. Furthermore, when stopped, it retains its position through a self-locking mechanism, eliminating the need for current and reducing heat generation. This enables stable focus control even in long-term observation environments. 【Application Scenes】 - Microscope focus adjustment - Cell observation - Semiconductor inspection 【Benefits of Implementation】 - Improved observation accuracy through high-precision focus control - Enhanced observation efficiency due to long-term stability - Energy-saving design that does not require current except during operation

• Actuator
• Piezoelectric Devices
• Solenoid Actuators

In optical systems, high-precision optical axis adjustment and positioning are crucial. The position of optical elements such as lenses and mirrors significantly affects system performance and measurement accuracy. Even slight positional deviations can lead to a decrease in image quality and an increase in measurement errors. The N-472 series is a piezo micro-positioning actuator equipped with position feedback from an incremental encoder. Its inertial drive (stick-slip) method achieves high-resolution positioning and long-term stability, enabling precise alignment adjustments of optical elements. Additionally, the self-locking mechanism holds the position when stopped, eliminating the need for current and reducing heat generation. This ensures stable optical adjustments over extended periods. [Application Scenarios] - Adjustment of objective lenses in optical microscopes - Optical axis adjustment in laser processing machines - Positioning in semiconductor manufacturing equipment [Benefits of Implementation] - Improved system performance through high-precision positioning - Reduced maintenance frequency due to long-term stability - Position feedback enabled by the built-in incremental encoder

• Actuator
• Piezoelectric Devices
• Solenoid Actuators

In microscopic observation, precise focus adjustment on the subject being observed is essential for obtaining clear images. Especially during high magnification or long-duration observations, minute focus adjustments are required. The N-470 is a piezo micro-positioning actuator with a maximum travel range of 13 mm and high holding force. Its high-resolution position adjustment allows for precise control of the microscope's focus position. Additionally, the self-locking mechanism maintains the position when stopped, eliminating the need for current and preventing heat generation. This ensures stable focus adjustment for the microscope. 【Application Scenes】 - Focus adjustment of microscope objective lenses - Cell observation, material observation, semiconductor inspection, etc. 【Benefits of Implementation】 - Clear image acquisition through high-precision focus adjustment - Increased efficiency of observations due to long-term stability - Improved work efficiency by freeing from manual adjustments

• Actuator
• Piezoelectric Devices
• Solenoid Actuators

In optical systems, precise positioning and optical axis alignment of optical elements are critical factors that influence system performance. Especially in precision instruments such as laser devices and microscopes, even slight adjustment errors can affect measurement accuracy and image quality. The N-470 is a compact linear actuator that employs a piezo inertia drive (stick-slip) mechanism. With high-resolution fine adjustment and a high holding force (100 N), it can stably perform chip and tilt adjustments of optical mirrors and precise positioning of optical elements. Furthermore, it maintains its position through a self-locking mechanism when stopped, requiring no current and generating no heat. This ensures stable optical alignment over long periods. 【Application Scenarios】 - Fine adjustment of optical mirrors - Positioning of optical elements - Fiber alignment 【Benefits of Implementation】 - Improved measurement accuracy through high-precision positioning - Enhanced reliability through long-term stability - Increased work efficiency by freeing from manual adjustments

• Actuator
• Piezoelectric Devices
• Solenoid Actuators

In semiconductor manufacturing, high-precision positioning at the nanometer level is required in processes such as wafer inspection and nano-lithography. Even slight positioning errors can lead to a decline in product quality and a deterioration in yield. The N-216 is a high-thrust linear actuator that employs PI's proprietary NEXLINE(R) PiezoWalk(R) walking drive technology. With a high resolution of 0.03nm (open loop) / 5nm (closed loop) and a maximum holding force of 800N, it achieves high-precision and stable nano-positioning in semiconductor manufacturing equipment. [Application Scenarios] - Wafer inspection equipment - Nano-lithography equipment - Semiconductor manufacturing equipment - Nano-measurement equipment - Precision positioning applications [Benefits of Implementation] - Improved yield through high-precision positioning at the nanometer level - Stable positioning performance due to high-thrust drive - Increased efficiency in manufacturing processes - Contribution to the stable production of high-quality semiconductor products

• Actuator
• Piezoelectric Devices
• Other machine elements

In optical systems, high-precision positioning and stable operation are crucial. Especially in the alignment of optical components such as lenses and mirrors, even slight positional deviations can affect measurement results and image quality. The V-817 is a linear stage that combines direct drive via a linear motor with a high-precision incremental encoder. Its low-friction, smooth motion and high-speed response enable precise positioning and optical axis alignment of optical components with high accuracy. Additionally, it supports high loads of up to 600 N and achieves stable positioning through a highly rigid structure. It assists in high-precision adjustment tasks in optical devices and precision measurement systems. [Usage Scenarios] - Position adjustment of lenses and mirrors - Assembly of optical systems - Precision measurement [Benefits of Implementation] - Improved adjustment accuracy through high-precision positioning - Enhanced work efficiency due to stable operation - Dust suppression through non-contact drive

• Linear motor
• Actuator
• Cartesian Robot

In the semiconductor manufacturing industry, high precision and stability are required for the positioning of wafers and masks. Particularly in fine processing and inspection processes, even slight misalignment in positioning can significantly affect product quality. The V-817 provides high-precision positioning and long-term stability, contributing to yield improvement. 【Application Scenarios】 - Wafer processing - Precision inspection - Laser processing 【Benefits of Implementation】 - Positioning reproducibility at the 2 µm level - Dust reduction through non-contact drive - Achievement of long-term stability

• Linear motor
• Actuator
• Cartesian Robot

In experimental research and development, precise positioning and stable operation are essential. Particularly when observing fine structures or performing precise machining, a stage with high positional accuracy is required. A stage with low positional accuracy may compromise the reproducibility of experimental results or fail to provide accurate data. The V-P01 achieves high-precision positioning and stable operation through linear motor drive, enhancing the quality of experiments in research and development. 【Application Scenes】 - Microscopic observation - Precision machining - AOI inspection - Scanning 【Effects of Implementation】 - Improved experimental accuracy through high-precision positioning - Increased experimental efficiency due to high speed and acceleration - Assurance of reproducibility through stable operation

• Other machine elements
• Cartesian Robot
• encoder

In the laser processing industry, precise cutting is required. In particular, the positioning accuracy and movement speed of the laser head are crucial for reducing material waste and efficiently manufacturing high-quality products. A stage with low positioning accuracy can lead to a decline in the quality of the cutting surface and worsen yield. Additionally, slow movement speeds can decrease productivity and lead to increased costs. The V-P01 achieves high-precision positioning and high-speed movement through linear motor drive, addressing the challenges in the cutting process of laser processing. 【Usage Scenarios】 - Laser cutting - Laser marking - Laser engraving 【Benefits of Implementation】 - Improved product quality through high-precision cutting - Increased productivity through high-speed movement - Reduction of material waste, contributing to cost savings

• Other machine elements
• Cartesian Robot
• encoder

In the calibration work of the measurement equipment industry, high-precision positioning is essential. Accurate calibration of measuring instruments requires a stage that can precisely control minute movements. A stage with low positional accuracy can lead to errors in calibration results, potentially affecting product quality. The V-P01, driven by a linear motor, achieves a positional accuracy of ±1µm and a minimum incremental motion of 0.1µm, contributing to improved accuracy in calibration work. 【Usage Scenarios】 - Calibration of precision measuring instruments - Calibration of sensors - Positioning of inspection equipment 【Benefits of Implementation】 - Increased efficiency in calibration work - Improved calibration accuracy - Stabilization of product quality

• Other machine elements
• Cartesian Robot
• encoder

In the optical industry, lens adjustment requires high precision in positioning and stability. To maximize the performance of lenses, micron-level fine-tuning is essential. Misalignment can cause image distortion and a decrease in resolution, directly affecting product quality. The V-P01 addresses these challenges through linear motor drive. 【Application Scenes】 - Lens polishing and assembly processes - Optical measuring instruments - Inspection devices 【Benefits of Implementation】 - Quality improvement through high-precision positioning - Increased work efficiency due to high speed and acceleration - Improved yield through stable operation

• Other machine elements
• Cartesian Robot
• encoder

In microscopy and medical/life sciences, it is important to precisely position the observation target and acquire image data in a stable state. To observe fine structures, stability and reproducibility of positioning are required. If the positioning accuracy is low, the focus on the observation target may shift, potentially hindering accurate diagnosis or research. The V-P01 high-precision XY stage achieves high-precision positioning and smooth operation through linear motor direct drive. It supports sample positioning and automatic scanning in microscopy, contributing to the efficiency of high-precision imaging and automatic analysis. [Usage Scenarios] - Precise positioning of samples in microscopy - Automatic scanning of cell and tissue samples - Digital microscopes and automatic imaging devices - Automatic optical inspection devices (AOI) [Benefits of Implementation] - Improved observation accuracy through high-precision positioning - Reduced observation and inspection time through high-speed scanning - High reproducibility of data acquisition due to stable operation *For details, please refer to the catalog.

• Other machine elements
• Cartesian Robot
• encoder

In the semiconductor industry, wafer inspection requires the detection of minute defects with high precision. The accuracy of the inspection is a crucial factor that influences product quality and yield. Especially as wafers become larger and more densely packed, faster and more accurate positioning becomes essential. The V-P01 achieves high-precision positioning and high-speed scanning through linear motor drive, contributing to the efficiency of wafer inspection. 【Usage Scenarios】 - Automated Optical Inspection (AOI) of wafers - Precision scanning of wafer surfaces - Positioning of fine patterns 【Benefits of Implementation】 - Reduction in inspection time - Improvement in inspection accuracy - Enhancement of yield

• Other machine elements
• Cartesian Robot
• encoder

In experiments in the field of research and development, precise positioning and stable operation are essential. Particularly in the observation of fine structures and precision machining, accurate control in the Z-axis direction determines the success or failure of the experiment. Conventional stages have issues with positioning accuracy and response speed, which have been factors that reduce the efficiency of experiments. The V-Z03 adopts a direct drive system using a voice coil motor, achieving high-speed and high-precision Z-axis control. 【Application Scenarios】 - Precision positioning in industrial and research fields - Semiconductor inspection 【Benefits of Implementation】 - Precise positioning at the sub-micron level - Reduction in experiment time - Improvement in experimental accuracy - Adaptability to diverse experiments

• Other machine elements
• Solenoid Actuators
• encoder

In the semiconductor field, high precision and stability are required for the positioning of wafers and masks. Especially in inspection processes and microfabrication, even slight positional deviations can lead to measurement errors and reduced yield, significantly impacting product quality. The V-Z03 adopts a direct drive system using a voice coil motor, achieving high-speed response and high-precision Z-axis control. Furthermore, with a high-rigidity cross roller guide and a non-contact linear encoder, it ensures stable positioning without backlash and high reproducibility. It is also optimal for precise positioning of heavy objects, supporting loads of up to 150 N and featuring a pneumatic counterbalance. 【Application Scenarios】 - Semiconductor inspection equipment - Wafer inspection and measurement equipment - Precision measurement instruments 【Benefits of Implementation】 - Improved measurement accuracy through high-precision positioning - Reduced takt time due to high-speed response - Stable operation due to high-rigidity guides - Expanded applications due to high load capacity - Enhanced safety through self-locking functionality

• Other machine elements
• Solenoid Actuators
• encoder

In laser microfabrication, even slight positional deviations of the workpiece significantly affect processing quality, necessitating high-precision and stable positioning. This is particularly important for microfabrication of semiconductor materials, glass, and films, where precise position control at the nanometer level is crucial. The V-D07 high-load linear motor stage achieves high-precision positioning at the nanometer level and high-speed operation through a high-precision linear encoder and direct drive linear motor. As a high-precision stage for laser microfabrication equipment, it supports a stable processing process. 【Application Scenarios】 - Precise positioning of laser microfabrication equipment - Laser processing of semiconductors and electronic components - Laser processing of glass and films - Alignment adjustment of optical components 【Benefits of Implementation】 - Enables precise positioning at the nanometer level - Smooth operation due to frictionless drive - Stable operation in high-load environments

• Other machine elements
• Other industrial robots
• Solenoid Actuators

In optical field adjustment work, precise positioning of the optical axis is a crucial factor that influences the performance of the system. Particularly in fiber alignment and the arrangement of optical elements, accurate adjustments at the sub-micron level are required. Conventional stages often have limited degrees of freedom for adjustment, making high-precision positioning difficult. The NanoCube 6-axis piezo system P-616.65S addresses these challenges with its six degrees of nano control. 【Application Scenarios】 - Fiber alignment - Position adjustment of optical elements - Precision instruments such as microscopes 【Benefits of Implementation】 - Enables fine positioning at the nanometer level - Achieves stable adjustments with high rigidity and low crosstalk - Reduces maintenance costs through long-term stable operation

• Other optical parts

In the field of research and development, particularly in interferometry and precision optical experiments, the control of minute optical phase shifts significantly affects the accuracy of experimental results. Even slight differences in displacement can impact measurement precision and analysis outcomes. The S-312 optical phase shifter is an open-loop piezo Z-stage designed for interferometer applications and optical phase control purposes. Its piezo-flexure structure enables smooth and high-resolution control of minute displacements, supporting precise phase adjustments. Due to its compact design, it is also suitable for integration into research equipment and optical systems. 【Usage Scenarios】 - Interferometer experiments - Optical phase shift control - Holography experiments - Precision optical measurements - Optical research involving nanopositioning 【Benefits of Implementation】 - Stable phase adjustments through minute displacement control - Achieving highly reproducible optical experiments - Improved device integration due to compact design - Flexible experimental configurations for research purposes

• Other optical parts
• Optical Measuring Instruments

In precision optical systems and interferometer applications, the control of minute optical phase shifts significantly impacts measurement accuracy and analysis results. Even slight displacement differences can affect the stability of interference fringes and measurement outcomes. The S-312 optical phase shifter is an open-loop piezo Z-stage designed for interferometers and precision optical applications. Its flexure guide structure enables smooth operation without backlash, supporting stable phase adjustments through fine displacement control. Its compact design makes it suitable for integration into optical benches and devices. 【Application Scenarios】 - Interferometer experiments - Optical phase shift control - Holography/wavefront control experiments - Precision optical alignment 【Benefits of Implementation】 - Stable phase adjustments through fine displacement control - Highly reproducible optical measurements - Improved device integration capability

• Other optical parts
• Optical Measuring Instruments

In the field of research and development, precise positioning of samples, optical elements, and sensors greatly affects experimental results. There are many cases where slight positional variations impact data accuracy, such as in the observation of fine structures or high-resolution measurements. The B-421 BIX miniature linear stage achieves high-resolution position control through piezoelectric drive, despite its ultra-compact design. It is easy to integrate into limited experimental spaces and is a suitable solution for precise positioning in research applications. It supports a maximum stroke of 33mm and can accommodate flexible experimental configurations and expansion into multi-axis systems. 【Application Scenes】 - Microscopic observation - Microfabrication experiments - Material property evaluation - Optical experiments / Laser experiments - Sensor evaluation tests 【Benefits of Implementation】 - Stable data acquisition through high-resolution position control - Contribution to space-saving of experimental equipment - High reproducibility in positioning - Flexible experimental design through multi-axis configuration

• Other machine elements

In optical systems, the positioning of lenses, mirrors, and optical elements greatly affects performance. Even slight misalignments can lead to image distortion or reduced measurement accuracy. The B-421 BIX miniature linear stage achieves high-resolution position control through piezoelectric drive, despite its ultra-compact design. It is easy to integrate into limited spaces and is suitable for precise optical alignment applications. It supports a maximum stroke of 33mm, addressing a wide range of optical adjustment needs from research and development to equipment integration. 【Application Scenes】 - Adjustment of microscope objective lenses - Focus adjustment for laser processing machines - Optical fiber alignment - Precision positioning for interferometers and measurement devices 【Benefits of Implementation】 - Stable alignment through high-resolution position control - Contribution to space-saving design of equipment - Achieving highly reproducible optical adjustments

• Other machine elements

In semiconductor manufacturing processes, high precision and reproducibility are required for the positioning of wafers and masks. Particularly in fine processing and inspection processes, positioning accuracy directly affects product quality and yield. The B-421 BIX miniature linear stage achieves high-resolution positioning through piezoelectric drive, despite its ultra-compact design. It is easy to integrate even in limited equipment space and is suitable for semiconductor devices that require precise position control. It supports a maximum stroke of 33mm, providing a compact and high-performance positioning solution. 【Application Scenes】 - Wafer probing equipment - Mask alignment equipment - Semiconductor inspection equipment - Precision assembly equipment 【Benefits of Implementation】 - Stable process control through high-resolution positioning - Contribution to space-saving of equipment - Improved process stability through high-precision control

• Other machine elements

In the field of biotechnology, particularly in cell observation, high-precision positioning is essential. To observe the fine structures of cells, accurate position control at the nanometer level is required. Conventional stages have sometimes hindered precise observation due to vibrations and drift. The N-332 piezo linear stage achieves high-precision positioning unaffected by stick-slip friction through the PICMAWalk drive, enhancing the quality of cell observation. 【Application Scenarios】 - Cell culture - Microscopic observation - Cell manipulation 【Effects of Implementation】 - Accurate positioning with nanometer resolution - Improved stability through a self-locking mechanism - Flexible response with multi-axis setup

• Other machine elements
• Actuator
• Piezoelectric Devices

In the field of nanotechnology, high-precision positioning at the sub-nanometer level is required for atomic and molecular manipulation and fine structure processing. At the same time, high generating force and rigidity are essential for stably holding measurement probes and workpieces. The N-332 Linear Stage is a piezo linear stage that achieves high generating force, long stroke, and sub-nanometer resolution in a high-dimensional manner through the Piezowalk drive system. It minimizes errors caused by thermal effects and vibrations, which are challenges with conventional stages, enabling stable high-precision positioning. It is ideal for applications that require extreme precision, starting with nanotechnology research. 【Application Scenarios】 - Scanning Probe Microscopy (SPM) - Nanoimprinting - Optical system adjustments 【Benefits of Implementation】 - High-precision positioning at the nanometer level - Stable operation and high reliability - Compatibility with diverse applications - Improved work efficiency

• Other machine elements
• Actuator
• Piezoelectric Devices

In optical microscopy, high magnification observation and wide-range scanning require positioning accuracy at the nano to sub-nanometer level and high stability. Particularly for long-term observation and high-resolution imaging, a high-rigidity stage that minimizes the effects of vibration and drift is essential. The N-332 addresses these challenges with its PICMAWalk drive. It is a piezo linear stage that achieves high output, long stroke, and sub-nanometer resolution in a high-dimensional manner. It enhances stability during microscopic observation and is ideal for optical microscope systems that require high-precision sample positioning and automatic scanning. 【Application Scenes】 - High-precision scanning in optical microscopy - Sample positioning in high magnification observation - Confocal microscope systems - Precise alignment of biological samples 【Benefits of Implementation】 - Compatible with vacuum applications - High-precision positioning with sub-nanometer resolution - Stable sample holding due to high output - Combination of long stroke scanning and high precision - Self-locking when power is off - High reproducibility and long-term stability

• Other machine elements
• Actuator
• Piezoelectric Devices

In the semiconductor manufacturing industry, high precision and stability are required for the positioning of wafers and masks. Particularly in fine processing and inspection processes, positioning capability at the nanometer level becomes a crucial factor that affects product quality and yield. Low positioning accuracy can lead to manufacturing defects and inspection errors, potentially resulting in increased costs. Our high-output & high-precision piezo linear stage N-332 achieves nanometer-level positioning through piezo Walk drive, contributing to solving challenges in semiconductor manufacturing. 【Application Scenarios】 - Wafer probing - Mask alignment - Semiconductor manufacturing equipment 【Benefits of Implementation】 - Improved yield through high-precision positioning - Streamlined manufacturing processes - Stabilization of product quality

• Other machine elements
• Actuator
• Piezoelectric Devices

The H-850 Hexapod is a 6-degree-of-freedom parallel kinematics positioning system designed for astronomical research applications. It features high reproducibility of ±0.2µm and is equipped with absolute encoders, enabling high-precision position control without the need for homing. Its wide range of movement and rotation makes it suitable for integration into the precise alignment of telescope optical systems and detectors. Please refer to the catalog for detailed specifications. 【Usage Scenarios】 - Optical alignment of astronomical telescopes - Precision testing within vacuum chambers - Ground evaluation tests of satellite-mounted equipment 【Benefits of Implementation】 - High-precision optical adjustments with ±0.2µm reproducibility - Complex attitude control through simultaneous 6-axis control - Immediate operation with absolute encoders - Capability to accommodate large optical systems with a wide range of motion

• Actuator
• Other industrial robots
• encoder

In the field of research and development, experimental platforms require precise positioning and stable operation. This is especially important for experiments that require fine adjustments or when handling heavy samples, where high accuracy, rigidity, and immediate acquisition of positional information are crucial. The H-850 has been developed to meet these demands. 【Application Scenarios】 - Optical experiments - Material testing - Precision measurement 【Benefits of Implementation】 - Improved experimental accuracy through high-precision positioning - Reduced positioning time with absolute encoders - Capability to accommodate a wide range of experiments with a maximum load capacity of 250 kg

• Actuator
• Other industrial robots
• encoder