PI Japan Product Lineup

The D-050/D-100 is a two-electrode capacitive sensor provided by PI that achieves a measurement range of up to 150µm and a resolution of 0.01nm. It is ideal for nanometer-scale measurements due to its higher resolution than interferometers and its non-contact method. It supports parallel measurements and allows for real-time correction in multi-axis control. Linearity is less than 0.01% (when using a digital controller), and the bandwidth is up to 10kHz. It is suitable for clean environments, semiconductor manufacturing, and integration into measuring instruments.

The D-510 PISeca is a single-electrode capacitive sensor that achieves a maximum measurement range of 500µm and a resolution of less than 1nm. The sensor probe is easy to install with a LEMO connector. Uniformity of the electric field is ensured by the guard ring electrode, achieving high linearity (maximum 0.1%). When combined with dedicated electronics such as the E-852.10, it enables excellent nanometer-level displacement measurements with both static and dynamic resolution.

In the field of precision machinery, high-precision displacement measurement at the nanometer level is required to enhance product performance and processing accuracy. Particularly in high-precision positioning, microfabrication, and precision measurement, it is crucial to accurately measure even slight changes in displacement. Insufficient measurement accuracy can lead to a decline in product quality and variations in equipment performance. The D-050 / D-100 is a high-resolution sensor that employs a capacitive method for non-contact displacement measurement. With a maximum resolution of 0.01nm, it enables precise displacement measurement at the nanoscale, contributing to high-precision position control in precision machinery and precision measurement systems. 【Application Scenarios】 - Precision positioning devices - Precision measurement instruments - Semiconductor manufacturing equipment - Nano positioning systems - Precision measurement in clean environments 【Benefits of Implementation】 - High-precision displacement measurement at the nanometer level - Reduced impact on the object being measured due to non-contact measurement - Realization of high-precision positioning control - High-precision feedback control in multi-axis systems

In the field of nanotechnology, it is important to accurately measure minute displacements and deformations of materials and structures at the nanometer level. In particular, sensors capable of detecting slight changes in displacement with high resolution are required for nanomaterial evaluation, nanomeasurement, and nanopositioning. The D-050 / D-100 is a high-resolution sensor that employs a capacitive method for non-contact displacement measurement. With a maximum resolution of 0.01 nm, it enables nanometer-scale displacement measurement and high-precision position control, facilitating high-accuracy measurements in nanotechnology research and nanomeasurement systems. 【Application Scenarios】 - Evaluation of nanomaterial properties - Measurement of thin film thickness - Precise measurement of surface shapes 【Benefits of Implementation】 - Enables high-precision measurements at the nanometer scale - Minimizes the impact on materials through non-contact measurement - Allows real-time correction through multi-axis control

In the field of precision machining, high-precision displacement measurement at the nanometer level is required to improve machining accuracy and equipment performance. Even slight vibrations or positional shifts can significantly impact machining accuracy and product quality. The D-510 is a high-resolution sensor that employs non-contact displacement measurement using capacitive methods. With sub-nanometer resolution, it can perform high-precision position feedback and vibration measurement in precision machining equipment, contributing to the stabilization of the machining process and improvement of accuracy. [Application Scenarios] - Position feedback for precision machining equipment - Position control in micro-machining processes - Precision positioning systems - Semiconductor manufacturing equipment - Precision vibration measurement [Benefits of Implementation] - High-precision displacement measurement at the nanometer level - Reduced impact on the object being measured due to non-contact measurement - Improved machining accuracy - High-precision monitoring of equipment vibrations

In the field of research and development, there is a demand for the precise measurement of nanoscale minute displacements and vibrations. Particularly in research on nano-measurement and precision positioning, high-resolution and high-response sensors significantly influence experimental accuracy and reproducibility. The D-510 is a high-resolution sensor that employs a capacitive method for non-contact displacement measurement. With sub-nanometer resolution and a high bandwidth of up to 10 kHz, it enables the measurement of nano-level displacements and high-dynamics vibrations. It is ideal for high-precision measurements and nano-positioning control in research and development applications. 【Application Scenarios】 - Nano-positioning research - Material property evaluation - Precision vibration measurement - Nanometrology - Precision measurement instruments for research 【Benefits of Implementation】 - High-precision displacement measurement at the nano level - Reduced impact on samples due to non-contact measurement - Analysis of dynamic behavior through high-bandwidth measurement - Improved reproducibility and reliability of experimental data

In semiconductor manufacturing, even slight displacements or vibrations of the wafer stage and precision positioning mechanisms can significantly impact processing accuracy and product yield. As semiconductor processes continue to miniaturize, it is crucial to measure displacements at the nanometer level with high precision. The D-510 PISeca is a high-resolution sensor that employs capacitive non-contact displacement measurement. With sub-nanometer resolution and high-bandwidth measurements of up to 10 kHz, it accurately detects minute displacements of the wafer stage and equipment vibrations, contributing to enhanced position control accuracy and process stabilization in semiconductor manufacturing equipment. 【Application Scenarios】 - Position feedback for wafer stages - Nano position control for semiconductor manufacturing equipment - Vibration measurement of wafer surfaces - Precision alignment systems - Semiconductor inspection equipment 【Benefits of Implementation】 - High-precision displacement measurement at the nanometer level - Reduced impact on wafers through non-contact measurement - High-precision monitoring of equipment vibrations - Stabilization of semiconductor processes and improvement of yield