PI Japan Product Lineup

The PIglide IS A-311 is an air-bearing XY planar scanner that levitates the stage drive surface using air. With a flat structure thinner than stacked types, it achieves a compact device design while operating over a wide scanning range of 300 mm × 400 mm and a sensor resolution of 1 nm. The frictionless linear motor drive contributes to a high-speed response of up to 2 m/s and a load capacity of 147 N, aiding in reducing cycle times for laser processing and semiconductor wafer inspection. Its dust-free structure is suitable for clean rooms, and a rich array of controllers/APIs facilitates the integration of XY synchronization and area scanning. For more details, please download the PDF or contact us.

The A-143 PIglide is a compact linear air bearing stage with a travel range of 25 mm. Its non-contact structure eliminates the need for wear and lubrication, achieving long life and compatibility with clean rooms. It boasts a minimum increment of 0.025 µm, position accuracy of ±0.2 µm, and straightness of ±0.05 µm, providing nanometer-level precision, making it ideal for staging in measurement, inspection, and optical equipment. It features a built-in linear motor and a 32-bit BiSS-C encoder, enabling high-performance motion with a maximum speed of 390 mm/s and acceleration of 10 m/s².

The air bearing rotation stage is not affected by friction or component precision from conventional mechanical guides due to its air levitation guide. As a result, there is no stick-slip or frictional heat, allowing for high-speed operation and enabling very high-precision positioning due to its high flatness and minimal eccentricity. ● For more details, please contact us or refer to the catalog.

The A-65x is a hemispherical air bearing module that supports a maximum diameter of 300mm and a maximum load of 635kg, providing highly flexible rotational motion across three axes: θX, θY, and θZ. With a design that eliminates friction and requires no lubrication, it achieves high rigidity and reproducibility. The ±45° chip/tilt range makes it ideal for posture control, tilt testing, and simulating artificial weightlessness environments. It is compatible with clean rooms and can be widely used for research purposes as well as satellite structural testing.

In the field of optical lens polishing and processing, the shape accuracy and surface quality of the lens significantly influence the final optical performance, necessitating extremely high positioning accuracy and stability. Particularly in the polishing and surface processing stages, even slight vibrations or sliding friction can affect processing accuracy and reproducibility. The PIglide IS A-311 is a high-precision XY stage that employs non-contact support through air bearings and linear motor drive. By eliminating mechanical friction and stick-slip, it achieves smooth and stable planar motion, supporting the high positioning accuracy and repeatability required for optical applications. It contributes to stabilizing processing quality and improving process reproducibility in optical lens polishing processes and precise surface processing and evaluation stages. Additionally, the air bearing structure helps reduce dust generation, making it suitable for use in cleanroom environments. [Application Scenarios] - Lens polishing processes - Situations requiring high-precision surface processing - Use in cleanroom environments [Benefits of Implementation] - Achieves high-precision polishing - Reduces takt time - Improves product quality

In the semiconductor industry, high-precision inspection is essential for quality control of wafers and improving yield. In particular, the detection of fine defects and foreign substances is a crucial factor that affects product reliability. Traditional inspection methods have limitations in inspection speed and resolution, which can lead to increased takt time and decreased inspection accuracy. The PIglide IS A-311 achieves high-speed and high-precision wafer inspection through a combination of air bearings and linear motors, addressing these challenges. 【Application Scenarios】 - Inspection of foreign substances on wafer surfaces - Measurement of pattern dimensions - Defect detection 【Benefits of Implementation】 - Reduction in inspection time - Improvement in inspection accuracy - Enhancement of yield

In the electronic components industry, high positioning accuracy and fast scanning operations are required for board and component inspections. Particularly in the inspection of miniaturized electronic components, stable repeatability and smooth operational performance significantly impact inspection quality and processing capacity. The PIglide IS A-311 is a high-precision XY stage that employs non-contact support through air bearings and linear motor drive. By eliminating mechanical wear and stick-slip, it achieves high-speed and smooth scanning operations, contributing to the reduction of inspection time and stabilization of accuracy in board and wafer inspections. [Application Scenes] - Board Inspection - Wafer Inspection / Electronic Component Inspection - Laser Processing / Marking Processes [Benefits of Implementation] - Reduction of inspection time through high-speed scanning - Improvement of inspection accuracy through stable positioning - Increased efficiency and reproducibility of the inspection process

In the semiconductor manufacturing industry, high-precision positioning is a crucial factor that affects yield and product quality. Particularly in wafer inspection and exposure processes, accurate positioning at the nanometer level is required. Conventional rotary stages can cause minor vibrations and eccentricities due to friction, which may lead to a decline in quality. The PIglide A-62x series addresses these challenges with its frictionless air bearing technology. 【Application Scenarios】 - Wafer inspection - Exposure equipment - Precision measurement 【Benefits of Implementation】 - Improved yield through high-precision positioning - Stabilization of product quality - Increased productivity

In the calibration work of the measurement equipment industry, the accuracy and reproducibility of measurement results are crucial. Particularly in the calibration of rotational angles, the rotation precision and stability of the stage directly affect the measurement results. The air bearing rotary stage PIglide A-62x achieves low wobble and smooth rotational motion through frictionless non-contact rotation, supporting high-precision angle calibration. 【Application Scenarios】 - Calibration of angle measuring instruments - Calibration of rotational angle sensors - Adjustment of optical systems 【Benefits of Implementation】 - Realization of high-precision calibration work - Improvement in the reliability of measurement results - Enhancement of work efficiency

In the optical industry, precise positioning of optical elements such as lenses and mirrors is a crucial factor that affects system performance. Particularly in high-precision optical inspection and alignment, even slight deviations in angle or position can significantly impact measurement results. The air-bearing rotary stage PIglideA-62x high-precision model achieves minimal wobble and eccentricity through frictionless, non-contact rotation, realizing flatness and eccentricity of less than 200nm. This enables precise positioning of optical elements and supports high-precision optical inspection and alignment. 【Usage Scenarios】 - Angle adjustment of optical lenses and mirrors - Precise alignment of optical elements - Construction of optical inspection systems 【Benefits of Implementation】 - Enables precise positioning at the nanometer level - Achieves high-precision optical measurements - Contributes to improved system performance

In the optical industry, the alignment process requires the ultra-precise positioning of optical components such as lenses and mirrors. In particular, misalignment of the optical axis significantly affects system performance, making high-precision positioning essential. Traditional stages that rely on friction are influenced by friction during small movements, making accurate positioning difficult. The PIglide A-121 eliminates friction and backlash, achieving positioning with nanometer-level precision, thus addressing the challenges of optical alignment. 【Application Scenes】 - Alignment of optical lenses - Fiber alignment - Manufacturing of optical fiber devices 【Benefits of Implementation】 - Improved optical performance through high-precision alignment - Increased yield - Enhanced productivity

In the semiconductor manufacturing industry, high-precision positioning is a crucial factor that affects product quality and yield. Particularly in microfabrication and inspection processes, accurate positioning at the nanometer level is required. Conventional stages that involve friction have faced challenges with precision degradation due to wear and backlash. The PIglide A-121 combines magnetic direct drive and air bearing technology to address these issues. 【Application Scenarios】 - Semiconductor inspection equipment - Precision measurement devices - Microfabrication 【Benefits of Implementation】 - Improved quality through high-precision positioning - Extended lifespan due to non-contact structure - Reduced maintenance costs

In the FPD manufacturing industry, high-precision positioning is required in the inspection process. Particularly in the detection of fine defects and dimensional measurements, accurate positioning is essential to suppress the occurrence of defective products and improve yield. Using a stage with low positional accuracy can compromise the reliability of inspection results and make accurate evaluation difficult. The A-143 PIglide contributes to the improvement of FPD inspection quality with its high-precision positioning of ±0.2 µm. 【Application Scenarios】 - FPD defect inspection - Dimensional measurement - Alignment 【Benefits of Implementation】 - Improved inspection accuracy - Reduced defect rate - Increased productivity

In the laser processing industry, the positioning accuracy of the workpiece is crucial for achieving high-quality cutting. Particularly in cases where fine processing and high-precision cutting are required, positioning errors directly affect the quality of the product. The A-143 compact linear air bearing stage significantly enhances positioning accuracy in laser processing with a positioning precision of ±0.2 µm, enabling high-quality cutting. 【Application Scenes】 - Laser cutters - Laser marking 【Effects of Implementation】 - Improved product quality through high-precision cutting - Increased yield - Reduced processing time

The PIglide A-62x series is an air-bearing rotary stage designed to pursue high precision and high stability required for optical alignment and precision inspection applications. With frictionless, non-contact rotation, it minimizes wobble and eccentricity to the extreme. Flatness and eccentricity are achieved at less than 200nm, enabling control at the nanometer level. Thanks to the torque motor and optional absolute encoders, positioning is both fast and safe. It is compatible with clean room environments and can be installed both horizontally and vertically, allowing for flexible system configurations tailored to experimental conditions.

The PIglide A-121 is a linear stage that combines magnetic direct drive and air bearing technology. It achieves zero friction and backlash, with excellent straightness (up to ±50nm) and repeatability (up to ±10nm). Its non-contact structure ensures a long lifespan with minimal maintenance. It supports a maximum travel distance of 500mm and a maximum speed of 500mm/s. This configuration is ideal for semiconductor inspection equipment and precision measurement devices that require high-precision positioning and speed control.

The A-142 is a compact linear stage driven by a voice coil motor, achieving speeds of up to 200 mm/s and accelerations of 10 m/s² within a travel range of 10 mm. It offers a sensor resolution of 5 nm, a position accuracy of ±0.2 µm, and a minimum incremental motion of 50 nm. With a zero-wear air bearing structure, it requires no lubrication and is suitable for cleanroom applications, making it ideal for semiconductor inspection, optical adjustment, and measurement applications.

The "PIglide Direct-Drive Air Bearing Series" features magnetically preloaded air bearings and is driven by a linear servo motor with an integrated optical linear encoder. By combining these non-contact components, we have achieved a frictionless motion platform with the best performance, quality, and product lifespan. The air bearing stage series includes options such as the "XY-axis Small Air Bearing Stage," "XY-axis Large Air Bearing Stage," and "Air Bearing Rotary Stage." 【Features】 ■ Non-contact fully preloaded air bearings ■ Ideal for scanning or high-resolution positioning ■ Compatible with clean rooms ■ Customizable ■ Integrated optical linear encoder For more details, please refer to the catalog or feel free to contact us.

The A-60x PIglide RT is a high-precision rotary module that employs non-contact air bearing technology. Its structure eliminates friction, resulting in no stick-slip or breakaway torque, achieving extremely smooth rotational motion. It has high precision performance with eccentricity and flatness below 200nm, making it ideal for applications such as precision measurement and optical alignment due to its high rigidity design. Additionally, it requires no maintenance as it does not use lubricating oil, and it generates no particles, allowing it to be used in cleanroom environments. By combining it with motors and encoders, it enables the construction of flexible systems as a high-precision rotary stage.

The air bearing rotary stage is not affected by friction or component precision due to conventional mechanical guides, thanks to its air levitation guide. As a result, there is no stick-slip or frictional heat, allowing for high-speed operation and enabling extremely high-precision positioning due to its high flatness and minimal eccentricity. - Wide opening: 260mm, thickness: 113mm, slim type - Incremental or absolute encoder For more details, please contact us or refer to the catalog.

In the field of precision measurement, high-accuracy positioning is essential. Particularly in the measurement and inspection of fine structures, even slight vibrations or errors can significantly impact the measurement results. The A-143 PIglide, with its non-contact structure, eliminates the need for wear and lubrication, achieving long life and compatibility with clean rooms, making it ideal for measurement applications that require nanometer-level precision. 【Application Scenarios】 - Precision measurement instruments - Inspection devices - Optical equipment 【Benefits of Implementation】 - Achievement of high-accuracy measurement results - Establishment of a stable measurement environment - Reduction of long-term operational costs

In the semiconductor manufacturing industry, precise positioning of wafers and masks is a crucial factor that affects product quality and yield. Particularly in fine processing and inspection processes, nanometer-level accuracy is required. Low positioning accuracy can lead to the occurrence of defective products and a decrease in production efficiency. The A-143 high-precision linear air bearing stage, with its non-contact structure, eliminates the need for wear and lubrication, achieving long life and compatibility with clean rooms, thus meeting the high-precision positioning needs in semiconductor manufacturing. 【Usage Scenarios】 - Semiconductor manufacturing equipment - Inspection equipment - Measurement instruments 【Benefits of Implementation】 - Improved quality through high-precision positioning - Extended lifespan due to non-contact structure - High reliability through clean room compatibility

In the optical equipment industry, precise adjustments of components such as lenses and mirrors are crucial factors that influence product performance. Particularly in situations that require fine positional adjustments, a high-precision staging system is essential. If the adjustment accuracy is low, it can lead to a decline in the performance of the optical system, potentially adversely affecting the quality of the final product. The A-143 PIglide positions with nanometer-level accuracy, streamlining the adjustment tasks for optical equipment. 【Application Scenarios】 - Position adjustment of optical lenses - Calibration of precision measuring instruments - Fiber optic alignment 【Benefits of Implementation】 - Achieving high-precision adjustment tasks - Reducing work time - Improving product quality

In the adjustment of optical systems, precise positioning and angle adjustment of the optical axis are crucial elements. Optical components such as lenses and mirrors can significantly affect the overall performance of the system even with slight deviations in position or angle. The A-68x air bearing rotation stage is a high-precision rotation stage that employs air suspension guides. It is less susceptible to friction effects like traditional mechanical guides, suppressing stick-slip and frictional heat. Its smooth and stable rotational motion enables high-precision angular positioning. This contributes to the efficiency of alignment work in optical systems and enhances the performance of optical systems. 【Application Scenarios】 - Angle adjustment of lenses and mirrors - Alignment of optical components - Alignment of optical fibers - Optical measurement and inspection equipment 【Benefits of Implementation】 - Improved optical performance through high-precision positioning - Increased efficiency of adjustment work due to smooth rotational motion - Long-term stability due to a non-contact structure - Low wear and low maintenance design

■Performance 1: Servo motor and ball screw stage configuration ■Performance 2: High precision, servo motor and ball screw drive stage configuration ■Performance 3: High speed and high precision, linear motor stage configuration The Z-axis is supported with a type that includes a holding brake. The ACS-based G-901 controller integrates motion, I/O, and safety functions, completing the EtherCAT(R) connection with the device PLC immediately. Ideal for laser processing, ultra-short pulse laser processing, testing and precision inspection, and electronic device manufacturing. *For more details, please download the PDF or contact us.

In experimental research and development, high-precision positioning and stable motion control are required. Particularly in experiments that require fine adjustments and high repeatability, the performance of the motion system significantly impacts the experimental results and reproducibility. The multi-axis motion system X-417 is an integrated motion platform based on a high-load linear stage XY positioning system, allowing for flexible selection of axis configurations according to application needs. It can be equipped with either a servo motor + ball screw stage or a linear motor stage, and it supports flexible system configurations such as the addition of a Z-axis. With high-precision positioning performance and stable control, it supports the construction of experimental devices and testing systems in research and development. 【Application Scenarios】 - Laser processing experiments - Ultrafast pulse laser processing - Testing and evaluation devices - Precision inspection - Research on electronic device manufacturing processes 【Benefits of Implementation】 - Improved reproducibility of experiments through high-precision positioning - Increased design flexibility of devices due to flexible axis configurations - Easier system integration with EtherCAT(R) compatible controllers - Enhanced safety with Z-axis holding brake support

In the field of optics, precise positioning of optical elements such as lenses and mirrors greatly influences system performance. Particularly in high-precision positioning and scanning applications, even slight vibrations or friction can affect measurement results and image quality. The PIglide direct drive air bearing stage "A-110" features non-contact air bearings, magnetic linear motors, and optical linear encoders. Its frictionless smooth operation achieves high positioning accuracy and excellent reproducibility. Additionally, it generates no particles, making it ideal for optical applications in cleanroom environments. Furthermore, it supports long strokes of up to 400 mm, accommodating a wide range of high-precision scanning. 【Application Scenes】 - Microscopes - Spectrometers - Laser processing machines - Optical measuring instruments 【Benefits of Implementation】 - Improved measurement accuracy through high-precision positioning - Reduced adjustment time - Enhanced product quality

In the calibration work of the measurement industry, precise positioning of measuring instruments is essential. Particularly in calibration tasks that require fine movements, the accuracy of the stage significantly affects the calibration results. Inaccurate positioning can lead to decreased calibration accuracy and incorrect measurement results. The PIglide linear air bearing stage 'A-110' achieves high-precision positioning and smooth movement, contributing to improved accuracy in calibration work. 【Application Scenarios】 - Calibration of precision measuring instruments - Calibration of reference instruments - Calibration of inspection equipment 【Benefits of Implementation】 - Improved calibration accuracy through high-precision positioning - Increased work efficiency due to smooth movement - Compatibility with clean room environments

PI is expanding its air bearing positioning products! We have released the "A-523 model: Air Bearing Z-axis, Chip/Tilt 3-axis drive stage" designed with a parallel kinematic approach. Achieving ultra-high precision positioning in a slim design A motion platform with no friction Offering the best performance, quality, and lifespan 【Features】 - Travel range: Z-axis ±2.5 mm, θX, θY axes ±1° - Load capacity: 8 kg - Platform: Diameter 250 mm - Height: 60 mm *For more details, please download the PDF or contact us.

In the semiconductor manufacturing industry, precise positioning of wafers and masks is a crucial factor that affects product quality and yield. Especially in fine processing and inspection processes, nanometer-level positioning accuracy is required. In environments susceptible to vibrations and thermal influences, stable positioning performance is essential. Our thin air bearing Z Tip/Tilt stage achieves ultra-high precision positioning in three axes, contributing to improved positioning accuracy and productivity in semiconductor manufacturing. 【Application Scenarios】 - Wafer probing - Mask alignment - Fine processing - Inspection processes 【Benefits of Implementation】 - Quality improvement through high-precision positioning - High durability due to a frictionless motion platform - Miniaturization of equipment due to a thin design - Flexible response through three-axis operation

In the precision machining industry, high-precision positioning in micro-machining is a crucial factor that affects product quality and yield. Particularly in the assembly and inspection of fine components, nanometer-level positional accuracy is required. Conventional stages have faced challenges such as space constraints and accuracy degradation due to minute vibrations. Our thin air bearing Z Tip/Tilt stage addresses these issues and contributes to improving the quality of precision machining. 【Application Scenarios】 - Positioning in micro-machining - Assembly of precision parts - Inspection processes 【Benefits of Implementation】 - Quality improvement through high-precision positioning - Space-saving design due to thin profile - Enhanced product lifespan through smooth operation without friction

PI is expanding its linear motor products. We have released the "V-857 type" high-precision, long-stroke, and narrow one-axis linear motor stage with a maximum travel distance of 1200mm and a load capacity of 1000N. An XY-axis configuration is also possible. 【Features】 - Load capacity of up to 1000N - Long travel distance (up to 1200mm) with a narrow profile (width 132mm) - Maximum speed of 5 m/s - High-precision incremental or absolute linear encoder - Easy XY installation configuration *For more details, please download the PDF or contact us.

In the electronic component assembly industry, there is a demand for improved productivity and quality. In particular, high-speed pick-and-place of components and high-precision positioning are critical factors that influence production efficiency. Conventional stages have limitations in speed and accuracy, which can become bottlenecks in productivity. Our 132 mm wide slim high-speed linear motor stage V-857 achieves high-speed and high-precision positioning, contributing to the acceleration of electronic component assembly. 【Usage Scenarios】 - High-speed component assembly - Processes requiring high-precision positioning - Equipment requiring miniaturization and lightweight design 【Benefits of Implementation】 - Increased productivity - Improved quality - Miniaturization of equipment