PI Japan Product Lineup

The "L-731/V-731" is a PIMag® linear motor XY axis stage that prevents creep in cross roller guide cages. The "L-731" is suitable for environments requiring high rigidity, while the "V-731" is ideal for applications where speed stability is important. They can be used in various fields such as medical and industrial applications, laser cutting, scanning, and biotechnology. 【Features】 ■ Travel range: 205x205mm (8 inches) ■ Incremental linear encoder (resolution 1nm) ■ Prevents creep in cross roller guide cages ■ The L-731 is suitable for environments requiring high rigidity ■ The V-731 is suitable for applications where speed stability is important *For more details, please refer to the PDF document or feel free to contact us.

The PIglide IS A-311 is an air-bearing XY planar scanner that levitates the stage drive surface using air. With a flat structure thinner than stacked types, it achieves a compact device design while operating over a wide scanning range of 300 mm × 400 mm and a sensor resolution of 1 nm. The frictionless linear motor drive contributes to a high-speed response of up to 2 m/s and a load capacity of 147 N, aiding in reducing cycle times for laser processing and semiconductor wafer inspection. Its dust-free structure is suitable for clean rooms, and a rich array of controllers/APIs facilitates the integration of XY synchronization and area scanning. For more details, please download the PDF or contact us.

The U-723 is a PILine XY stage that maintains the mechanical stability of the stage position through a self-locking drive when powered off. Power consumption and heat generation are significantly reduced. These characteristics are advantageous for applications with a small duty cycle, battery operation, or sensitivity to heat. The position of the axis is measured by an encoder, and a optical reference switch enables reliable and reproducible motion. 【Features】 ■ High-speed positioning in two axes ■ Lightweight and space-saving ■ High guide accuracy ■ Sensor resolution of 10nm ■ Self-locking in standby, no heat generation during standby ■ Low noise operation *For more details, please refer to the PDF document or feel free to contact us.

In measurements, testing, and inspections, accurate precision is required. Reducing errors and precise positioning are essential. The Direct Drive High-Precision Rotary Stage V-62x series supports accurate calibration work with less than 1µm of eccentricity and flatness. 【Application Scenarios】 - Optical measurement and inspection - Precision inspection of semiconductors and electronic components - Calibration of sensors and measuring instruments 【Benefits of Implementation】 - Reduction of measurement errors and improvement of reproducibility - High-precision and stable angular positioning - Enhanced measurement reliability through long-term stable operation

In the laser processing industry, high precision positioning and stable operation are required. Particularly in fine processing and precise pattern formation, misalignment and vibrations significantly affect processing accuracy. The Direct Drive High Precision Rotary Stage V-62x series contributes to improving the accuracy of laser processing with eccentricity and flatness of less than 1µm. 【Application Scenarios】 - Angle-dependent fine pattern processing - Prototype processing of optical and precision components - Development of laser processing processes and condition verification 【Effects of Implementation】 - Improvement in processing accuracy and quality - Enhanced reproducibility of fine processing - Increased reliability of processing processes

In the semiconductor industry, high-precision inspection is essential for quality control of wafers and improving yield. In particular, the detection of fine defects and foreign substances is a crucial factor that affects product reliability. Traditional inspection methods have limitations in inspection speed and resolution, which can lead to increased takt time and decreased inspection accuracy. The PIglide IS A-311 achieves high-speed and high-precision wafer inspection through a combination of air bearings and linear motors, addressing these challenges. 【Application Scenarios】 - Inspection of foreign substances on wafer surfaces - Measurement of pattern dimensions - Defect detection 【Benefits of Implementation】 - Reduction in inspection time - Improvement in inspection accuracy - Enhancement of yield

In the field of optical lens polishing and processing, the shape accuracy and surface quality of the lens significantly influence the final optical performance, necessitating extremely high positioning accuracy and stability. Particularly in the polishing and surface processing stages, even slight vibrations or sliding friction can affect processing accuracy and reproducibility. The PIglide IS A-311 is a high-precision XY stage that employs non-contact support through air bearings and linear motor drive. By eliminating mechanical friction and stick-slip, it achieves smooth and stable planar motion, supporting the high positioning accuracy and repeatability required for optical applications. It contributes to stabilizing processing quality and improving process reproducibility in optical lens polishing processes and precise surface processing and evaluation stages. Additionally, the air bearing structure helps reduce dust generation, making it suitable for use in cleanroom environments. [Application Scenarios] - Lens polishing processes - Situations requiring high-precision surface processing - Use in cleanroom environments [Benefits of Implementation] - Achieves high-precision polishing - Reduces takt time - Improves product quality

In the electronic components industry, high positioning accuracy and fast scanning operations are required for board and component inspections. Particularly in the inspection of miniaturized electronic components, stable repeatability and smooth operational performance significantly impact inspection quality and processing capacity. The PIglide IS A-311 is a high-precision XY stage that employs non-contact support through air bearings and linear motor drive. By eliminating mechanical wear and stick-slip, it achieves high-speed and smooth scanning operations, contributing to the reduction of inspection time and stabilization of accuracy in board and wafer inspections. [Application Scenes] - Board Inspection - Wafer Inspection / Electronic Component Inspection - Laser Processing / Marking Processes [Benefits of Implementation] - Reduction of inspection time through high-speed scanning - Improvement of inspection accuracy through stable positioning - Increased efficiency and reproducibility of the inspection process

The A-81x PIglide motion controller is a multi-axis ultra-precision motion control solution designed for air bearing stages. It allows control of up to 4 axes with a single unit and is suitable for operation in vacuum and non-magnetic environments. It features high-precision control that enables positioning at the nanometer scale and a flexible configuration. It supports high-speed interfaces via EtherCAT and analog signals, making it adaptable for advanced industrial applications such as semiconductor lithography, microscope stages, and measurement devices. It also includes safety features and temperature sensor inputs, ensuring reliable long-term operation.

In the semiconductor manufacturing industry, high-precision positioning is a crucial factor that affects yield and product quality. Particularly in wafer inspection and exposure processes, accurate positioning at the nanometer level is required. Conventional rotary stages can cause minor vibrations and eccentricities due to friction, which may lead to a decline in quality. The PIglide A-62x series addresses these challenges with its frictionless air bearing technology. 【Application Scenarios】 - Wafer inspection - Exposure equipment - Precision measurement 【Benefits of Implementation】 - Improved yield through high-precision positioning - Stabilization of product quality - Increased productivity

In the calibration work of the measurement equipment industry, the accuracy and reproducibility of measurement results are crucial. Particularly in the calibration of rotational angles, the rotation precision and stability of the stage directly affect the measurement results. The air bearing rotary stage PIglide A-62x achieves low wobble and smooth rotational motion through frictionless non-contact rotation, supporting high-precision angle calibration. 【Application Scenarios】 - Calibration of angle measuring instruments - Calibration of rotational angle sensors - Adjustment of optical systems 【Benefits of Implementation】 - Realization of high-precision calibration work - Improvement in the reliability of measurement results - Enhancement of work efficiency

In the optical industry, precise positioning of optical elements such as lenses and mirrors is a crucial factor that affects system performance. Particularly in high-precision optical inspection and alignment, even slight deviations in angle or position can significantly impact measurement results. The air-bearing rotary stage PIglideA-62x high-precision model achieves minimal wobble and eccentricity through frictionless, non-contact rotation, realizing flatness and eccentricity of less than 200nm. This enables precise positioning of optical elements and supports high-precision optical inspection and alignment. 【Usage Scenarios】 - Angle adjustment of optical lenses and mirrors - Precise alignment of optical elements - Construction of optical inspection systems 【Benefits of Implementation】 - Enables precise positioning at the nanometer level - Achieves high-precision optical measurements - Contributes to improved system performance

The U-781 is an XY stage that utilizes PILine® piezo linear motors, featuring stability due to its self-locking function and a lubrication-free silent design. Its compact and flat design does not hinder sample access under a microscope. It is compatible with various software such as LabVIEW, MATLAB, and µManager, allowing for flexible integration and automation of the device. There are also plenty of options available, such as sample holders and Z stages.

The X-365 is a modular XY gantry system equipped with a high-performance coreless linear motor. Its design reduces thermal effects, ensuring stable operation, and the absolute encoder with nanometer resolution guarantees high reproducibility. With its highly customizable configuration, it can accommodate a wide range of applications, including laser processing and inspection processes.