PI Japan Product Lineup

The "L-310" is a product that achieves high guide accuracy and rigidity through a ball screw and cross roller guide. It uses a stress-relieving aluminum base that enables high stability. Additionally, it is equipped with a vacuum-compatible version of a non-contact limit switch and a reference point switch, with the reference point switch featuring orientation sensing located at the center of the travel range. 【Features】 ■ Achieves high guide accuracy and rigidity ■ Uses a stress-relieving aluminum base ■ Realizes smooth operation and low friction for long life ■ High-precision position measurement with an incremental encoder ■ Small incremental motion and low-speed motion *For more details, please refer to the PDF materials or feel free to contact us.

The "L-505" is a compact linear stage that allows for the selection of DC or stepping motors. The linear stage is available in two design variations: a slender type equipped with a flange motor and a wide, compact type equipped with a belt drive (foldable drive train). Additionally, it enables high-precision position measurement using an incremental encoder. 【Features】 ■ Travel range: 13mm or 26mm ■ Choice of stepping motor or DC servo motor without a gear head ■ Speed: 15mm/s ■ Maximum load: 30N ■ Built-in reference point and limit switch *For more details, please refer to the PDF document or feel free to contact us.

The U-521 is a compact linear stage that allows XY combination without the need for an adapter plate. Thanks to its automatic locking during stationary periods, there is no heat generation or vibration from the servo. A vacuum-compatible version is available. It can be used for applications in research and manufacturing, automation, sample manipulation, and more. 【Features】 ■ Compact size of just 35mm square and 10mm high ■ Maximum speed of 200mm/second ■ Travel range of 18mm ■ Excellent motion/stop dynamics ■ Direct measurement linear encoder *For more details, please refer to the PDF document or feel free to contact us.

The V-408 is a PIMag linear stage that transmits driving force to the friction platform without using mechanical parts in the drive train, thanks to its three-phase magnetic direct drive. With cross roller guides, it makes contact with reinforced rollers in lines rather than point contact with balls in ball guides. This significantly increases rigidity while minimizing the required preload, reducing friction and enabling smooth operation. The cross roller guides also feature high guiding accuracy and a large load capacity. 【Features】 ■ Iron core three-phase linear motor ■ High load capacity cross roller guide ■ Minimum incremental motion 20nm ■ Bidirectional repeatability ±0.1μm ■ Compact design *For more details, please refer to the PDF document or feel free to contact us.

The V-738 is a PIMag high-precision XY stage featuring a large opening of 150x150mm, equipped with a non-iron three-phase linear motor. The travel range is 102 mm x 102 mm (4 inches). The speed is 500 mm/s. The reference limit switch is optical. 【Features】 ■ Travel range: 102 mm x 102 mm (4 inches) ■ Large opening of 150x150mm ■ Unidirectional repeatability: 0.1μm ■ Speed: 500 mm/s ■ Three-phase linear motor ■ High-resolution incremental linear encoder *For more details, please refer to the PDF document or feel free to contact us.

The "L/V-412, L/V-417" is a PIMag high-load linear stage that improves tracking performance due to the high resolution of the encoder. Tracking errors are reduced, and settling time is shortened. For maximum flexibility, you can choose between incremental and absolute encoders. 【Features】 ■ Maximum travel range: 813mm ■ Rated force: 87N ■ Choice of incremental/absolute encoder ■ Can withstand up to 450N due to the use of circulating ball bearings ■ Dust prevention with the use of a cover strap *For more details, please refer to the PDF document or feel free to contact us.

- Precision nanopositioning stage designed for optical phase shifting in advanced interferometer applications. - Thin-stage - Achieves Z motion with tilt error correction through a tripod piezo-driven design. - Custom model support (e.g., closed-loop)

In the semiconductor manufacturing industry, high-precision positioning is a crucial factor that affects product quality and yield. Particularly in microfabrication and inspection processes, accurate positioning at the nanometer level is required. Conventional stages that involve friction have faced challenges with precision degradation due to wear and backlash. The PIglide A-121 combines magnetic direct drive and air bearing technology to address these issues. 【Application Scenarios】 - Semiconductor inspection equipment - Precision measurement devices - Microfabrication 【Benefits of Implementation】 - Improved quality through high-precision positioning - Extended lifespan due to non-contact structure - Reduced maintenance costs

In the optical industry, the alignment process requires the ultra-precise positioning of optical components such as lenses and mirrors. In particular, misalignment of the optical axis significantly affects system performance, making high-precision positioning essential. Traditional stages that rely on friction are influenced by friction during small movements, making accurate positioning difficult. The PIglide A-121 eliminates friction and backlash, achieving positioning with nanometer-level precision, thus addressing the challenges of optical alignment. 【Application Scenes】 - Alignment of optical lenses - Fiber alignment - Manufacturing of optical fiber devices 【Benefits of Implementation】 - Improved optical performance through high-precision alignment - Increased yield - Enhanced productivity

In the robotics industry, precise positioning and smooth operation are crucial for the performance of robotic arms and precision equipment. Particularly in situations where high-speed and accurate positioning is required, errors due to friction and backlash are unacceptable. The PIglide A-121 was developed to address these challenges. 【Application Scenarios】 - Positioning of robotic arms - Precision assembly processes - Inspection equipment 【Benefits of Implementation】 - Improved work efficiency through high-precision positioning - Increased longevity due to a non-contact structure - Reduced maintenance costs

In the semiconductor manufacturing industry, precise positioning of wafers and masks is a crucial factor that affects product quality and yield. Particularly with advancements in microfabrication technology, there is a demand for higher precision and stability. Low positioning accuracy can lead to processing defects and a decline in device performance. The Direct Drive High-Precision Rotary Stage V-62x series achieves excellent rotational accuracy and minimal tilt error, enabling advanced alignment and rotation control. 【Application Scenarios】 - Wafer probing - Mask alignment - Laser processing - Inspection equipment 【Benefits of Implementation】 - Improved yield through high-precision positioning - Increased productivity through high-speed, high-precision operation - Compatibility with a wide range of fields

In precision optical systems and interferometer applications, the control of minute optical phase shifts significantly impacts measurement accuracy and analysis results. Even slight displacement differences can affect the stability of interference fringes and measurement outcomes. The S-312 optical phase shifter is an open-loop piezo Z-stage designed for interferometers and precision optical applications. Its flexure guide structure enables smooth operation without backlash, supporting stable phase adjustments through fine displacement control. Its compact design makes it suitable for integration into optical benches and devices. 【Application Scenarios】 - Interferometer experiments - Optical phase shift control - Holography/wavefront control experiments - Precision optical alignment 【Benefits of Implementation】 - Stable phase adjustments through fine displacement control - Highly reproducible optical measurements - Improved device integration capability

In the field of research and development, particularly in interferometry and precision optical experiments, the control of minute optical phase shifts significantly affects the accuracy of experimental results. Even slight differences in displacement can impact measurement precision and analysis outcomes. The S-312 optical phase shifter is an open-loop piezo Z-stage designed for interferometer applications and optical phase control purposes. Its piezo-flexure structure enables smooth and high-resolution control of minute displacements, supporting precise phase adjustments. Due to its compact design, it is also suitable for integration into research equipment and optical systems. 【Usage Scenarios】 - Interferometer experiments - Optical phase shift control - Holography experiments - Precision optical measurements - Optical research involving nanopositioning 【Benefits of Implementation】 - Stable phase adjustments through minute displacement control - Achieving highly reproducible optical experiments - Improved device integration due to compact design - Flexible experimental configurations for research purposes

In the field of biotechnology, particularly in microscopic observation and deep tissue imaging, it is important to position the target area with high precision along the Z-axis and optimize the focus. The V-308 Voice Coil PIFOC is a high-precision focus stage that allows for fine adjustments of the objective lens or sample position in minimum steps of 10 nm. With an adjustment range of up to 7 mm and high-rigidity guides, it provides stable nano-positioning even under various observation conditions, including long working distance lenses. Additionally, it features built-in weight compensation for loads of up to 1 kg, accommodating heavy optical systems such as objective lenses and adapters. 【Application Scenes】 - Focus adjustment using high-magnification microscopes - Z-direction scanning for multiphoton fluorescence and deep tissue imaging - High-speed autofocus in automated microscope systems 【Benefits of Implementation】 - Acquisition of high-resolution images through nano-level focus control - Improved stability and reproducibility due to high-rigidity structure - Reduction of the impact of objective lens weight through gravity compensation

In the semiconductor manufacturing field, with the advancement of miniaturization, high-precision position control in the Z-axis direction during inspection, measurement, and exposure processes is becoming increasingly important. Even slight variations in focal position can impact inspection accuracy and process stability. The V-308 Voice Coil PIFOC is a Z-axis focus drive with a minimum resolution of 10 nm and a maximum travel range of 7 mm. Its gravity compensation feature supports stable positioning even for heavy optical systems and objective lenses, with a capacity of up to 1 kg. The direct drive system provides smooth and fast responsiveness along with high reproducibility, supporting precise focus control in semiconductor manufacturing equipment. 【Application Scenarios】 - Autofocus control for wafer inspection equipment - Z-axis positioning for optical measurement devices - Focus correction for mask inspection equipment - Fine pattern inspection processes 【Benefits of Implementation】 - Improved inspection accuracy through nano-level focus control - Stable holding of optical systems due to weight compensation features - Enhanced inspection throughput due to fast response - Improved process stability

The V-308 is a Z-axis focus stage that combines voice coil direct drive and cross roller guides. With a minimum increment of 10 nm and an adjustable stroke of 7 mm, it allows for optimization of the focal position of optical systems at the nanometer level. It provides high reliability for multiphoton and deep tissue imaging using large-diameter lenses or long working distance lenses. The high rigidity structure of the cross roller guide and the 10 nm resolution encoder ensure smooth nanopositioning across the entire 7 mm range. For more details, please download the PDF or contact us.

In the field of laser processing, precise control of the focal position greatly influences processing quality. Particularly in fine processing and high-precision marking, even slight focal variations in the Z-axis can affect processing width and energy density. The V-308 Voice Coil PIFOC is a Z-axis focus drive with a minimum resolution of 10 nm and a maximum travel range of 7 mm. Its direct drive system enables smooth and fast response, supporting precise focus control for laser processing heads and optical systems. Additionally, it can accommodate heavy optical modules with a gravity compensation function of up to 1 kg. 【Application Scenarios】 - Focus control for laser marking devices - Z-axis positioning for laser fine processing equipment - Focus correction for galvanometer scanner optical systems - Laser processing systems for research and development 【Benefits of Implementation】 - Stabilization of processing quality through improved focus control accuracy - Optimization of processing processes due to high-speed response - Stable optical system control through weight compensation function - Enhanced reproducibility in fine processing

- Travel range: 25mm and 50mm types - 75 N active force - 3 nm minimum incremental motion - Self-locking when power is off - Multi-axis setup compatible: XY, XZ, XYZ - Vacuum compatible

In semiconductor manufacturing processes, high precision and reproducibility are required for the positioning of wafers and masks. Particularly in fine processing and inspection processes, positioning accuracy directly affects product quality and yield. The B-421 BIX miniature linear stage achieves high-resolution positioning through piezoelectric drive, despite its ultra-compact design. It is easy to integrate even in limited equipment space and is suitable for semiconductor devices that require precise position control. It supports a maximum stroke of 33mm, providing a compact and high-performance positioning solution. 【Application Scenes】 - Wafer probing equipment - Mask alignment equipment - Semiconductor inspection equipment - Precision assembly equipment 【Benefits of Implementation】 - Stable process control through high-resolution positioning - Contribution to space-saving of equipment - Improved process stability through high-precision control

In optical systems, the positioning of lenses, mirrors, and optical elements greatly affects performance. Even slight misalignments can lead to image distortion or reduced measurement accuracy. The B-421 BIX miniature linear stage achieves high-resolution position control through piezoelectric drive, despite its ultra-compact design. It is easy to integrate into limited spaces and is suitable for precise optical alignment applications. It supports a maximum stroke of 33mm, addressing a wide range of optical adjustment needs from research and development to equipment integration. 【Application Scenes】 - Adjustment of microscope objective lenses - Focus adjustment for laser processing machines - Optical fiber alignment - Precision positioning for interferometers and measurement devices 【Benefits of Implementation】 - Stable alignment through high-resolution position control - Contribution to space-saving design of equipment - Achieving highly reproducible optical adjustments

In semiconductor manufacturing, precise and stable positioning of wafers and masks is required. Nanometer-level positioning accuracy affects product quality. Positioning errors can lead to reduced yield and product defects. The P-620.2 to P-629.2 PIHera® series is an XY-axis piezo nano-positioning stage that employs long-life PICMA® actuators. With closed-loop control using capacitive sensors, it achieves excellent linearity and stability, providing high resolution below 1nm and bidirectional reproducibility of ±0.2nm. 【Application Scenarios】 - Semiconductor manufacturing equipment - Wafer inspection - Mask alignment - Probing 【Benefits of Implementation】 - Improved yield through high-precision positioning - Increased productivity due to stable operation - Ease of integration into equipment due to compact housing - Enhanced maintainability with long-life actuators