ピーアイ・ジャパン List of Products and Services

High-speed piezo-driven nano-focus device for microscope objective lenses. It allows positioning with a stroke of 100μm at sub-nanometer resolution and high linearity. 【Points】 - Scanning and positioning of objective lenses with sub-nanometer resolution - Stroke up to 100μm, with millisecond-level settling time - High-speed response and long lifespan far surpassing motor-driven Z stages - Excellent focus stability through high-precision flexure guides with parallel control - Choice of position sensors: direct measurement via capacitance (high performance) or strain gauges (low cost) - Compatible with Metamorph(TM) imaging software - Achieves long lifespan with PICMA(TM) piezo actuators - Improved operability with quick-lock adapter ● For more details, please contact us or refer to the catalog.

The P-726 is a PIFOC® high-load focus scanner that drives heavy high NA objective lenses with high speed and precision. It features built-in flexure guides and capacitive sensors, achieving an OpenLoop resolution of 0.3 nm and a linearity error of 0.02%. The resonance frequency is maintained at 1120 Hz without load and 560 Hz with a 210 g load, accelerating Z-scanning for semiconductor wafer inspection and confocal/super-resolution microscopy. It supports major thread sizes such as M32/M27 with the QuickLock adapter. *For more details, please download the PDF or contact us.*

The PIFOC(R) P-737 high-speed vertical positioning system is designed for use with XY stages in microscope inspection. 【Features】 ○ High-speed piezo operation in the vertical direction: Stroke up to 250μm (customizable up to 500μm) ○ Nanometer resolution ○ Accommodates specimen holding with a large central opening ○ Mechanically compatible with manual or motor-driven XY OEM stages ○ Response time in the millisecond range ● For more details, please contact us or refer to the catalog.

P-753 is a one-axis piezo nano positioning stage that controls a travel range of 15 to 38 µm with a resolution of 0.1 nm. By measuring the actual movable part with a two-electrode capacitive sensor and utilizing a frictionless structure with flexure guides, it achieves nanometer-level motion and positioning within a few milliseconds. *For more details, please download the PDF or contact us.*

The P-752 is an excellent single-axis nanopositioning stage with a flexure guide structure that incorporates a two-electrode capacitive sensor, achieving zero friction and outstanding straightness (pitch and yaw error ±1μrad), with an open-loop resolution of 0.1nm. Additionally, the built-in capacitive sensor measures the actual moving parts non-contactly at a sub-nanometer level, providing higher linearity and hysteresis compensation, ensuring long-term stability. *For more details, please download the PDF or contact us.*

The P-611.1 piezo stage is a flexure guide nanopositioning system with a footprint of just 44 x 44 mm. 【Features】 ○ Compact design: footprint of only 44 x 44 mm ○ Stroke up to 120 μm ○ Resolution up to 0.2 nm ○ Low-cost mechanism/electronic system configuration ○ Incredible long lifespan with PICMA(TM) piezo actuators ○ Available in Z stage, XY, XZ, and XYZ versions ● For more details, please contact us or refer to the catalog.

The PIHera P-620.1/629.1 series is a one-axis nanopositioner that combines a flexure guide with PICMA® piezo technology. It has a stroke range of 50 to 1800 µm, a minimum resolution of 0.1 nm, and achieves a linearity error of 0.02% by measuring the actual moving parts with an integrated capacitive sensor. The flexure guide has no wear parts, offers high rigidity, excellent straightness, and outstanding long-term stability. It can also be expanded to X, XY, Z, and XYZ configurations, making it ideal for applications such as microscope sample scanning, optical alignment, and interferometric measurements. *For more details, please download the PDF or contact us.*

The P-517/527 multi-axis piezo scanner uses zero-wear flexure guides, PICMA piezo ceramics, and capacitive sensors to achieve nanometer-level reproducibility and resolution. The available motion axes include XY, XYZ, and XYθz types. The XY axis has options of 100µm and 200µm, the Z axis is 20µm, and θz is 2mrad. It has a load capacity of 50N, making it ideal for applications such as optical inspection, wafer inspection, nanopositioning, measurement, and microscopy. It also allows for transmitted light with an aperture of 50 × 50mm. *For more details, please download the PDF or contact us.

The P-734 high dynamic XY piezo nano positioning stage achieves a linear stroke of 100 x 100 μm with sub-nanometer resolution and high flatness of motion. 【Features】 ○ Ultra-precise trajectory control ideal for surface shape analysis and scanning microscopy ○ Improved responsiveness through parallel control/measurement and multi-axis precision control ○ Stroke: 100 x 100 μm, center opening of 56 x 56 mm ○ Achieves a resolution of 0.4 nm with capacitive sensors ○ Incredible long lifespan with PICMA(TM) piezo actuators ● For more details, please contact us or refer to the catalog.

The P-611.1 piezo stage is a flexure guide nanopositioning system with a footprint of just 44 x 44 mm. 【Features】 ○ Compact design: footprint of 44 x 44 mm ○ Stroke up to 120 x 120 μm ○ Resolution up to 0.2 nm ○ Low-cost mechanical/electronic system configuration ○ Frictionless precision flexure guide system ○ Remarkable long lifespan with PICMA(TM) piezo actuators ○ Available in X, Z, and XYZ versions ● For more details, please contact us or refer to the catalog.

The P-561 to P-563 series are XYZ-axis piezo nanopositioners that utilize a parallel kinematics structure and capacitive sensors. The operational range is 100/200/300 µm for each XYZ axis (depending on the model), with a reproducibility of ±2 nm and linearity of 0.03%. The aperture is 66×66 mm, ensuring a clear path for transmitted light and laser light. The direct drive type operates at 45 µm on the XY axis and 15 µm on the Z axis, with a resonance frequency of 1000 Hz under no load, achieving high resolution and fast response. Additionally, the PICMA piezo ceramics are fully insulated with all-ceramic construction, providing humidity resistance, high reliability, and long lifespan. They are ideal for semiconductor testing, super-resolution microscopy, and photonics alignment. *For more details, please download the PDF or contact us.*

The P-611.Z stage is a piezo-based nanopositioning system featuring a footprint of just 44 x 44 mm and a closed-loop stroke of 100 μm. 【Features】 ○ Compact design: footprint of only 44 x 44 mm ○ Stroke up to 120 μm ○ Resolution up to 0.2 nm ○ Low-cost mechanism/electronic system configuration ○ Frictionless precision flexure guide system ○ Remarkable long lifespan with PICMA(TM) piezo actuators ○ Available in X, XY, XZ, and XYZ versions ● For more details, please contact us or refer to the catalog.

The P-5x8 series features the piezo nano stage P-518.TCD with chip tilt and the long-stroke version P-528.TCD/ZCD, both developed on the same platform. It achieves a system resolution of 0.8 nm and a linearity error of 0.03% using highly reliable PICMA piezo ceramics, flexure guides, parallel kinematics, and capacitive sensors. The large aperture of 66 × 66 mm is suitable for interferometric measurements and transmitted light applications, with a load capacity of 50N, making it ideal for semiconductor testing, photonics, microscopy, and high-precision alignment. *For more details, please download the PDF or contact us.

The PIHera P-620.Z/P-621.Z/P-622.Z is a Z-axis piezo stage that drives vertical strokes of 50, 100, and 250 µm with a resolution of 0.1 nm. The capacitive sensor directly measures the moving platform, suppressing linear errors to 0.02%. The zero-backlash flexure guide requires no lubrication and is dust-free, achieving a resonance frequency in the kHz range and sub-millisecond response. The actuator is an all-ceramic insulated PICMA(R) that has demonstrated a long lifespan of 10 billion cycles. It is ideal for Z-axis control in devices that require both sub-nanometer stability and high speed, such as interferometers, confocal microscopes, and semiconductor inspection. *For more details, please download the PDF or contact us.*

The S-330 piezo chip/tilt platform is a high-speed and compact chip/tilt unit that accurately realizes the angular movement of the top platform around two orthogonal axes. 【Features】 ○ Resolution up to 20 nrad, excellent position stability ○ Light beam deflection up to 20 mrad (>1°) ○ Improved dynamics, stability, and linearity through parallel control design ○ Same-plane rotation axis and fixed pivot point to avoid polar rotation ○ Sub-millisecond response ○ For mirrors with a maximum diameter of 50 mm ○ Closed-loop version for improved linearity ○ Excellent temperature stability ● For more details, please contact us or refer to the catalog.

The "PIglide Direct-Drive Air Bearing Series" features magnetically preloaded air bearings and is driven by a linear servo motor with an integrated optical linear encoder. By combining these non-contact components, we have achieved a frictionless motion platform with the best performance, quality, and product lifespan. The air bearing stage series includes options such as the "XY-axis Small Air Bearing Stage," "XY-axis Large Air Bearing Stage," and "Air Bearing Rotary Stage." 【Features】 ■ Non-contact fully preloaded air bearings ■ Ideal for scanning or high-resolution positioning ■ Compatible with clean rooms ■ Customizable ■ Integrated optical linear encoder For more details, please refer to the catalog or feel free to contact us.

The PIMag Linear Motor Controller 'C-413' is a digital motion controller for PIMag voice coil drive. It supports one motor channel and two sensor channels, compatible with the V-275 and V-275 linear actuators. It is equipped with a wide range of support functions, including a data recorder that logs movement data such as motor current, speed, position, and position error. Additionally, the PIMag Linear Motor Controller also includes the "C-891" type, which has a maximum average current consumption of 3A. 【Features】 ■ Up to 4 sensor channels with force x2 and position x2 sensors ■ TCP/IP or USB interface for configuration and command transmission (depending on the version) ■ Real-time SPI interface for command transmission (depending on the version) ■ Optional analog input/output ■ Automatic zero function for holding current For more details, please refer to the catalog or feel free to contact us.

The N-331 PICMAWalk is a walking drive linear actuator that combines the nano-resolution of piezo elements with stepping motion. It is available in 25mm, 50mm, and 100mm types, with a driving force of 50N and a holding force of 60N. The PiezoWalk® walking drive operates with multiple piezo actuators performing walking motions, leading to the feed motion of the runner. By controlling the actuators, it enables the smallest steps and forward feed motions with a resolution of less than 1 nanometer. It performs high-precision position measurement using an incremental linear encoder. Additionally, it is compatible with actuators that can handle a vacuum of 10⁻⁹ hPa. *For more details, please download the PDF or contact us.*

The P-616 is an XYZ piezo nanopositioner that employs parallel kinematics. It offers a reproducibility of 10 nm and a system reproducibility of 0.4 nm, featuring high-reliability PICMA piezo ceramics, flexure guides, and capacitive sensors built into each axis. It is ideal for fiber positioning and alignment, microscopy, nano positioning, photonics, and micromanipulation. *For more details, please download the PDF or contact us. 【Features】 *For more details, please refer to the PDF materials or feel free to contact us.

The resonance frequency of 0.7 kHz (with a 1-inch mirror) enables dynamic movement and fast step & settling. Parallel kinematic design: A two-axis orthogonal platform with a single common pivot point, available without a mirror, with a 1/2-inch mirror, or with a 1-inch mirror type. Ideal for applications requiring high-speed and high-precision deflection, such as image stabilization, laser beam control, and optical communication. *For more details, please download the PDF or contact us.

The U-723 is a PILine XY stage that maintains the mechanical stability of the stage position through a self-locking drive when powered off. Power consumption and heat generation are significantly reduced. These characteristics are advantageous for applications with a small duty cycle, battery operation, or sensitivity to heat. The position of the axis is measured by an encoder, and a optical reference switch enables reliable and reproducible motion. 【Features】 ■ High-speed positioning in two axes ■ Lightweight and space-saving ■ High guide accuracy ■ Sensor resolution of 10nm ■ Self-locking in standby, no heat generation during standby ■ Low noise operation *For more details, please refer to the PDF document or feel free to contact us.