[For semiconductors] 0.1nm resolution compact X-axis piezo stage
P-620.1 • P-629.1 PIHera Small X-axis Piezo Stage
Achieving high-precision positioning in semiconductor manufacturing. Quick and accurate alignment operations.
In the semiconductor industry, high-precision positioning is essential due to the miniaturization of manufacturing processes. Particularly in wafer inspection and exposure processes, even slight positional deviations can significantly affect product quality. The P-620.1/629.1 addresses these challenges and achieves high-precision positioning. With its built-in capacitive sensor, it achieves a linearity error of 0.02%, contributing to improved yield in semiconductor manufacturing. 【Application Scenarios】 - Wafer inspection - Exposure processes - Optical alignment - Interferometric measurement 【Benefits of Implementation】 - Quality improvement through high-precision positioning - Increased yield - Streamlined manufacturing processes For detailed product specifications, please refer to the catalog. If you have any questions, please feel free to contact us.
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basic information
**Features** - Stroke: 50 to 1800 μm - High precision, low cost - Resolution of 0.1 nm - Built-in capacitive sensor - Positioning accuracy of 0.02% **Our Strengths** Based on precision control technology cultivated over more than 50 years at our headquarters in Germany, we provide piezo stages and actuators adopted by research institutions and equipment manufacturers worldwide. With a rich lineup and technical expertise, we offer optimal solutions tailored to our customers' needs.
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Applications/Examples of results
Application examples - Interferometer - Inspection using a microscope - Nano positioning - Biotechnology - Quality assurance testing - Semiconductor technology
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Company information
The German headquarters, with over 50 years of experience and 30 years as a Japanese corporation, presents new solutions from PI, a company specializing in precision positioning products. We offer the world's number one piezo stages and actuators, as well as hexapod positioning products. Additionally, we are enhancing our lineup of linear motor-driven products and high-precision air bearing stages. In positioning, attention to the foundation is also crucial, and we provide granite bases, enabling us to propose composite systems as well. Please take a look at our diverse lineup that provides cutting-edge technology to production sites around the world, advanced equipment, and various fields of cutting-edge research.
