List of encoder products

Reduce the workload from handling heavy objects! Here are five case studies that solved customer challenges! We are also accepting free consultations and tests tailored to your work!

• Other conveying machines

We can accommodate high resistance over 10,000 ohms, with diameters ranging from approximately 30 mm to 8 inches, and we also offer thinning and chip processing arrangements!

• Other semiconductors
• Processing Contract
• Wafer

Achieves high precision and high-speed operation while being compact. A highly reliable 6-axis positioning system.

• Actuator
• Other industrial robots
• encoder

Zero friction, high-precision positioning. Revolutionizing the adjustment work of optical devices.

• Other machine elements
• Cartesian Robot
• encoder

Improving the precision of laser cutting. Achieving high-precision positioning of ±0.2 µm.

• Other machine elements
• Cartesian Robot
• encoder

Zero friction, high-precision positioning. Contributes to quality improvement in the FPD inspection process.

• Other machine elements
• Cartesian Robot
• encoder

High-load compatible, high-precision Z-focus scanner supporting high throughput in wafer inspection.

• Actuator
• Piezoelectric Devices
• encoder

High-load compatible sub-nanometer resolution focus scanner supporting nano-structure analysis

• Actuator
• Piezoelectric Devices
• encoder

A compact air bearing stage that achieves zero friction and high-precision positioning.

• Other machine elements
• Cartesian Robot
• encoder

100 µm stroke, 0.4 nm resolution, compatible with high-load objective lenses, high-speed and high-precision PIFOC focus scanner.

• Actuator
• Piezoelectric Devices
• encoder

A high-precision air bearing rotary stage with a slim design and a maximum opening of 260mm. It is not affected by friction or component accuracy associated with conventional mechanical guides.

• Actuator
• Other industrial robots
• encoder

Zero wear with air levitation and linear motor. Maximum speed 2m/s, sensor resolution 1nm.

• Other machine elements
• Cartesian Robot
• encoder

A compact linear stage with a size of 60mm square, capable of combinations along the XYZ axes.

• Actuator
• Cartesian Robot
• encoder

Zero friction. Achieving high-precision positioning of ±0.2 µm within a movement range of 25 mm.

• Other machine elements
• Cartesian Robot
• encoder

Improving the quality and efficiency of semiconductor inspection with high-speed, high-precision Z-axis control.

• Other machine elements
• Solenoid Actuators
• encoder

XY stage that improves the precision and efficiency of lens adjustment.

• Other machine elements
• Cartesian Robot
• encoder

XY stage contributing to the efficiency and accuracy improvement of calibration work.

• Other machine elements
• Cartesian Robot
• encoder

In the laser processing cutting process. Achieving high-precision positioning and high-speed movement.

• Other machine elements
• Cartesian Robot
• encoder

Ideal for fine-tuning optical systems. High-precision nanopositioner with 0.1 nm resolution.

• Actuator
• Piezoelectric Devices
• encoder

Compact design with a 44 mm square. Piezo nano-positioning stage achieving a 120 µm operating range and 0.2 nm resolution.

• Piezoelectric Devices
• Actuator
• encoder

A 44mm square housing that achieves optical system focus adjustment at the nanometer level.

• Actuator
• Piezoelectric Devices
• encoder

A 44mm square casing that achieves height measurement at the nanometer level.

• Actuator
• Piezoelectric Devices
• encoder

For precise adjustment of optical systems. Air bearing stage that achieves high-precision positioning.

• Other machine elements
• Cartesian Robot
• encoder

Air bearing stage that supports high-precision calibration work.

• Other machine elements
• Cartesian Robot
• encoder

For optical alignment and focus adjustment. Precision Z stage featuring high-rigidity cross roller guides.

• encoder

Contributes to the efficiency and stability of the assembly process with a compact, high-rigidity design and selectable motors (DC motor or stepping motor).

• Actuator
• Cartesian Robot
• encoder

Supports microscope scanning with low cost and compact design.

• Actuator
• Piezoelectric Devices
• encoder

A compact yet high-precision reference-class 6-axis positioning system.

• Actuator
• Other industrial robots
• encoder

Non-contact, wear-free, and long-lasting, achieving smooth operation at the nanometer level.

• Other machine elements
• Cartesian Robot
• encoder

High-speed and high-precision wafer inspection is achieved by V-P01.

• Other machine elements
• Cartesian Robot
• encoder

XY stage supporting high-speed and high-precision experiments.

• Other machine elements
• Cartesian Robot
• encoder

44mm square, maximum stroke of 120µm, high-precision nanopositioner with 0.2nm resolution.

• Piezoelectric Devices
• Actuator
• encoder

For Z-axis positioning in wafer inspection and chip inspection. Precision Z-stage utilizing high-rigidity cross roller guides.

• encoder

For positioning the Z-axis in microscopy, optical experiments, and precision measurements. A precision Z-stage featuring a high-rigidity cross roller guide.

• encoder

Adopts high-rigidity cross roller guide. Ideal for Z-axis positioning in precision measurement and research applications.

• encoder

Achieving nanometer precision positioning in a compact and cost-effective manner.

• Actuator
• Piezoelectric Devices
• encoder

Ideal for nano-precision assembly that cannot be achieved with conventional motor stages.

• Actuator
• Piezoelectric Devices
• encoder

Non-contact drive using air bearings and linear motors. Contributes to the acceleration and stabilization of substrate and component inspection.

• Other machine elements
• Cartesian Robot
• encoder

Supports optical system adjustments with nanometer-level precision.

• Other machine elements
• Other industrial robots
• encoder

100 µm stroke, sub-nanometer resolution, high-response focus scanner at 560 Hz with a load of 210 g.

• Actuator
• Piezoelectric Devices
• encoder

A compact yet high-precision reference-class 6-axis positioning system.

• Actuator
• Other industrial robots
• encoder

Achieving high-speed and high-precision wafer inspection with air levitation and linear motors.

• Other machine elements
• Cartesian Robot
• encoder

Optimize the manufacturing process with a compact yet high-precision 6-axis positioning system.

• Actuator
• Other industrial robots
• encoder

Piezo stage with an opening that achieves nano-level adjustments.

• Actuator
• Piezoelectric Devices
• encoder

Nano-level scanning supporting high magnification observation. Z-chip tilt piezo stage with a 66mm aperture.

• Actuator
• Piezoelectric Devices
• encoder

Achieving nano-level Z-chip tilt control. High-precision piezo stage with a 66mm aperture.

• Actuator
• Piezoelectric Devices
• encoder

30kg load capacity; ±0.1µm reproducibility of a 6-axis high-rigidity hexapod.

• Actuator
• Other industrial robots
• encoder