P-5x8 Piezo Stage with Z Chip Tilt Aperture for Precision Measurement
P-518・P-528 Piezo Z/Chip/Tilt Stage
Achieving nano-level Z-chip tilt control. High-precision piezo stage with a 66mm aperture.
In the field of precision measurement, even slight positional shifts or angular errors can significantly impact measurement results. This is especially true for the evaluation of fine structures and measurements using transmitted light, where nanometer-level resolution, high stability, and sufficient aperture diameter are required. The P-518/P-528 series is a high-precision piezo stage that combines a Z-axis stroke of 100µm/200µm with chip tilt control. Its large aperture design of 66mm accommodates transmitted light measurements, achieving high linearity and reproducibility. This contributes to improved reliability in precision measurements and alignment processes. [Application Scenarios] - Semiconductor inspection and evaluation equipment - Photonics/optical measurements - Microscope/interferometer systems - High-precision alignment applications [Benefits of Implementation] - High-precision Z and angular adjustments at the nanometer level - Compatibility with transmitted light measurements due to the 66mm aperture - Enhanced measurement reliability through high linearity and stability
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basic information
【Features】 - Available in 1-axis and 3-axis versions - Achieves closed-loop vertical/tilt range of up to 200μm/2mrad - Improved responsiveness and multi-axis precision control through parallel control/measurement structure - Frictionless precision flexure guide system - Long lifespan with PICMA(TM) piezo actuators - Center opening of 66 x 66mm - High linearity with capacitive sensors 【Our Strengths】 With over 50 years of experience in Germany and 30 years as a Japanese corporation, PI offers new solutions in precision positioning products. We provide positioning products such as piezo stages & actuators and hexapods. Additionally, we have expanded our lineup of linear motor-driven products and high-precision air bearing stages. Attention to the foundation is also crucial in positioning, and we offer granite bases, enabling us to propose composite systems. We provide comprehensive solutions for production sites worldwide, advanced equipment, and cutting-edge research across various fields. Please take a look.
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Applications/Examples of results
Application examples - Various measurements - Interferometer - Optics - Scanning microscope - Mass storage device testing - Laser technology - Micro-machining
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Company information
The German headquarters, with over 50 years of experience and 30 years as a Japanese corporation, presents new solutions from PI, a company specializing in precision positioning products. We offer the world's number one piezo stages and actuators, as well as hexapod positioning products. Additionally, we are enhancing our lineup of linear motor-driven products and high-precision air bearing stages. In positioning, attention to the foundation is also crucial, and we provide granite bases, enabling us to propose composite systems as well. Please take a look at our diverse lineup that provides cutting-edge technology to production sites around the world, advanced equipment, and various fields of cutting-edge research.
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