The nano-level motion amount is 100µm and 200µm on the Z-axis, with chip tilt axes of 1mrad and 2mrad, and is optimal for transmitted light with a 66mm aperture.
The P-5x8 series features the piezo nano stage P-518.TCD with chip tilt and the long-stroke version P-528.TCD/ZCD, both developed on the same platform. It achieves a system resolution of 0.8 nm and a linearity error of 0.03% using highly reliable PICMA piezo ceramics, flexure guides, parallel kinematics, and capacitive sensors. The large aperture of 66 × 66 mm is suitable for interferometric measurements and transmitted light applications, with a load capacity of 50N, making it ideal for semiconductor testing, photonics, microscopy, and high-precision alignment. *For more details, please download the PDF or contact us.
Inquire About This Product
basic information
- 1-axis and 3-axis versions - Achieves closed-loop vertical/tilt range of ~200μm/2mrad (open-loop ~240μm/2.4mrad) - Improved responsiveness through parallel control/measurement structure / precise multi-axis control - Frictionless precision flexure guide system - Remarkable long lifespan with PICMA(TM) piezo actuators - Center opening of 66 x 66mm - High linearity with capacitive sensors *For more details, please download the PDF or contact us.
Price information
Please feel free to contact us.
Delivery Time
※Please feel free to contact us.
Applications/Examples of results
Application examples - Various measurements - Interferometer - Optics - Scanning microscope - Mass storage device testing - Laser technology - Micro-machining
catalog（3）
Download All Catalogs
Company information
The German headquarters, with over 50 years of experience and 30 years as a Japanese corporation, presents new solutions from PI, a company specializing in precision positioning products. We offer the world's number one piezo stages and actuators, as well as hexapod positioning products. Additionally, we are enhancing our lineup of linear motor-driven products and high-precision air bearing stages. In positioning, attention to the foundation is also crucial, and we provide granite bases, enabling us to propose composite systems as well. Please take a look at our diverse lineup that provides cutting-edge technology to production sites around the world, advanced equipment, and various fields of cutting-edge research.