List of Piezoelectric Devices products

Reduce the workload from handling heavy objects! Here are five case studies that solved customer challenges! We are also accepting free consultations and tests tailored to your work!

• Other conveying machines

We can accommodate high resistance over 10,000 ohms, with diameters ranging from approximately 30 mm to 8 inches, and we also offer thinning and chip processing arrangements!

• Other semiconductors
• Processing Contract
• Wafer

Precision control of the beam with a high-speed response of 10 kHz. Tip/Tilt stage for laser processing.

• Other industrial robots
• Piezoelectric Devices
• Actuator

High-speed response of 10 kHz. Advanced beam control for optical communication with high-resolution 2-axis Tip/Tilt.

• Other industrial robots
• Piezoelectric Devices
• Actuator

Maximum 12 mm/s, 50 N high thrust. Sub-nanometer resolution PICMAWalk actuator ideal for semiconductor inspection processes.

• Actuator
• Piezoelectric Devices
• Solenoid Actuators

Resonant frequency of 10 kHz. A tip/tilt stage for photonics that achieves both high speed and high resolution.

• Other industrial robots
• Piezoelectric Devices
• Actuator

Achieved high-speed beam steering with a convergence of ±5 mrad × 3 ms and a resolution of 0.1 µrad.

• Other industrial robots
• Actuator
• Piezoelectric Devices

Piezo chip/tilt platform achieving high-angle control of ±35 mrad and fast response.

• Other industrial robots
• Actuator
• Piezoelectric Devices

Improving the accuracy and throughput of laser beam control with a large deflection angle and high-speed response.

• Other industrial robots
• Actuator
• Piezoelectric Devices

Achieving 90 µm stroke and sub-nanometer resolution positioning.

• Actuator
• Piezoelectric Devices
• Solenoid Actuators

Support for precision measurement calibration with sub-nanometer resolution positioning.

• Actuator
• Piezoelectric Devices
• Solenoid Actuators

High-load compatible, high-precision Z-focus scanner supporting high throughput in wafer inspection.

• Actuator
• Piezoelectric Devices
• encoder

High-load compatible sub-nanometer resolution focus scanner supporting nano-structure analysis

• Actuator
• Piezoelectric Devices
• encoder

100 µm stroke, 0.4 nm resolution, compatible with high-load objective lenses, high-speed and high-precision PIFOC focus scanner.

• Actuator
• Piezoelectric Devices
• encoder

Linear stage with a stroke of 25mm or more driven by piezo walk.

• Other machine elements
• Actuator
• Piezoelectric Devices

For high-precision positioning in optical applications. Compact size, 10 nm resolution, self-locking when powered off.

• Linear motor
• Piezoelectric Devices
• Actuator

Ideal for fine-tuning optical systems. High-precision nanopositioner with 0.1 nm resolution.

• Actuator
• Piezoelectric Devices
• encoder

Compact design with a 44 mm square. Piezo nano-positioning stage achieving a 120 µm operating range and 0.2 nm resolution.

• Piezoelectric Devices
• Actuator
• encoder

A 44mm square housing that achieves optical system focus adjustment at the nanometer level.

• Actuator
• Piezoelectric Devices
• encoder

A 44mm square casing that achieves height measurement at the nanometer level.

• Actuator
• Piezoelectric Devices
• encoder

Supports microscope scanning with low cost and compact design.

• Actuator
• Piezoelectric Devices
• encoder

Sub-millisecond response, sub-nanometer resolution. Ideal for beam control.

• Actuator
• Piezoelectric Devices
• Solenoid Actuators

44mm square, maximum stroke of 120µm, high-precision nanopositioner with 0.2nm resolution.

• Piezoelectric Devices
• Actuator
• encoder

Achieving nanometer precision positioning in a compact and cost-effective manner.

• Actuator
• Piezoelectric Devices
• encoder

Ideal for nano-precision assembly that cannot be achieved with conventional motor stages.

• Actuator
• Piezoelectric Devices
• encoder

Ultra-high rigidity × sub-nanometer resolution, ideal for fine adjustments in optical systems.

• Actuator
• Piezoelectric Devices
• Solenoid Actuators

Piezo actuators that achieve ultra-high rigidity, sub-nanometer resolution, humidity resistance, and long lifespan.

• Actuator
• Piezoelectric Devices
• Solenoid Actuators

Nano positioning with a maximum stroke of 35 µm and a minimum resolution of 0.1 nm.

• Actuator
• Piezoelectric Devices
• Solenoid Actuators

Compact piezo stage with a minimum resolution of 0.1 nm - for micro scanning under a microscope.

• Actuator
• Piezoelectric Devices
• Solenoid Actuators

Compact piezo stage with a minimum resolution of 0.1 nm and a maximum stroke of 38 µm.

• Actuator
• Piezoelectric Devices
• Solenoid Actuators

Compact piezo stage with a minimum resolution of 0.1 nm - for micro-positioning under a microscope.

• Actuator
• Piezoelectric Devices
• Solenoid Actuators

Compact piezo stage with a minimum resolution of 0.1 nm and a maximum stroke of 38 µm.

• Actuator
• Piezoelectric Devices
• Solenoid Actuators

High-precision Z-focus scanner for semiconductor inspection equipment with sub-nanometer resolution and maximum 800 µm stroke capability.

• Other machine elements
• Actuator
• Piezoelectric Devices

Sub-nanometer resolution, compatible with maximum 800 µm stroke, high-speed and high-precision PIFOC focus scanner.

• Other machine elements
• Actuator
• Piezoelectric Devices

Sub-nanometer resolution, Z-direction maximum stroke of 800 µm, equipped with a flexure mechanism focus scanner.

• Other machine elements
• Actuator
• Piezoelectric Devices

100 µm stroke, sub-nanometer resolution, high-response focus scanner at 560 Hz with a load of 210 g.

• Actuator
• Piezoelectric Devices
• encoder

90 µm stroke, µs response, sub-nanometer resolution positioning

• Actuator
• Piezoelectric Devices
• Solenoid Actuators

Ultra-high rigidity × sub-nanometer resolution, supporting precise operations in life science research.

• Actuator
• Piezoelectric Devices
• Solenoid Actuators

Ultra-high rigidity × sub-nanometer resolution, ideal for microscope focus control.

• Actuator
• Piezoelectric Devices
• Solenoid Actuators

Ultra-high rigidity × sub-nanometer resolution, achieving long lifespan even in harsh environments.

• Actuator
• Piezoelectric Devices
• Solenoid Actuators

Precise adjustment of lens position with sub-nanometer resolution.

• Actuator
• Piezoelectric Devices
• Solenoid Actuators

Maximum 90 µm stroke, high load capacity, sub-nanometer precision piezo actuator.

• Actuator
• Piezoelectric Devices
• Solenoid Actuators

High-precision nanopositioning with a maximum stroke of 35 µm and a resolution of 0.1 nm.

• Actuator
• Piezoelectric Devices
• Solenoid Actuators

High-precision nanopositioning stage optimal for bioanalysis

• Actuator
• Piezoelectric Devices
• Solenoid Actuators

Compact piezo stage with a minimum resolution of 0.1 nm and a maximum stroke of 38 µm.

• Actuator
• Piezoelectric Devices
• Solenoid Actuators

Compact piezo stage with a minimum resolution of 0.1 nm and a maximum stroke of 38 µm.

• Actuator
• Piezoelectric Devices
• Solenoid Actuators

Sub-nanometer resolution, focus scanner P-725.xCDE2 with a maximum movement of 800 µm.

• Other machine elements
• Actuator
• Piezoelectric Devices