A 44mm square casing that achieves height measurement at the nanometer level.
In the field of precision measurement, accurate height measurement is essential. Particularly in the measurement of fine structures and the precise profiling of surface shapes, nanometer-level accuracy is required. Conventional measurement methods are susceptible to the effects of vibrations and temperature changes, making accurate measurements difficult. The P-611.Z achieves a maximum resolution of 0.2nm and 0.1% linearity, addressing challenges in height measurement. 【Application Scenarios】 - Height measurement of semiconductor devices - Shape measurement of MEMS devices - Thickness measurement of optical components - Surface roughness measurement 【Benefits of Implementation】 - Enables height measurement at the nanometer level - Reduces measurement time - Improves measurement accuracy - Enhances product quality
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basic information
【Features】 - Compact design: Installation area is only 44 x 44mm - Stroke up to 120μm - Resolution up to 0.2nm - Frictionless precision flexure guide system - Long lifespan with PICMA(TM) piezo actuators 【Our Strengths】 Based on over 50 years of experience at our headquarters in Germany and 30 years of experience at our Japanese subsidiary, we provide piezo stages and actuators adopted by research institutions and equipment manufacturers worldwide, leveraging our precision control technology. With a rich lineup and technical expertise, we propose optimal solutions to meet our customers' needs.
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Applications/Examples of results
Application examples - Photonics / Integrated optics - Micro-machining - Semiconductor testing
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Company information
The German headquarters, with over 50 years of experience and 30 years as a Japanese corporation, presents new solutions from PI, a company specializing in precision positioning products. We offer the world's number one piezo stages and actuators, as well as hexapod positioning products. Additionally, we are enhancing our lineup of linear motor-driven products and high-precision air bearing stages. In positioning, attention to the foundation is also crucial, and we provide granite bases, enabling us to propose composite systems as well. Please take a look at our diverse lineup that provides cutting-edge technology to production sites around the world, advanced equipment, and various fields of cutting-edge research.
