0.1nm resolution compact X-axis piezo stage for nano positioning
P-620.1・P-629.1 PIHera Small X-axis Piezo Stage
Stabilizing nano-level measurements with 0.1nm resolution and high linearity.
In the field of nanotechnology measurement, precise positioning is extremely important. Observing fine structures, performing precise machining, and conducting advanced experiments require nanometer-level accuracy. Positioning errors can compromise the reliability of measurement results and hinder research progress. PI's 0.1nm resolution nanopositioner achieves high-precision positioning through built-in capacitive sensors and flexure guides, addressing these challenges. 【Application Scenarios】 - Scanning microscope samples - Optical alignment - Interferometric measurement 【Benefits of Implementation】 - Acquisition of high-precision measurement data - Improved reproducibility of experiments - Enhanced efficiency in research and development
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basic information
【Features】 - Stroke: 50 to 1800 μm - Resolution: 0.1 nm - Built-in capacitive sensor - Positioning accuracy: 0.02% - Frictionless high-precision flexure guide system 【Our Strengths】 Based on precision control technology cultivated over more than 50 years at our headquarters in Germany, we provide piezo stages and actuators adopted by research institutions and equipment manufacturers worldwide. With a rich lineup and technical expertise, we offer optimal solutions tailored to our customers' needs. For detailed product specifications, please refer to the catalog. If you have any questions, please feel free to contact us.
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Applications/Examples of results
Application examples - Interferometer - Inspection using a microscope - Nano positioning - Biotechnology - Quality assurance testing - Semiconductor technology
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The German headquarters, with over 50 years of experience and 30 years as a Japanese corporation, presents new solutions from PI, a company specializing in precision positioning products. We offer the world's number one piezo stages and actuators, as well as hexapod positioning products. Additionally, we are enhancing our lineup of linear motor-driven products and high-precision air bearing stages. In positioning, attention to the foundation is also crucial, and we provide granite bases, enabling us to propose composite systems as well. Please take a look at our diverse lineup that provides cutting-edge technology to production sites around the world, advanced equipment, and various fields of cutting-edge research.


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