High Load Objective Lens Focus Scanner P-726
P-726 PIFOC(R) High Load Objective Lens Scanner
A stroke of 100 µm, a system resolution of 0.4 nm, and a resonance frequency of 560 Hz even at a load of 210 g.
The P-726 is a PIFOC® high-load focus scanner that drives heavy high NA objective lenses with high speed and precision. It features built-in flexure guides and capacitive sensors, achieving an OpenLoop resolution of 0.3 nm and a linearity error of 0.02%. The resonance frequency is maintained at 1120 Hz without load and 560 Hz with a 210 g load, accelerating Z-scanning for semiconductor wafer inspection and confocal/super-resolution microscopy. It supports major thread sizes such as M32/M27 with the QuickLock adapter. *For more details, please download the PDF or contact us.*
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basic information
- High dynamic positioning/scanning with large objective lens - Resonant frequency 1120Hz (560Hz at 210g load) - Standard settling time approximately 6ms - Stroke 100μm - Achieves high linearity, stability, and dynamics through direct measurement with capacitive sensors - Resolution ~0.3nm - Improved focus stability with frictionless precision flexure guides *For more details, please contact us or refer to the catalog.
Price information
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Delivery Time
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Applications/Examples of results
Application examples - 3D images - Screening - Autofocus systems - Microscopes - Confocal microscopes - Surface shape analysis - Wafer inspection
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Company information
The German headquarters, with over 50 years of experience and 30 years as a Japanese corporation, presents new solutions from PI, a company specializing in precision positioning products. We offer the world's number one piezo stages and actuators, as well as hexapod positioning products. Additionally, we are enhancing our lineup of linear motor-driven products and high-precision air bearing stages. In positioning, attention to the foundation is also crucial, and we provide granite bases, enabling us to propose composite systems as well. Please take a look at our diverse lineup that provides cutting-edge technology to production sites around the world, advanced equipment, and various fields of cutting-edge research.
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