Sub-nanometer Z-axis nanopositioner P-620.Z to P-622.Z
P-620.Z - P-622.Z PIHera(TM) High-Precision Stage
0.1 nm resolution × 0.02% linearity. High-speed servo control of 50-250 µm with zero friction.
The PIHera P-620.Z/P-621.Z/P-622.Z is a Z-axis piezo stage that drives vertical strokes of 50, 100, and 250 µm with a resolution of 0.1 nm. The capacitive sensor directly measures the moving platform, suppressing linear errors to 0.02%. The zero-backlash flexure guide requires no lubrication and is dust-free, achieving a resonance frequency in the kHz range and sub-millisecond response. The actuator is an all-ceramic insulated PICMA(R) that has demonstrated a long lifespan of 10 billion cycles. It is ideal for Z-axis control in devices that require both sub-nanometer stability and high speed, such as interferometers, confocal microscopes, and semiconductor inspection. *For more details, please download the PDF or contact us.*
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basic information
- Vertical stroke: 50 to 400 μm - High precision, low cost - 0.1 nm resolution - Built-in capacitive sensor - 0.02% positioning accuracy - Frictionless precision flexure guide system - Amazing long lifespan with PICMA(TM) piezo actuators - Available in X, XY, Z, and XYZ versions - Vacuum-compatible version also available *For more details, please download the PDF or contact us.*
Price information
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Delivery Time
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Applications/Examples of results
Application examples - Interferometer - Microscopic examination - Nano positioning - Biotechnology - Quality assurance testing - Semiconductor technology
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Company information
The German headquarters, with over 50 years of experience and 30 years as a Japanese corporation, presents new solutions from PI, a company specializing in precision positioning products. We offer the world's number one piezo stages and actuators, as well as hexapod positioning products. Additionally, we are enhancing our lineup of linear motor-driven products and high-precision air bearing stages. In positioning, attention to the foundation is also crucial, and we provide granite bases, enabling us to propose composite systems as well. Please take a look at our diverse lineup that provides cutting-edge technology to production sites around the world, advanced equipment, and various fields of cutting-edge research.