Achieves high-speed and high-precision operation with high rigidity and less than 1µm of eccentricity and flatness, equipped with an opening.
The Direct Drive High-Precision Rotary Stage V-62x is a frictionless torque motor-driven stage equipped with a high-resolution encoder. It achieves excellent rotational accuracy (eccentricity and flatness <1 µm) and minimal tilt error (±20 µrad), making it ideal for applications that require advanced alignment and rotational control. The platform diameter ranges from 85 mm to 210 mm and supports installation in any orientation. It can be utilized in a wide range of fields, including optics, semiconductors, and biomedical applications.
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basic information
- Efficient dynamic performance through direct drive - Motion platform with diameters of 85 mm, 110 mm, and 210 mm - Eccentricity and flatness < 1 μm - Slim design *For more details, please refer to the catalog or feel free to contact us.
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Applications/Examples of results
- Sample inspection - Precision micro-assembly - Research - Biotechnology - Semiconductor inspection and measurement - Automation - Device assembly - Laser microfabrication - Sensor calibration and testing *For more details, please refer to the catalog or feel free to contact us.*
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Company information
The German headquarters, with over 50 years of experience and 30 years as a Japanese corporation, presents new solutions from PI, a company specializing in precision positioning products. We offer the world's number one piezo stages and actuators, as well as hexapod positioning products. Additionally, we are enhancing our lineup of linear motor-driven products and high-precision air bearing stages. In positioning, attention to the foundation is also crucial, and we provide granite bases, enabling us to propose composite systems as well. Please take a look at our diverse lineup that provides cutting-edge technology to production sites around the world, advanced equipment, and various fields of cutting-edge research.