Direct Drive High Precision Rotary Stage for Laser Processing
V-62x High-Precision Rotation Stage with Direct Drive
High-rigidity rotary stage with an opening, achieving less than 1µm of eccentricity and flatness with high speed and high precision.
In the laser processing industry, high precision positioning and stable operation are required. Particularly in fine processing and precise pattern formation, misalignment and vibrations significantly affect processing accuracy. The Direct Drive High Precision Rotary Stage V-62x series contributes to improving the accuracy of laser processing with eccentricity and flatness of less than 1µm. 【Application Scenarios】 - Angle-dependent fine pattern processing - Prototype processing of optical and precision components - Development of laser processing processes and condition verification 【Effects of Implementation】 - Improvement in processing accuracy and quality - Enhanced reproducibility of fine processing - Increased reliability of processing processes
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**Features** - Efficient dynamic performance through direct drive - Motion platform diameters of 85 mm, 110 mm, and 210 mm - Eccentricity and flatness < 1 μm - Slim design **Our Strengths** Based on over 50 years of experience at our headquarters in Germany and 30 years of experience in our Japanese subsidiary, we provide optimal positioning solutions tailored to our customers' needs. We offer a wide range of products, including piezo stages, as well as peripheral equipment such as granite bases, and we can also propose complex systems.
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Applications/Examples of results
- Sample inspection - Precision micro-assembly - Research - Biotechnology - Semiconductor inspection and measurement - Automation - Device assembly - Laser microfabrication - Sensor calibration and testing *For more details, please refer to the catalog or feel free to contact us.*
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The German headquarters, with over 50 years of experience and 30 years as a Japanese corporation, presents new solutions from PI, a company specializing in precision positioning products. We offer the world's number one piezo stages and actuators, as well as hexapod positioning products. Additionally, we are enhancing our lineup of linear motor-driven products and high-precision air bearing stages. In positioning, attention to the foundation is also crucial, and we provide granite bases, enabling us to propose composite systems as well. Please take a look at our diverse lineup that provides cutting-edge technology to production sites around the world, advanced equipment, and various fields of cutting-edge research.







