0.1 nm resolution nanopositioner P-620.1/629.1
PIHera(R) Piezo Linear Stage P-620.1 to P-629.1
Type with a stroke of 50 to 1800 µm, high-resolution operation with capacitive sensors.
The PIHera P-620.1/629.1 series is a one-axis nanopositioner that combines a flexure guide with PICMA® piezo technology. It has a stroke range of 50 to 1800 µm, a minimum resolution of 0.1 nm, and achieves a linearity error of 0.02% by measuring the actual moving parts with an integrated capacitive sensor. The flexure guide has no wear parts, offers high rigidity, excellent straightness, and outstanding long-term stability. It can also be expanded to X, XY, Z, and XYZ configurations, making it ideal for applications such as microscope sample scanning, optical alignment, and interferometric measurements. *For more details, please download the PDF or contact us.*
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basic information
- Stroke 50 to 1800 μm - High precision, low cost - 0.1 nm resolution - Built-in capacitive sensor - 0.02% positioning accuracy - Frictionless high-precision flexure guide system - Amazing long lifespan with PICMA(TM) piezo actuators - X, XY, Z, and XYZ versions - Vacuum-compatible version also available *For more details, please download the PDF or contact us.*
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Delivery Time
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Applications/Examples of results
Application examples - Interferometer - Inspection using a microscope - Nano positioning - Biotechnology - Quality assurance testing - Semiconductor technology
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Company information
The German headquarters, with over 50 years of experience and 30 years as a Japanese corporation, presents new solutions from PI, a company specializing in precision positioning products. We offer the world's number one piezo stages and actuators, as well as hexapod positioning products. Additionally, we are enhancing our lineup of linear motor-driven products and high-precision air bearing stages. In positioning, attention to the foundation is also crucial, and we provide granite bases, enabling us to propose composite systems as well. Please take a look at our diverse lineup that provides cutting-edge technology to production sites around the world, advanced equipment, and various fields of cutting-edge research.