[Piezostage for Semiconductor Manufacturing] XYZ Axis P-616

For fine position correction of semiconductor devices. 100 µm × 3-axis nanopositioner.

In semiconductor processes and inspection equipment, position correction and focus adjustment at the submicron level are key to stabilizing quality. Particularly in inspection and fine processing stages, high-precision position control with nanometer resolution is required. The P-616 NanoCube is a compact XYZ piezo nano positioner with a stroke of 100 µm on each axis. Its high-rigidity flexure guide structure enables smooth operation without backlash, allowing for fine position adjustments with nanometer resolution. It is suitable for applications such as fine motion correction stages in semiconductor manufacturing equipment and integration into inspection devices. 【Application Scenarios】 - Fine position correction for wafer inspection equipment - Mask inspection processes - Focus adjustment for laser annealing devices - Fine motion control for probing equipment - Semiconductor research and development applications 【Benefits of Implementation】 - High-precision position correction with nanometer resolution - High reproducibility due to backlash-free structure - Easy integration into devices with compact design - Contributes to the stabilization of fine processes

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