List of Cartesian Robot products

Reduce the workload from handling heavy objects! Here are five case studies that solved customer challenges! We are also accepting free consultations and tests tailored to your work!

• Other conveying machines

We can accommodate high resistance over 10,000 ohms, with diameters ranging from approximately 30 mm to 8 inches, and we also offer thinning and chip processing arrangements!

• Other semiconductors
• Processing Contract
• Wafer

Zero friction, high-precision positioning. Revolutionizing the adjustment work of optical devices.

• Other machine elements
• Cartesian Robot
• encoder

Improving the precision of laser cutting. Achieving high-precision positioning of ±0.2 µm.

• Other machine elements
• Cartesian Robot
• encoder

Zero friction, high-precision positioning. Contributes to quality improvement in the FPD inspection process.

• Other machine elements
• Cartesian Robot
• encoder

A compact air bearing stage that achieves zero friction and high-precision positioning.

• Other machine elements
• Cartesian Robot
• encoder

Zero wear with air levitation and linear motor. Maximum speed 2m/s, sensor resolution 1nm.

• Other machine elements
• Cartesian Robot
• encoder

It is possible to configure combinations that match the required number of axes and operational specifications according to the application.

• Linear motor
• Actuator
• Cartesian Robot

A compact linear stage with a size of 60mm square, capable of combinations along the XYZ axes.

• Actuator
• Cartesian Robot
• encoder

Zero friction. Achieving high-precision positioning of ±0.2 µm within a movement range of 25 mm.

• Other machine elements
• Cartesian Robot
• encoder

XY stage that improves the precision and efficiency of lens adjustment.

• Other machine elements
• Cartesian Robot
• encoder

XY stage contributing to the efficiency and accuracy improvement of calibration work.

• Other machine elements
• Cartesian Robot
• encoder

In the laser processing cutting process. Achieving high-precision positioning and high-speed movement.

• Other machine elements
• Cartesian Robot
• encoder

Smooth and high-speed response even under high load of 600N (maximum) with linear motor × encoder.

• Linear motor
• Actuator
• Cartesian Robot

For precise adjustment of optical systems. Air bearing stage that achieves high-precision positioning.

• Other machine elements
• Cartesian Robot
• encoder

Air bearing stage that supports high-precision calibration work.

• Other machine elements
• Cartesian Robot
• encoder

Optimal for optical alignment! High-precision positioning linear motor XY axis stage.

• Linear motor
• Actuator
• Cartesian Robot

Contributes to the efficiency and stability of the assembly process with a compact, high-rigidity design and selectable motors (DC motor or stepping motor).

• Actuator
• Cartesian Robot
• encoder

Non-contact, wear-free, and long-lasting, achieving smooth operation at the nanometer level.

• Other machine elements
• Cartesian Robot
• encoder

High-speed and high-precision wafer inspection is achieved by V-P01.

• Other machine elements
• Cartesian Robot
• encoder

XY stage supporting high-speed and high-precision experiments.

• Other machine elements
• Cartesian Robot
• encoder

A thin, high-precision linear motor stage that enables high-speed electronic component mounting.

• Linear motor
• Actuator
• Cartesian Robot

Non-contact drive using air bearings and linear motors. Contributes to the acceleration and stabilization of substrate and component inspection.

• Other machine elements
• Cartesian Robot
• encoder

Achieving high-speed and high-precision wafer inspection with air levitation and linear motors.

• Other machine elements
• Cartesian Robot
• encoder

Ideal for microscope sample positioning with a maximum stroke of 1800µm and excellent accuracy provided by capacitive sensors.

• Other machine elements
• Piezoelectric Devices
• Cartesian Robot

Ideal for cell manipulation and live cell observation. Achieves stable XY positioning with sub-nanometer precision.

• Other machine elements
• Piezoelectric Devices
• Cartesian Robot

PIMars XYZ Nano Stage that achieves sample positioning for microscopes with nanometer precision.

• Actuator
• Piezoelectric Devices
• Cartesian Robot

PIMars precision nano stage that achieves probe positioning with sub-nanometer accuracy.

• Actuator
• Piezoelectric Devices
• Cartesian Robot

Reproducibility ±1nm, XY axis 100µm stroke. High-precision nanopositioner ideal for transmitted light optical systems.

• Actuator
• Piezoelectric Devices
• Cartesian Robot

Reproducibility ±1nm, XY axis 100µm stroke. High-precision nanopositioner for semiconductor manufacturing equipment.

• Actuator
• Piezoelectric Devices
• Cartesian Robot

Compact linear stage with built-in limit switch and DC stepping motor!

• Actuator
• Cartesian Robot
• encoder

Reproducibility ±1nm, XY axis 100 µm + Z axis 10 µm stroke, optimal for transmitted light with a 50 mm aperture.

• Actuator
• Piezoelectric Devices
• Cartesian Robot

High-resolution incremental linear encoder! The unidirectional reproducibility is 0.1μm.

• Linear motor
• Actuator
• Cartesian Robot

Achieve high stability with a distortion-free aluminum base! High specifications unique to German manufacturing!

• Actuator
• Cartesian Robot
• encoder

100 µm × 3 axes. A compact XYZ piezo stage that achieves optical alignment with nanometer precision.

• Actuator
• Cartesian Robot
• Piezoelectric Devices

Compact XYZ piezo stage with 100 µm × 3-axis for supporting nanoscale position control.

• Actuator
• Cartesian Robot
• Piezoelectric Devices

A 100 µm × 3-axis nanopositioner supporting the focus and position control of fine laser processing.

• Actuator
• Cartesian Robot
• Piezoelectric Devices

Smooth and high-speed response even under high load of 600N with linear motor × high-precision encoder.

• Linear motor
• Actuator
• Cartesian Robot

Flexible combination of axis configuration and specifications according to the application.

• Linear motor
• Actuator
• Cartesian Robot

Compact linear stage with a size of 60mm square, compatible with XYZ axes.

• Actuator
• Cartesian Robot
• encoder

Compact linear stage compatible with XYZ axis, size 60mm square.

• Actuator
• Cartesian Robot
• encoder

High-precision positioning stage ideal for laser cutting and laser processing.

• Actuator
• Cartesian Robot
• encoder

For fine position correction of semiconductor devices. 100 µm × 3-axis nanopositioner.

• Actuator
• Cartesian Robot
• Piezoelectric Devices

A compact XYZ piezo stage with a size of 100 µm × 3 axes that supports high magnification observation with nanometer resolution.

• Actuator
• Cartesian Robot
• Piezoelectric Devices

High-Precision XY Stage V-P01 for Microscope Observation and Automatic Imaging

• Other machine elements
• Cartesian Robot
• encoder

Linear motor stage with a maximum stroke of 800mm, achieving high-speed and high-precision transport.

• Other machine elements
• Linear motor
• Cartesian Robot

High-speed 4 m/s × high resolution to enhance the precision of positioning in research and development.

• Other machine elements
• Linear motor
• Cartesian Robot