High-load linear stage for wafer processing and inspection in semiconductor manufacturing.
V-817 High Load Linear Stage
Smooth and high-speed response even under high load of 600N (maximum) with linear motor × encoder.
In the semiconductor manufacturing industry, high precision and stability are required for the positioning of wafers and masks. Particularly in fine processing and inspection processes, even slight misalignment in positioning can significantly affect product quality. The V-817 provides high-precision positioning and long-term stability, contributing to yield improvement. 【Application Scenarios】 - Wafer processing - Precision inspection - Laser processing 【Benefits of Implementation】 - Positioning reproducibility at the 2 µm level - Dust reduction through non-contact drive - Achievement of long-term stability
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【Features】 - Low profile (height 63 mm), width 166 mm, long stroke (maximum 813 mm) - High dynamics, maintenance-free linear motor and high-precision incremental linear encoder - High-precision incremental linear encoder - Maximum load capacity of 600N - High-speed integration with reference edge, easy stacking in XY 【Our Strengths】 Based on over 50 years of experience at our headquarters in Germany and 30 years of experience in our Japanese subsidiary, we provide piezo stages and actuators adopted by research institutions and equipment manufacturers worldwide, leveraging our precision control technology. With a rich lineup and technical expertise, we propose optimal solutions tailored to our customers' needs.
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Applications/Examples of results
- Electronic Device Assembly: Sensor and camera assembly, non-contact inspection, X-ray inspection, AOI (Automated Optical Inspection), sensor inspection, ultrasonic inspection - Semiconductor Manufacturing: Wafer processing and inspection - Laser Processing: Laser welding - Others: Applications requiring high dynamics in high-precision automation, smooth scanning motion, minimal tracking error, and short settling time
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Company information
The German headquarters, with over 50 years of experience and 30 years as a Japanese corporation, presents new solutions from PI, a company specializing in precision positioning products. We offer the world's number one piezo stages and actuators, as well as hexapod positioning products. Additionally, we are enhancing our lineup of linear motor-driven products and high-precision air bearing stages. In positioning, attention to the foundation is also crucial, and we provide granite bases, enabling us to propose composite systems as well. Please take a look at our diverse lineup that provides cutting-edge technology to production sites around the world, advanced equipment, and various fields of cutting-edge research.
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