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  3. Control and Electrical Equipment
  4. Process Control Equipment
  5. Other process controls
  6. High-precision linear stage "True Nano Positioning"

High-precision linear stage "True Nano Positioning"

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last updated:Dec 15, 2015

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[Demo unit available] Improved repeatability! A linear stage capable of position control at the nano level, minimizing errors. Usable in both upright and inverted positions!

The "True Nano Positioning" that we handle is a linear stage that pursues high precision with position control at the nanometer level. It can draw free curves in 3D with a 6-axis stage. With our unique 6D precision, we can measure the error between the target position and the actual position compared to traditional 2D based on ISO, and by minimizing this error, we achieve true nanometer-level repeatability. 【Features】 ■ Free combination of X-Y-Z-θx-θy-θz ■ True nanometer precision achieved through 6D Precision ■ Option for XY orthogonality of 1 arc second available ■ Vacuum option available *For more details, please download the catalog or contact us.

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High-precision linear stage "True Nano Positioning"

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  • Related Link - http://www.autex-inc.co.jp/index.html
  • Special site - Product/service details - https://pr.mono.ipros.com/autex-inc/product/

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Main Product Lineup ■ Air Bearing Z Stage ■ Thin Hollow XY Stage ■ Compact XYZθ Stage *For more details, please download the catalog or contact us.

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High-precision linear stage "Hybrid Hexapod" series

High-precision linear stage "Hybrid Hexapod" series

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Electronic Components and Semiconductors

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■ Manufacturing and sales of laser equipment and its application devices and parts, as well as import and export operations ■ Manufacturing and sales of electrical and electronic equipment and its application devices and parts, as well as import and export operations ■ Sales of optical equipment and its application devices and parts, as well as import and export operations ■ Manufacturing and sales of medical, physical, and measuring instruments and their application devices and parts, as well as import and export operations ■ Manufacturing and sales of adhesives, adhesive tapes, adhesive sheets, and their equipment and devices, as well as import and export operations ■ All operations incidental to the above items

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