Air Bearing Rotary Stage A-62x for Semiconductor Manufacturing
A-62x PIglide RM Rotation Stage with Air Bearings
Innovating the semiconductor manufacturing process with nanometer-level precision.
In the semiconductor manufacturing industry, high-precision positioning is a crucial factor that affects yield and product quality. Particularly in wafer inspection and exposure processes, accurate positioning at the nanometer level is required. Conventional rotary stages can cause minor vibrations and eccentricities due to friction, which may lead to a decline in quality. The PIglide A-62x series addresses these challenges with its frictionless air bearing technology. 【Application Scenarios】 - Wafer inspection - Exposure equipment - Precision measurement 【Benefits of Implementation】 - Improved yield through high-precision positioning - Stabilization of product quality - Increased productivity
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basic information
【Features】 - Zero friction non-contact rotation - Flatness and eccentricity below 200nm - Rapid positioning with torque motor and absolute encoder - Cleanroom compatible - Can be installed horizontally or vertically 【Our Strengths】 Based on over 50 years of experience at our headquarters in Germany and 30 years of experience in our Japanese subsidiary, we provide optimal solutions tailored to our customers' needs. We support problem-solving for our customers with a wide range of product offerings, including piezo stages, and specialized technical support.
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Applications/Examples of results
- Alignment adjustment of precision optical components - High-precision rotation stage in measurement equipment - Inspection process for optical communication components - Calibration device for image sensors - Constant-speed rotating scan of wafers and optical elements - Nano-precision positioning in a clean room *For more details, please refer to the catalog or feel free to contact us.*
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Company information
The German headquarters, with over 50 years of experience and 30 years as a Japanese corporation, presents new solutions from PI, a company specializing in precision positioning products. We offer the world's number one piezo stages and actuators, as well as hexapod positioning products. Additionally, we are enhancing our lineup of linear motor-driven products and high-precision air bearing stages. In positioning, attention to the foundation is also crucial, and we provide granite bases, enabling us to propose composite systems as well. Please take a look at our diverse lineup that provides cutting-edge technology to production sites around the world, advanced equipment, and various fields of cutting-edge research.
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