Zero wear with air levitation and linear motor. Maximum speed 2m/s, sensor resolution 1nm.
The PIglide IS A-311 is an air-bearing XY planar scanner that levitates the stage drive surface using air. With a flat structure thinner than stacked types, it achieves a compact device design while operating over a wide scanning range of 300 mm × 400 mm and a sensor resolution of 1 nm. The frictionless linear motor drive contributes to a high-speed response of up to 2 m/s and a load capacity of 147 N, aiding in reducing cycle times for laser processing and semiconductor wafer inspection. Its dust-free structure is suitable for clean rooms, and a rich array of controllers/APIs facilitates the integration of XY synchronization and area scanning. For more details, please download the PDF or contact us.
Inquire About This Product
Related Videos
basic information
- Ideal for scanning applications and high-precision positioning - Cleanroom compatible - Movement range of 300mm x 300mm - Load capacity of up to 147N - Resolution of up to 1nm *For more details, please download the PDF or contact us.
Price range
Delivery Time
Applications/Examples of results
Laser processing scanning
catalog（3）
Download All Catalogs
News about this product（2）
Company information
The German headquarters, with over 50 years of experience and 30 years as a Japanese corporation, presents new solutions from PI, a company specializing in precision positioning products. We offer the world's number one piezo stages and actuators, as well as hexapod positioning products. Additionally, we are enhancing our lineup of linear motor-driven products and high-precision air bearing stages. In positioning, attention to the foundation is also crucial, and we provide granite bases, enabling us to propose composite systems as well. Please take a look at our diverse lineup that provides cutting-edge technology to production sites around the world, advanced equipment, and various fields of cutting-edge research.
![[For efficient water drainage] 100% water-draining air nozzle](https://image.mono.ipros.com/public/product/image/00f/2001469742/IPROS9319730289540870960.png?w=280&h=280)
![[For Hospitals] Monitor Arm Compatible with Fukuda Denshi DS8400](https://image.mono.ipros.com/public/product/image/2049780/IPROS5074021837160184342.jpg?w=280&h=280)