Achieving fine positioning with a maximum stroke of 1800µm and nanometer precision.
The P-620.2 to P-629.2 PIHera® series is an XY-axis piezo nano-positioning stage that employs long-life PICMA® actuators. With closed-loop control using capacitive sensors, it achieves excellent linearity and stability. It offers high resolution of less than 1nm and bidirectional repeatability of ±0.2nm, making it reliable for use in applications that require high reliability, such as quality assurance testing and semiconductor inspection. The housing is extremely compact, making it ideal for integration into devices.
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basic information
- Stroke of 50 to 1800μm - High-precision flexure guide system with no friction - Long lifespan with PICMA® piezo actuators - Available in X, XY, Z, and XYZ versions *For more details, please refer to the catalog or feel free to contact us.
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Applications/Examples of results
- Phase shift control in interferometers - Sample position adjustment for confocal/atomic force microscopy - Alignment and scan control at the nanoscale - Precision positioning and assembly of photonic devices - Semiconductor pattern inspection and quality assurance processes - Tracking/active stabilization stages in optical and bio fields *For more details, please refer to the catalog or feel free to contact us.*
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Company information
The German headquarters, with over 50 years of experience and 30 years as a Japanese corporation, presents new solutions from PI, a company specializing in precision positioning products. We offer the world's number one piezo stages and actuators, as well as hexapod positioning products. Additionally, we are enhancing our lineup of linear motor-driven products and high-precision air bearing stages. In positioning, attention to the foundation is also crucial, and we provide granite bases, enabling us to propose composite systems as well. Please take a look at our diverse lineup that provides cutting-edge technology to production sites around the world, advanced equipment, and various fields of cutting-edge research.