Integrated structure with zero-friction flexure guide - capable of XY axis, XYZ axis, and XYθz axis motion.
The P-517/527 multi-axis piezo scanner uses zero-wear flexure guides, PICMA piezo ceramics, and capacitive sensors to achieve nanometer-level reproducibility and resolution. The available motion axes include XY, XYZ, and XYθz types. The XY axis has options of 100µm and 200µm, the Z axis is 20µm, and θz is 2mrad. It has a load capacity of 50N, making it ideal for applications such as optical inspection, wafer inspection, nanopositioning, measurement, and microscopy. It also allows for transmitted light with an aperture of 50 × 50mm. *For more details, please download the PDF or contact us.
Inquire About This Product
basic information
- 2-axis and 3-axis versions (XY and XYθZ) - Stroke up to 200μm - Sub-nanometer resolution - Frictionless high-precision flexure guide system - High linearity with capacitive sensors - Improved responsiveness through parallel control/measurement structure / precise multi-axis control - Center opening 66 x 66mm - Amazing long lifespan with PICMA(TM) piezo actuators *For more details, please download the PDF or contact us.
Price information
Please feel free to contact us.
Delivery Time
※Please feel free to contact us.
Applications/Examples of results
Application examples - Metrology - Interferometer - Optics - Lithography - Nano positioning - Scanning microscope - Mass storage device testing - Laser technology - Micro machining
catalog（4）
Download All Catalogs
Company information
The German headquarters, with over 50 years of experience and 30 years as a Japanese corporation, presents new solutions from PI, a company specializing in precision positioning products. We offer the world's number one piezo stages and actuators, as well as hexapod positioning products. Additionally, we are enhancing our lineup of linear motor-driven products and high-precision air bearing stages. In positioning, attention to the foundation is also crucial, and we provide granite bases, enabling us to propose composite systems as well. Please take a look at our diverse lineup that provides cutting-edge technology to production sites around the world, advanced equipment, and various fields of cutting-edge research.