Zero-friction flexure guide integrated structure. Improved calibration accuracy with high reproducibility nano-positioning.
In the field of measurement, calibration and fine positioning require high reproducibility and stable positioning performance. Especially in measurements and alignments at the nanoscale, even slight backlash or friction can affect the reliability of the measurement results. The P-517/P-527 multi-axis piezo scanner adopts an integrated structure with frictionless flexure guides, minimizing hysteresis and mechanical play. With nanometer-level resolution and high reproducibility, it contributes to improving the accuracy of calibration work and precise measurements. Stable operating characteristics also contribute to ensuring long-term measurement reliability. 【Application Scenarios】 - Optical inspection equipment - Wafer inspection and measurement equipment - Nano-positioning applications - Precision measurement systems - Microscopes and scanning systems 【Benefits of Implementation】 - Improved calibration accuracy due to high reproducibility - Stable measurement environment due to frictionless structure - Enhanced reliability of measurement data and strengthened quality control
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basic information
**Features** - 2-axis and 3-axis versions (XY and XYθZ) - Stroke up to 200μm - Sub-nanometer resolution - Frictionless high-precision flexure guide system - High linearity with capacitive sensors **Our Strengths** PI, headquartered in Germany with over 50 years of experience, offers the world's number one share of piezo stages and actuators. We provide optimal solutions tailored to our customers' needs.
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Applications/Examples of results
Application examples - Metrology - Interferometer - Optics - Lithography - Nano-positioning - Scanning microscope - Mass storage device testing - Laser technology - Micro-machining
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Company information
The German headquarters, with over 50 years of experience and 30 years as a Japanese corporation, presents new solutions from PI, a company specializing in precision positioning products. We offer the world's number one piezo stages and actuators, as well as hexapod positioning products. Additionally, we are enhancing our lineup of linear motor-driven products and high-precision air bearing stages. In positioning, attention to the foundation is also crucial, and we provide granite bases, enabling us to propose composite systems as well. Please take a look at our diverse lineup that provides cutting-edge technology to production sites around the world, advanced equipment, and various fields of cutting-edge research.
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