Frictionless flexure guide integrated structure. High-performance scanner supporting precision machining at the nano level.
In the field of precision machining, further miniaturization and quality enhancement are progressing, with positioning accuracy at the nano level becoming a crucial factor that influences product performance. Particularly in laser processing and micro-patterning, even slight errors caused by vibrations and friction directly affect processing quality. The P-517/P-527 multi-axis piezo scanner adopts a frictionless flexure guide integrated structure, eliminating backlash and wear. With PICMA piezo ceramics and high-resolution capacitive sensors, it achieves nano-level reproducibility and high dynamics. Its stable high-speed response enables precise position control in micro-machining, contributing to improved processing quality and yield. 【Application Scenarios】 - Laser micro-machining equipment - Micro-patterning - Wafer processing and inspection equipment - Nano-positioning applications - Precision measurement and machining systems 【Benefits of Implementation】 - Nano-level high-precision machining control - Improved processing quality due to stable operation - Reduced processing time and increased productivity - Cost reduction through improved yield
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basic information
**Features** - 2-axis and 3-axis versions (XY and XYθZ) - Stroke up to 200μm - Sub-nanometer resolution - Frictionless high-precision flexure guide system - High linearity with capacitive sensors **Our Strengths** Leveraging over 50 years of experience from our headquarters in Germany and 30 years of experience from our Japanese subsidiary, we provide optimal precision positioning solutions tailored to our customers' needs. We offer a diverse product lineup, including piezo stages and actuators, as well as peripheral equipment such as granite tables, to support our customers in solving their challenges.
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Applications/Examples of results
Application examples - Metrology - Interferometer - Optics - Lithography - Nano positioning - Scanning microscope - Mass storage device testing - Laser technology - Micro machining
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Company information
The German headquarters, with over 50 years of experience and 30 years as a Japanese corporation, presents new solutions from PI, a company specializing in precision positioning products. We offer the world's number one piezo stages and actuators, as well as hexapod positioning products. Additionally, we are enhancing our lineup of linear motor-driven products and high-precision air bearing stages. In positioning, attention to the foundation is also crucial, and we provide granite bases, enabling us to propose composite systems as well. Please take a look at our diverse lineup that provides cutting-edge technology to production sites around the world, advanced equipment, and various fields of cutting-edge research.
![[For Measurement] Aperture 50mm Piezo Scanner P-517/527](https://image.mono.ipros.com/public/product/image/311014/IPROS5640812223458587889.jpg?w=280&h=280)
