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PI Japan

EstablishmentJapanese Corporation: 1991 Germany Headquarters: 1977
addressKanagawa/Kawasaki-shi, Saiwai-ku/580 Horikawacho, Solid Square West Building, 17th Floor
phone044-280-7676
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last updated:Mar 05, 2026
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PI Japan Product Lineup

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1~45 item / All 57 items

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Electric motor Electric motor
ピエゾアクチュエーター・コンポーネント ピエゾアクチュエーター・コンポーネント
ステアリングミラー ステアリングミラー
新製品 新製品
コントローラー コントローラー
ピエゾフレクシャステージ/高速スキャニングシステム ピエゾフレクシャステージ/高速スキャニングシステム
エアベアリング エアベアリング
静電容量センサー 静電容量センサー
Precision granite products Precision granite products
Piezo positioning system Piezo positioning system
Piesomota Piesomota
XY stage XY stage
Linear stage Linear stage
Linear actuator Linear actuator
Piezo drive Piezo drive
6-axis system 6-axis system
Motorized positioning Motorized positioning
ピエゾフレクシャステージ/高速スキャニングシステム

ピエゾフレクシャステージ/高速スキャニングシステム

サブナノメートル分解能を実現するピーアイのピエゾナノポジショニングステージ。摩擦ゼロのフレクシャーガイドで高速・高精度位置決めを実現。

High-Speed Tip/Tilt Piezo Stage S-331 for Laser Processing

Precision control of the beam with a high-speed response of 10 kHz. Tip/Tilt stage for laser processing.

In laser processing, even slight variations in the angle and position of the beam directly affect processing accuracy and finish quality. This is especially true in fine processing and high-speed scanning processes, where a beam control mechanism that combines high-speed responsiveness and high resolution is essential. The S-331 is a high-speed Tip/Tilt piezo stage equipped with a maximum resonance frequency of 10 kHz and an operating angle of ±5 mrad. Its excellent dynamic performance enables real-time beam correction, reducing focus shift and processing unevenness. It contributes to the establishment of a high-precision and stable laser processing process. 【Application Scenarios】 - High-speed steering of laser beams - Precision processing such as fine drilling and grooving - Real-time beam correction during processing - High-precision alignment control 【Benefits of Implementation】 - Improved processing accuracy and reproducibility - Enhanced processing efficiency due to high-speed responsiveness - Reduced processing unevenness and improved yield - Advancement of equipment performance

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High-Speed Tip/Tilt Piezo Stage for Optical Communication S-331

High-speed response of 10 kHz. Advanced beam control for optical communication with high-resolution 2-axis Tip/Tilt.

In the field of optical communication, the angle control precision and response speed of beams in optical fiber coupling and free-space optical communication significantly affect communication quality. Even slight misalignments or vibrations can lead to decreased coupling efficiency and link instability, making a high-speed and high-resolution correction mechanism essential. The S-331 is a two-axis tip/tilt piezo stage with a high resonance frequency of up to 10 kHz and an operating angle of ±5 mrad. Its excellent dynamic performance enables real-time beam correction, supporting the stabilization of optical signals and high-efficiency coupling. It contributes to the high reliability of next-generation optical communication systems. 【Application Scenarios】 - High-precision alignment of optical fibers - Free-space optical communication (FSO) - Laser beam steering - Stabilization control of optical links 【Benefits of Implementation】 - High-speed and high-precision beam angle control - Improved coupling efficiency and reduced losses - Stabilization of communication through real-time correction - Overall performance enhancement of the system

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High-Speed Tip/Tilt Piezo Stage S-331 for Photonics

Resonant frequency of 10 kHz. A tip/tilt stage for photonics that achieves both high speed and high resolution.

In the field of photonics, the angle control and position stability of laser beams greatly influence coupling efficiency and system performance. Particularly in fiber coupling, beam steering, and high-speed correction control, high responsiveness, resolution, and excellent dynamic characteristics are essential. The S-331 is a high-speed Tip/Tilt piezo stage boasting a maximum resonance frequency of 10 kHz. It achieves both high resolution and fast response, enabling real-time beam correction and precise angle control. It contributes to improved focusing efficiency and stable operation in photonics systems. 【Application Scenarios】 - Laser beam steering - High-efficiency coupling to optical fibers - High-speed beam correction control - Optical alignment/stabilization applications 【Benefits of Implementation】 - High-speed and high-precision beam angle control - Improved coupling efficiency and reduced losses - Stabilization through real-time correction - Maximization of photonics device performance

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High-speed Tip/Tilt Piezo Stage S-331

Motion angle: ±5 mrad (optical ±10 mrad), dynamic & high resolution & high-speed operation due to a resonance frequency of 10 kHz.

2-axis Tip/Tilt platform for high-speed beam steering. With a parallel kinematic design and strain gauge position sensors, it enables feedback control for high-speed and high-precision positioning and dynamic operation. Ideal for applications requiring high dynamics, such as laser beam stabilization, image stabilization, and satellite optical communication. *For more details, please download the PDF or contact us.

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S-335 Chip/Tilt Piezo Platform for Scanning Microscopy

Piezo chip/tilt platform achieving high-angle control of ±35 mrad and fast response.

The S-335 Chip/Tilt Piezo Platform is a high-performance stage that achieves both large deflection angles and high dynamic response. It enables high-precision angle control without friction or backlash through piezoelectric elements, and realizes equivalent high performance with a two-axis parallel kinematics design. It is ideal for applications such as microscope scanning, high-speed imaging, and beam steering, supporting stable and high-precision operation. For detailed performance, please refer to the catalog. 【Application Scenes】 - Laser scanning microscopy - High-speed sample scanning and optical imaging - Beam steering/scanning control - Image processing/beam stabilization devices 【Benefits of Implementation】 - Achieves a wide scanning range with ±35 mrad high angle control - Enables high-speed step and settle due to high dynamic performance - High reliability with high-precision angle control without friction or backlash

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S-335 chip/tilt piezo platform with ~70 mrad

±5 mrad × 3 ms convergence, 10 kHz resonance -- high-speed beam steering with 0.1 µrad resolution.

The resonance frequency of 0.7 kHz (with a 1-inch mirror) enables dynamic movement and fast step & settling. Parallel kinematic design: A two-axis orthogonal platform with a single common pivot point, available without a mirror, with a 1/2-inch mirror, or with a 1-inch mirror type. Ideal for applications requiring high-speed and high-precision deflection, such as image stabilization, laser beam control, and optical communication. *For more details, please download the PDF or contact us.

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Small XY Axis Piezo Stage P-620.2~P-629.2

Achieving fine positioning with a maximum stroke of 1800µm and nanometer precision.

The P-620.2 to P-629.2 PIHera® series is an XY-axis piezo nano-positioning stage that employs long-life PICMA® actuators. With closed-loop control using capacitive sensors, it achieves excellent linearity and stability. It offers high resolution of less than 1nm and bidirectional repeatability of ±0.2nm, making it reliable for use in applications that require high reliability, such as quality assurance testing and semiconductor inspection. The housing is extremely compact, making it ideal for integration into devices.

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P-734 XY Piezo Scanner

A high dynamic system with a center opening that suppresses vibration to the limit. It achieves a linear stroke of 100 x 100 μm.

The P-734 high dynamic XY piezo nano positioning stage achieves a linear stroke of 100 x 100 μm with sub-nanometer resolution and high flatness of motion. 【Features】 ○ Ultra-precise trajectory control ideal for surface shape analysis and scanning microscopy ○ Improved responsiveness through parallel control/measurement and multi-axis precision control ○ Stroke: 100 x 100 μm, center opening of 56 x 56 mm ○ Achieves a resolution of 0.4 nm with capacitive sensors ○ Incredible long lifespan with PICMA(TM) piezo actuators ● For more details, please contact us or refer to the catalog.

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Piezonano Actuator P-753 for Microscopes

Compact piezo stage with a minimum resolution of 0.1 nm - for micro scanning under a microscope.

In microscopy applications, a stage that can stably position samples and optical systems at the nanometer level is required. The P-753 LISA is a linear piezo stage with a stroke of 15 to 38 µm (depending on the model) and a minimum resolution of 0.1 nm (when using the appropriate controller). Its flexure guide structure enables smooth operation without friction or backlash. It is suitable for micro-scanning and position correction of samples in microscopy systems. 【Usage Scenarios】 - Micro-scanning of samples using a microscope - Fine adjustment of focus position - Position correction during high-resolution observation Positioning at micro and nano scales 【Benefits of Implementation】 - Nanometer-level positioning resolution - High reproducibility operation without backlash - Compact design suitable for device integration - Stable control of minute displacements

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Piezo Nano Actuator P-753 for Precision Measurement

Compact piezo stage with a minimum resolution of 0.1 nm and a maximum stroke of 38 µm.

In the field of precision measurement, calibration and micro-positioning corrections require nanometer-level resolution and high reproducibility. The P-753 LISA is a linear piezo stage equipped with a stroke of 15 to 38 µm (depending on the model) and a minimum resolution of 0.1 nm (when using the appropriate controller). Its flexure guide structure enables smooth operation without friction or backlash. It provides stable nanopositioning for calibration processes of measuring instruments and micro-displacement control applications. 【Usage Scenarios】 - Calibration of precision measurement instruments - Micro-position adjustments in sensor evaluation - Reference movement in displacement and position measurement systems - Fine-tuning of optical measurement systems 【Benefits of Implementation】 - Nanometer-level positioning resolution - High reproducibility operation without backlash - Stabilization of micro-displacement control - Suitability for device integration due to compact design

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0.1 nm resolution piezo nano actuator P-753

15–38 µm stroke, 0.1 nm resolution, compact high-speed response piezo stage

P-753 is a one-axis piezo nano positioning stage that controls a travel range of 15 to 38 µm with a resolution of 0.1 nm. By measuring the actual movable part with a two-electrode capacitive sensor and utilizing a frictionless structure with flexure guides, it achieves nanometer-level motion and positioning within a few milliseconds. *For more details, please download the PDF or contact us.*

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Piezo Nano Actuator P-753 for Nanotechnology

Compact piezo stage with a minimum resolution of 0.1 nm and a maximum stroke of 38 µm.

In the field of nanotechnology, positioning mechanisms with nanometer-level resolution and high reproducibility are required. The P-753 LISA is a linear piezo stage equipped with a stroke of 15 to 38 µm (depending on the model) and a minimum resolution of 0.1 nm (when used with the appropriate controller). Its flexure guide structure enables smooth operation without friction or backlash. It is suitable for research and development applications that require sample positioning adjustments and micro-displacement control at the nanoscale. 【Application Scenarios】 - Position control for scanning probe microscopy (SPM) - Micro-positioning in nano-lithography - Precision alignment in microfabrication processes - Evaluation of nanomaterials and surface analysis 【Benefits of Implementation】 - Nanometer-level positioning resolution - High reproducibility operation without backlash - Compact design suitable for device integration - Stable micro-displacement control

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Piezonano Actuator P-753 for Optical Adjustment

Compact piezo stage with a minimum resolution of 0.1 nm and a maximum stroke of 38 µm.

In optical system adjustments, it is required to stably control the optical axis and the positions of optical elements with minute precision. The P-753 LISA is a linear piezo stage equipped with a stroke of 15 to 38 µm (depending on the model) and a minimum resolution of 0.1 nm (when using the appropriate controller). Its flexure guide structure enables smooth operation without friction or backlash. It is suitable for micro-position correction and alignment applications in microscopes, laser optical systems, and interferometers. 【Application Scenarios】 - Adjustment of the objective lens position in optical microscopes - Fine-tuning of laser beams - Optical fiber alignment - Slit position adjustment in spectrometers - Mirror position correction in interferometers 【Benefits of Implementation】 - Nanometer-level positioning resolution - High reproducibility operation without backlash - Compact design suitable for device integration - Stabilization of micro-position corrections

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Piezo Nano Actuator P-753 for Biotechnology

Compact piezo stage with a minimum resolution of 0.1 nm - for micro-positioning under a microscope.

In the field of biotechnology, cell observation and micromanipulation require positioning stages that can stably control minute displacements. The P-753 LISA is a compact linear piezo stage equipped with a stroke of 15 to 38 µm (depending on the model) and a minimum resolution of 0.1 nm (when used with an appropriate controller). Its flexure guide structure enables smooth operation without friction or backlash. It supports nanometer-level positioning for integration into microscope systems and for fine adjustment of small samples. 【Application Scenarios】 - Fine adjustment of samples under a microscope - Focus and position correction during cell observation - Micromanipulation applications - Precision positioning of bio-samples 【Benefits of Implementation】 - Nanometer-level positioning resolution - High reproducibility operation without backlash - Suitability for device integration due to compact design

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Piezonanoactuator P-753 for Photonics

Compact piezo stage with a minimum resolution of 0.1 nm and a maximum stroke of 38 µm.

In the field of photonics, positioning of optical elements and optical fibers requires nanometer-level resolution and high reproducibility. The P-753 LISA is a compact linear piezo stage equipped with a stroke of 15 to 38 µm (depending on the model) and a minimum resolution of 0.1 nm (when using the appropriate controller). Its flexure guide structure enables smooth operation without friction or backlash. It provides stable nanopositioning for optical alignment and micro-position correction applications. 【Application Scenarios】 - Optical fiber alignment - Optical fiber alignment - Fine adjustment and position correction of optical elements - Precision positioning of laser beam paths - Evaluation of photonic devices 【Benefits of Implementation】 - Nanometer-level positioning resolution - High reproducibility operation without backlash - Suitability for device integration due to compact design

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Nano Positioning Stage P-752 for Nanotechnology

Nano positioning with a maximum stroke of 35 µm and a minimum resolution of 0.1 nm.

In the field of nanotechnology, the fabrication and evaluation of structures require positioning resolution at the nanometer level and high reproducibility. The P-752 is a linear piezo flexure stage equipped with a maximum stroke of 35 µm and a minimum resolution of 0.1 nm (when used with the appropriate controller). Its flexure guide structure enables smooth operation without friction or backlash, achieving high straightness. It provides stable micro-displacement control for research and development applications that require positioning control at the nanoscale. 【Application Scenarios】 - Micro-positioning in nanostructure fabrication - Sample/probe position control in scanning probe microscopy (SPM) - Precision alignment in microfabrication processes - Evaluation of nanomaterials and surface analysis 【Benefits of Implementation】 - Nanometer-level positioning resolution - High reproducibility operation without backlash - Stabilization of micro-displacement control

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Nano Positioning Stage P-752 for Measurement Instruments

High-precision nanopositioning with a maximum stroke of 35 µm and a resolution of 0.1 nm.

In the field of measurement and evaluation, calibration and micro-positioning require nanometer-level resolution and high positional reproducibility. The P-752 is a linear piezo flexure stage equipped with a maximum stroke of 35 µm and a minimum resolution of 0.1 nm (when used with an appropriate controller). Its flexure guide structure enables smooth operation without friction or backlash, achieving high straightness. This supports stable micro-positioning in the calibration and evaluation processes of precision measurement instruments. 【Application Scenarios】 - Calibration and performance evaluation of precision measurement instruments - Alignment and positional correction of optical systems - Micro-displacement control in sensor evaluation and material testing 【Benefits of Implementation】 - Nanometer-level positioning resolution - High reproducibility operation without backlash - Stabilization of measurement accuracy through stable micro-displacement control

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Nano Positioning Stage P-752 for Biotechnology

High-precision nanopositioning stage optimal for bioanalysis

The P-752 is a high-precision piezo nano positioning stage with a maximum stroke of 35 µm and a maximum resolution of 0.1 nm. Its flexure guide structure and high-resolution capacitive sensors (closed-loop specification) achieve high reproducibility and stability while minimizing the effects of hysteresis. It provides reliable positioning performance in the field of biotechnology, where nanometer precision is required for applications such as cellular-level observation and manipulation of fine samples. 【Application Scenarios】 - Precision focusing in fluorescence microscopy and confocal microscopy - Nanoscale position control of cells and organoids - Micromanipulation - Biosensor evaluation and nano-level alignment 【Benefits of Implementation】 - High-precision positioning with a maximum resolution of 0.1 nm - High reproducibility and stability through closed-loop control - Compatibility for integration into microscopes and analytical devices due to compact design - Improved measurement efficiency through fast response

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0.1 nm resolution nanopositioning stage P-752

High-speed piezo stage with a maximum stroke of 35 µm, a resolution of 0.1 nm, and a load capacity of 10 N.

The P-752 is an excellent single-axis nanopositioning stage with a flexure guide structure that incorporates a two-electrode capacitive sensor, achieving zero friction and outstanding straightness (pitch and yaw error ±1μrad), with an open-loop resolution of 0.1nm. Additionally, the built-in capacitive sensor measures the actual moving parts non-contactly at a sub-nanometer level, providing higher linearity and hysteresis compensation, ensuring long-term stability. *For more details, please download the PDF or contact us.*

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P-611.1 Piezo Nanopositioner

A compact linear positioning system with a low price and a footprint of only 44 x 44 mm.

The P-611.1 piezo stage is a flexure guide nanopositioning system with a footprint of just 44 x 44 mm. 【Features】 ○ Compact design: footprint of only 44 x 44 mm ○ Stroke up to 120 μm ○ Resolution up to 0.2 nm ○ Low-cost mechanism/electronic system configuration ○ Incredible long lifespan with PICMA(TM) piezo actuators ○ Available in Z stage, XY, XZ, and XYZ versions ● For more details, please contact us or refer to the catalog.

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Sub-nanometer Z-axis nanopositioner P-620.Z to P-622.Z

0.1 nm resolution × 0.02% linearity. High-speed servo control of 50-250 µm with zero friction.

The PIHera P-620.Z/P-621.Z/P-622.Z is a Z-axis piezo stage that drives vertical strokes of 50, 100, and 250 µm with a resolution of 0.1 nm. The capacitive sensor directly measures the moving platform, suppressing linear errors to 0.02%. The zero-backlash flexure guide requires no lubrication and is dust-free, achieving a resonance frequency in the kHz range and sub-millisecond response. The actuator is an all-ceramic insulated PICMA(R) that has demonstrated a long lifespan of 10 billion cycles. It is ideal for Z-axis control in devices that require both sub-nanometer stability and high speed, such as interferometers, confocal microscopes, and semiconductor inspection. *For more details, please download the PDF or contact us.*

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Direct Position Measurement / Clear Aperture Compatible P-733Z

High-rigidity piezo Z-stage achieving 0.3 nm resolution and high-speed response.

The P-733.Z is a high-stiffness piezo Z nano-positioning stage that combines nanometer-level resolution with high-speed response performance. It features a travel range of 100µm and a clear aperture of 50×50mm, making it suitable for applications such as positioning in microscopes and masks/wafers. Non-contact capacitive sensors enable measurements with sub-nanometer resolution. It also achieves a maximum resolution of 0.3nm and high repeatability. The flexure guide structure eliminates wear and backlash, allowing for stable high-precision positioning over long periods. It employs PI's proprietary PICMA(R) actuators, achieving up to 10 times the lifespan compared to conventional polymer-insulated actuators.

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[P-725.xCDE2 Focus Scanner for Semiconductor Inspection]

High-precision Z-focus scanner for semiconductor inspection equipment with sub-nanometer resolution and maximum 800 µm stroke capability.

In semiconductor inspection equipment, high-resolution Z-axis position control and rapid step motion are required for detecting fine defects and evaluating 3D focus. The P-725.xCDE2 PIFOC focus scanner is a high-precision actuator that achieves sub-nanometer resolution with a maximum focus range of 800 µm. By combining the PICMA piezo actuator with a flexure guide mechanism that incorporates capacitive sensors, high linearity, reproducibility, and stability are realized. This enables high-precision control of Z focus and high-speed scanning in semiconductor inspection, contributing to improved accuracy in the inspection process and enhanced throughput of the equipment. [Application Scenarios] - Z focus control for wafer surface defect inspection - High-resolution imaging in chip and package inspection - High-speed Z scanning in optical and laser-based inspection equipment - Defect analysis using optical inspection and confocal optical microscopy [Benefits of Implementation] - Improved measurement accuracy through high-precision focus control - Enhanced inspection throughput due to rapid Z step motion - Increased reliability of the equipment with stable long-term operation

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Long Stroke Objective Focus for Optical Measurement P-725.xCDE2

Sub-nanometer resolution, compatible with maximum 800 µm stroke, high-speed and high-precision PIFOC focus scanner.

In the field of optical measurement, the focus accuracy and stability of the detection position are directly linked to the precision of the results in optical imaging and precise measurement. Applications that require evaluation of fine structures or high-speed data acquisition demand high-resolution focus control and responsive operational performance. The P-725.xCDE2 PIFOC focus scanner achieves sub-nanometer resolution position control with a maximum stroke of 800 µm. Equipped with PICMA piezo actuators and high-precision capacitive sensors in a flexure guide mechanism, it provides high linearity and reproducibility in Z-direction focus adjustment for optical measurement devices. This helps to minimize the impact of focus position shifts in optical measurements, contributing to improved measurement accuracy and device yield. 【Use Cases】 - High-precision measurements with confocal microscopy - High-speed Z-scanning in multiphoton microscopy - High-resolution imaging evaluation devices - Optical interferometers and phase measurement devices 【Benefits of Implementation】 - Sub-nanometer resolution focus control - Wide measurement range with a maximum stroke of 800 µm - Reduced inspection and measurement time due to high-speed response - Long-term stability through PIFOC/flexure structure

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[P-725.xCDE2 for Biotechnology]

Sub-nanometer resolution, Z-direction maximum stroke of 800 µm, equipped with a flexure mechanism focus scanner.

In the field of biotechnology, precise focus control is essential for high-resolution observation of the fine structures of cells and tissues in microscopic imaging applications. This is particularly true for 3D imaging techniques such as confocal microscopy and multiphoton microscopy, where high resolution and fast responsiveness along the Z-axis (focus direction) directly impact observation accuracy. The P-725.xCDE2 PIFOC Focus Scanner employs a flexure guide mechanism with PICMA piezo actuators and capacitive sensors to achieve precise focus control with sub-nanometer resolution. It also supports a maximum stroke of 800 µm, enabling fast and high-precision scanning over a wide range in the depth direction. These characteristics help reduce observation time while minimizing focus position shifts, ultimately contributing to improved reliability and efficiency of experiments. 【Application Scenes】 - Confocal microscopy - Multiphoton microscopy - 3D imaging - Live cell imaging - High-throughput microscopy screening 【Benefits of Implementation】 - High-precision Z-direction focus control - Expanded range of focus stroke - Improved observation efficiency through fast scanning - Stable imaging quality

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Objective Focus for Nanotechnology P-725.xCDE2

Sub-nanometer resolution, focus scanner P-725.xCDE2 with a maximum movement of 800 µm.

In the field of nanotechnology, high-resolution and stable focus position control is required for the observation and evaluation of nanoscale structures. The P-725.xCDE2 PIFOC is a focus scanner for objective lenses that features a maximum travel range of 800 µm (depending on the model) and sub-nanometer resolution (when used with the appropriate controller). It achieves smooth Z-axis motion without friction or backlash through a piezo actuator and flexure guide mechanism. It is suitable for focus adjustment and Z-scan applications at the nanoscale in microscopy systems. 【Application Scenarios】 - Z-scanning in confocal microscopy - Focus position control in multiphoton microscopy - Height adjustment in semiconductor wafer inspection - Precise focus control during the observation of nanostructures 【Benefits of Implementation】 - Sub-nanometer resolution focus position control - High reproducibility motion without backlash - Wide Z travel range of up to 800 µm (depending on the model) - Flexure guide structure with no wear parts

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Maximum 800µm long stroke objective focus P-725.xCDE2

Sub-nanometer resolution, maximum operation of 800 µm, high-speed and high-precision PIFOC(R) focus scanner.

The P-725.xCDE2 is a focus scanner for objective lenses that employs a flexure guide structure and PICMA® piezo technology. The capacitive sensor achieves sub-nanometer resolution and 0.02% linearity, maintaining high precision even with long strokes of 100 / 400 / 800 µm. With zero wear parts and no need for lubrication, it offers a long lifespan. It contributes to the acceleration of Z-step in confocal and multiphoton microscopy as well as semiconductor inspection. *For more details, please download the PDF or contact us.

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P-726 Piezo Stage for Objective Lenses in Biotechnology

100 µm stroke, sub-nanometer resolution, high-response focus scanner at 560 Hz with a load of 210 g.

In the field of biotechnology, cell observation is affected by minute focus fluctuations that impact image quality. The P-726 PIFOC is a high-load-capable focus scanner with a Z stroke of 100 µm and sub-nanometer resolution. Direct position feedback from a capacitive sensor and a flexure guide structure ensure high positioning accuracy and reproducibility. Furthermore, it maintains high dynamic performance with a resonance frequency of 560 Hz at a load of 210 g, even when equipped with high NA objective lenses. The fast settling time (approximately 6 ms) enhances the efficiency of Z-stack acquisition and focus scanning. 【Application Scenarios】 - Confocal microscopy - Super-resolution microscopy - Live cell imaging - 3D imaging with Z-stack acquisition 【Benefits of Implementation】 - Improved image stability through high-precision focus control - Enhanced measurement efficiency due to fast Z response - Increased design flexibility of optical systems due to high load capacity - High reproducibility in focus positioning

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Optical High Load Objective Lens Focus Scanner P-726

100 µm stroke, 0.4 nm resolution, compatible with high-load objective lenses, high-speed and high-precision PIFOC focus scanner.

In the focus control of objective lenses in optical instruments and measurement devices, high-precision Z positioning and fast response are required. Particularly when the objective lens is large and has a high numerical aperture (NA), conventional mechanisms face challenges in operational response and stability, which can affect measurement accuracy and observation quality. The P-726 PIFOC high-load objective lens focus scanner achieves high-precision focus control with sub-nanometer resolution obtained through direct measurement using capacitive sensors, with a maximum stroke of 100 µm. Additionally, the flexure guide structure eliminates friction and backlash, maintaining high rigidity and stability even under high-load conditions. This enhances the accuracy and throughput of optical measurement devices, increasing the reliability of measurements and observations. [Application Scenarios] - Precision focus control of objective lenses - Z-scanning for confocal microscopes and super-resolution microscopes - 3D optical imaging devices - High-precision optical measurement devices (interferometers, autofocus systems) [Benefits of Implementation] - Improved optical measurement accuracy through high-precision Z position control - Reduced inspection and observation time due to fast operational response - High-load performance compatible with heavy lenses - Long-term stability and low maintenance requirements

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Lens Focus Scanner P-726 for Nanotechnology

High-load compatible sub-nanometer resolution focus scanner supporting nano-structure analysis

In the field of nanotechnology structural analysis, high-precision Z-direction focus control at the nanoscale is essential. The P-726 PIFOC is a high-load compatible focus scanner that achieves a stroke of 100 µm and sub-nanometer resolution (approximately 0.3 nm class). Direct feedback from a capacitive sensor and a flexure guide structure provide high positioning accuracy and reproducibility. Its high-speed settling performance of about 6 ms contributes to the efficiency of nanostructure observation and 3D imaging involving Z-scanning. 【Application Scenarios】 - Nanostructure observation using confocal microscopy - Z-scanning in super-resolution optical microscopy - Optical nanostructure analysis devices - 3D imaging evaluation devices 【Benefits of Implementation】 - High-precision focus control with sub-nanometer resolution - Improved measurement efficiency due to high-speed settling - Increased design flexibility of optical systems due to high load compatibility - Enhanced reproducibility through long-term stable operation

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Lens Focus Scanner P-726 for Semiconductor Wafer Inspection

High-load compatible, high-precision Z-focus scanner supporting high throughput in wafer inspection.

In semiconductor wafer inspection, high-resolution Z-axis focus control and fast responsiveness are required to stably detect fine defects. Particularly in optical inspection systems using high NA objectives, focus accuracy and reproducibility are directly linked to the reliability of inspection results. The P-726 PIFOC high-load objective lens focus scanner achieves a Z stroke of up to 100 µm with sub-nanometer resolution in position control. Direct position feedback from a capacitive sensor and a flexure guide structure provide high linearity, repeatability, and long-term stability. Furthermore, its high-speed settling performance of approximately 6 ms contributes to the optimization of inspection processes involving Z-step movements. Due to its high-load design, stable operation is possible even when using high NA objectives or additional optical components. [Application Scenarios] - Z focus control in optical inspection of semiconductor wafer surfaces - Defect analysis equipment using high NA objectives - Three-dimensional inspection using confocal optical systems - Z scanning in laser and optical interference inspection devices [Benefits of Implementation] - Improved measurement stability through high-precision focus control - Reduced Z step time due to high-speed settling - Increased design flexibility of optical systems due to high-load capability

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High Load Objective Lens Focus Scanner P-726

A stroke of 100 µm, a system resolution of 0.4 nm, and a resonance frequency of 560 Hz even at a load of 210 g.

The P-726 is a PIFOC® high-load focus scanner that drives heavy high NA objective lenses with high speed and precision. It features built-in flexure guides and capacitive sensors, achieving an OpenLoop resolution of 0.3 nm and a linearity error of 0.02%. The resonance frequency is maintained at 1120 Hz without load and 560 Hz with a 210 g load, accelerating Z-scanning for semiconductor wafer inspection and confocal/super-resolution microscopy. It supports major thread sizes such as M32/M27 with the QuickLock adapter. *For more details, please download the PDF or contact us.*

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V-308 High Precision Z-Axis Focus Stage for Laser Processing

Minimum 10 nm resolution. High-precision Z-axis focus control of the laser processing head.

In the field of laser processing, precise control of the focal position greatly influences processing quality. Particularly in fine processing and high-precision marking, even slight focal variations in the Z-axis can affect processing width and energy density. The V-308 Voice Coil PIFOC is a Z-axis focus drive with a minimum resolution of 10 nm and a maximum travel range of 7 mm. Its direct drive system enables smooth and fast response, supporting precise focus control for laser processing heads and optical systems. Additionally, it can accommodate heavy optical modules with a gravity compensation function of up to 1 kg. 【Application Scenarios】 - Focus control for laser marking devices - Z-axis positioning for laser fine processing equipment - Focus correction for galvanometer scanner optical systems - Laser processing systems for research and development 【Benefits of Implementation】 - Stabilization of processing quality through improved focus control accuracy - Optimization of processing processes due to high-speed response - Stable optical system control through weight compensation function - Enhanced reproducibility in fine processing

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Gravity compensation up to 1kg Voice coil focus stage V-308

High-precision Z-axis supporting fine observation with a minimum movement of 10nm, maximum travel of 7mm, and passive holding up to 1kg.

The V-308 is a Z-axis focus stage that combines voice coil direct drive and cross roller guides. With a minimum increment of 10 nm and an adjustable stroke of 7 mm, it allows for optimization of the focal position of optical systems at the nanometer level. It provides high reliability for multiphoton and deep tissue imaging using large-diameter lenses or long working distance lenses. The high rigidity structure of the cross roller guide and the 10 nm resolution encoder ensure smooth nanopositioning across the entire 7 mm range. For more details, please download the PDF or contact us.

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Voice Coil Focus Stage V-308 for Semiconductor Manufacturing

Minimum 10 nm resolution, maximum 7 mm stroke. Achieving high-precision Z-axis focus control for semiconductor devices.

In the semiconductor manufacturing field, with the advancement of miniaturization, high-precision position control in the Z-axis direction during inspection, measurement, and exposure processes is becoming increasingly important. Even slight variations in focal position can impact inspection accuracy and process stability. The V-308 Voice Coil PIFOC is a Z-axis focus drive with a minimum resolution of 10 nm and a maximum travel range of 7 mm. Its gravity compensation feature supports stable positioning even for heavy optical systems and objective lenses, with a capacity of up to 1 kg. The direct drive system provides smooth and fast responsiveness along with high reproducibility, supporting precise focus control in semiconductor manufacturing equipment. 【Application Scenarios】 - Autofocus control for wafer inspection equipment - Z-axis positioning for optical measurement devices - Focus correction for mask inspection equipment - Fine pattern inspection processes 【Benefits of Implementation】 - Improved inspection accuracy through nano-level focus control - Stable holding of optical systems due to weight compensation features - Enhanced inspection throughput due to fast response - Improved process stability

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V-308 High-Precision Z-Axis Focus Stage for Optical Microscopes

Minimum 10nm operation, maximum 7mm movement, supports up to 1kg. High-precision Z-axis supporting fine observation.

In the field of optical microscopy, precise focus adjustment is essential for clearly capturing the fine structures of the observation target. Particularly in high-magnification observations and multiphoton/deep tissue imaging, optimizing the focal position at the nanoscale greatly influences the quality of the observation. If the precision of focus adjustment is low, the observed image may become blurred, making accurate data acquisition difficult. The V-308 optimizes the focal position of the optical system at the nanoscale with a minimum increment of 10 nm and an adjustable stroke of 7 mm, providing clear observation images. 【Usage Scenarios】 - Observation of fine structures with optical microscopes - Multiphoton and deep tissue imaging - Use of large-diameter lenses and long working distance lenses 【Benefits of Implementation】 - Achieving clear observation images through accurate focus adjustment at the nanoscale - Improved reliability of observation data - Enhanced experimental efficiency

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V-308 Focus Stage for Biotechnology

Enhancing the accuracy of cell observation and deep imaging — Nano-precision Z-axis focus stage

In the field of biotechnology, particularly in microscopic observation and deep tissue imaging, it is important to position the target area with high precision along the Z-axis and optimize the focus. The V-308 Voice Coil PIFOC is a high-precision focus stage that allows for fine adjustments of the objective lens or sample position in minimum steps of 10 nm. With an adjustment range of up to 7 mm and high-rigidity guides, it provides stable nano-positioning even under various observation conditions, including long working distance lenses. Additionally, it features built-in weight compensation for loads of up to 1 kg, accommodating heavy optical systems such as objective lenses and adapters. 【Application Scenes】 - Focus adjustment using high-magnification microscopes - Z-direction scanning for multiphoton fluorescence and deep tissue imaging - High-speed autofocus in automated microscope systems 【Benefits of Implementation】 - Acquisition of high-resolution images through nano-level focus control - Improved stability and reproducibility due to high-rigidity structure - Reduction of the impact of objective lens weight through gravity compensation

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P-737 PIFOC Sample Focusing Z Stage

Thin long-stroke piezo Z nanopositioner for microscope specimens. Stroke up to 250μm (customizable up to 500μm).

The PIFOC(R) P-737 high-speed vertical positioning system is designed for use with XY stages in microscope inspection. 【Features】 ○ High-speed piezo operation in the vertical direction: Stroke up to 250μm (customizable up to 500μm) ○ Nanometer resolution ○ Accommodates specimen holding with a large central opening ○ Mechanically compatible with manual or motor-driven XY OEM stages ○ Response time in the millisecond range ● For more details, please contact us or refer to the catalog.

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P-737 Sample Focusing Z Stage for Microscopes

High-precision PIFOC Z stage for achieving high-speed focusing in microscopes.

In the field of research using microscopes, high-speed and high-precision focusing significantly impacts the quality of observation results and the reproducibility of acquired data. Particularly in 3D imaging and Z-stack acquisition using confocal and fluorescence microscopes, high-speed Z positioning with nanometer resolution is required. The P-737 PIFOC Z stage employs a piezo-flexure structure that directly drives the objective lens, achieving high-speed response and high-precision Z-axis control. Its compact design makes it easy to integrate into existing microscope systems, meeting the advanced focusing requirements in research applications. 【Usage Scenarios】 - 3D imaging with confocal microscopes - Z-stack acquisition with fluorescence microscopes - Live cell imaging - Observation of nanoscale structures 【Benefits of Implementation】 - Reduced measurement time through high-speed Z scanning - High-precision focusing with nanometer resolution - Highly reproducible imaging - Easy integration into microscope systems

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P-737 PIFOC Z Stage for Biotechnology

High-speed, high-resolution piezo Z-focusing stage supporting live cell observation.

In the fields of life sciences and biotechnology, stable focusing during microscopic observation greatly affects the reproducibility of acquired data and the accuracy of analysis. Particularly in live cell imaging and 3D observation, high-speed and high-resolution Z-axis control is required. The P-737 PIFOC Z stage employs a piezo-flexure mechanism that directly drives the objective lens, achieving high-speed Z positioning with nanometer resolution. Depending on the model, it can secure sufficient stroke length, making it suitable for Z-stack acquisition and long-duration observations. Its compact design also allows for easy integration into existing microscope systems. 【Usage Scenarios】 - Live cell imaging - 3D observation using confocal microscopy - Cell culture and tissue observation 【Benefits of Implementation】 - Reduced measurement time through high-speed Z scanning - Precise focusing with nanometer resolution - Highly reproducible imaging - Easy integration into microscope systems

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P-736 PiNano Piezo Z Stage for Z-axis Microscope

Piezo Z-stage for high-speed focus control in the 100µm/200µm range

The P-736 is a high-precision piezo Z-stage optimized for microscopy applications. It features a travel range of 100µm or 200µm, enabling fast step motion and excellent settling performance for focus control and high-speed Z-scanning in microscopes. Its slim design (approximately 20mm in height) facilitates easy integration into microscope systems. It employs non-contact capacitive sensors for position feedback, achieving nanometer-level resolution and high repeatability. The drive unit utilizes PI's proprietary PICMA® piezo actuators, ensuring high reliability and long lifespan, as well as dynamic Z-axis control with fast response.

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[Piezostage P-616 for Nanotechnology] XYZ Axis

Compact XYZ piezo stage with 100 µm × 3-axis for supporting nanoscale position control.

In the field of nanotechnology, the precision of sample and probe positioning significantly affects the reproducibility of experimental results. Scanning Probe Microscopy (SPM) and nano-lithography applications require stable XYZ control with nanometer resolution. The P-616 NanoCube is a compact XYZ piezo nanopositioner with a stroke of 100 µm on each axis. Its high-rigidity flexure guide structure enables smooth operation without backlash, allowing for high-precision positioning at nanometer resolution. It is utilized as a positioning control platform that supports nanoscale measurement, processing, and evaluation, catering to both research applications and device integration. 【Application Scenarios】 - Scanning Probe Microscopy (SPM/AFM/STM) - Nano-lithography equipment - Nano material evaluation - Nano device research and development - High-precision sample positioning 【Benefits of Implementation】 - High-precision position control with nanometer resolution - High reproducibility due to backlash-free structure - Stable scanning enabled by high-rigidity design - Compact design facilitates integration into vacuum systems and research equipment

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XYZ Axis Piezo Stage P-616 for Laser Processing

A 100 µm × 3-axis nanopositioner supporting the focus and position control of fine laser processing.

In laser microfabrication, even slight deviations in beam position or focus directly affect processing quality. This is especially true for microfabrication and high aspect ratio processing, where precise position control at the sub-micron level is essential. The P-616 NanoCube is a compact XYZ piezo nanopositioner with 100 µm stroke on each axis. Its high-rigidity flexure guide structure enables backlash-free, highly linear motion, allowing for fine position adjustments with nanometer resolution. By integrating it into laser processing equipment, it supports: - Fine adjustment of beam position - High-precision control of focus position - Correction of processing position to enhance the stability of microfabrication. 【Application Scenarios】 - Integration into laser microfabrication equipment - Precise control of focus position - Position correction for micro-drilling processes - Thin film processing and precision patterning 【Benefits of Implementation】 - High-precision control of focus position with nanometer resolution - High reproducibility due to backlash-free structure - Easy integration into equipment with compact design - Stabilization of microfabrication quality

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Optical XYZ Axis Piezo Stage P-616

100 µm × 3 axes. A compact XYZ piezo stage that achieves optical alignment with nanometer precision.

In optical systems, even slight deviations in beam position or optical axis can significantly affect coupling efficiency and measurement accuracy. This is especially critical in applications such as interferometric measurements, laser focusing, and fiber alignment, where sub-micron positioning control is essential. The P-616 NanoCube is a compact XYZ piezo nanopositioner with a working range of 100 µm per axis. Its flexure guide structure enables backlash-free, highly linear motion. With nanometer resolution for fine positioning and high mechanical stability, it supports the precise alignment of optical systems with high reproducibility. Designed to accommodate a range of applications from research to device integration, it meets the advanced positioning control needs in the photonics field. 【Application Scenarios】 - Optical fiber alignment (optimization of coupling efficiency) - Fine adjustment of laser focusing positions - Interferometric and holography devices - Microscopy stage fine motion control - Integration into photonics research equipment 【Benefits of Implementation】 - Improved optical axis adjustment accuracy with nanometer resolution - High reproducibility due to backlash-free structure - Drift reduction through high-stiffness flexure design - Easier integration into devices due to compact design

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[Piezostage for Microscopes] XYZ Axis P-616

A compact XYZ piezo stage with a size of 100 µm × 3 axes that supports high magnification observation with nanometer resolution.

In high-magnification microscopy, even slight positional shifts can significantly affect the clarity and reproducibility of images. This is especially true for confocal microscopes, fluorescence microscopes, and live cell observations, where precise XYZ control at sub-micron levels is essential. The P-616 NanoCube is a compact XYZ piezo nanopositioner with a working range of 100 µm on each axis. Its high-stiffness flexure guide structure enables smooth operation without backlash, allowing for fine positioning with nanometer resolution. It also supports Z-axis focus control and XY scanning applications, making it versatile for a wide range of research uses and equipment integration. 【Usage Scenarios】 - Z-axis focus control for confocal microscopes - Multi-point observation with fluorescence microscopes - Live cell imaging - Fine positioning under high-magnification objectives - Observation of nanoscale materials 【Benefits of Implementation】 - High-precision focus control with nanometer resolution - High reproducibility due to backlash-free structure - Stable scanning operation due to high-stiffness design - Easy integration into existing microscopes with compact design

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