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  6. High-Speed Tip/Tilt Piezo Stage S-331 for Laser Processing

High-Speed Tip/Tilt Piezo Stage S-331 for Laser Processing

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S-331

last updated:Mar 17, 2026

PI Japan
PI Japan
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Precision control of the beam with a high-speed response of 10 kHz. Tip/Tilt stage for laser processing.

In laser processing, even slight variations in the angle and position of the beam directly affect processing accuracy and finish quality. This is especially true in fine processing and high-speed scanning processes, where a beam control mechanism that combines high-speed responsiveness and high resolution is essential. The S-331 is a high-speed Tip/Tilt piezo stage equipped with a maximum resonance frequency of 10 kHz and an operating angle of ±5 mrad. Its excellent dynamic performance enables real-time beam correction, reducing focus shift and processing unevenness. It contributes to the establishment of a high-precision and stable laser processing process. 【Application Scenarios】 - High-speed steering of laser beams - Precision processing such as fine drilling and grooving - Real-time beam correction during processing - High-precision alignment control 【Benefits of Implementation】 - Improved processing accuracy and reproducibility - Enhanced processing efficiency due to high-speed responsiveness - Reduced processing unevenness and improved yield - Advancement of equipment performance

    Piezoelectric DevicesActuatorOther industrial robots
csm_PI_S-331_RGB.tif_Bilder-Web_7c4067ab52.jpg

High-Speed Tip/Tilt Piezo Stage S-331 for Laser Processing

csm_PI_S-331_RGB.tif_Bilder-Web_7c4067ab52.jpg
csm_PI_S-331_RGB.tif_Bilder-Web_7c4067ab52.jpg
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【Features】 * Chip/tip angle of 5 mrad, optical deflection angle of 10 mrad (0.57°) * High-performance characteristics in both chip and tilt axes due to parallel control design * High resonance frequency for dynamic motion and high-speed step & settling * High linearity position sensor * For mirrors with a maximum diameter of 12.7 mm (0.5") 【Our Strengths】 Based on precision control technology cultivated over more than 50 years at our headquarters in Germany, we provide piezo stages and actuators adopted by research institutions and equipment manufacturers worldwide. With a rich lineup and technical expertise, we propose optimal solutions to meet our customers' needs.

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【Application Fields】 Image Processing/Stabilization Optical Trapping Laser Scanning/Beam Steering Laser Tuning Optical Filters/Switches Optical Systems Beam Stabilization

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Chip Tilt Piezo Stage S-331 Catalog

Chip Tilt Piezo Stage S-331 Catalog

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Multi-Axis Digital Piezo Controller E-727

Multi-Axis Digital Piezo Controller E-727

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High-speed chip tilt piezo mirror stage "S-335"

High-speed chip tilt piezo mirror stage "S-335"

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PI

PI Japan

Electronic Components and Semiconductors

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The German headquarters, with over 50 years of experience and 30 years as a Japanese corporation, presents new solutions from PI, a company specializing in precision positioning products. We offer the world's number one piezo stages and actuators, as well as hexapod positioning products. Additionally, we are enhancing our lineup of linear motor-driven products and high-precision air bearing stages. In positioning, attention to the foundation is also crucial, and we provide granite bases, enabling us to propose composite systems as well. Please take a look at our diverse lineup that provides cutting-edge technology to production sites around the world, advanced equipment, and various fields of cutting-edge research.

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