PI Japan Product Lineup

The L-836 is a high-precision linear stage with a single axis that can be used for precise positioning in industrial and research fields. It features high travel accuracy and load capacity due to its cross roller guide. Depending on the application, ActiveDriveDC servo motors, stepping motors, and DC gear motor types are available. 【Features】 ■ High travel accuracy and load capacity due to cross roller guide ■ Reproducibility of up to 0.1μm ■ ActiveDriveDC servo motors, stepping motors, and DC gear motor types available depending on the application ■ High stability achieved with a distortion-free aluminum base *For more details, please refer to the PDF document or feel free to contact us.

In laser processing, the accuracy of the cutting position and irradiation position greatly affects product quality and processing efficiency. Especially in precision and fine processing, even slight positional deviations can lead to cutting defects and material loss. The L-836 is a linear stage that achieves high-precision positioning despite its compact design. It employs precision ball screws and high-precision linear guides, providing stable positioning and high reproducibility in laser processing equipment. It is suitable for positioning applications in laser cutting devices and precision processing equipment. 【Application Scenes】 - Laser cutting processing - Laser fine processing - Workpiece positioning - Laser processing equipment 【Benefits of Implementation】 - High-precision control of laser irradiation position - Improved cutting quality - Reduction of material loss - Stabilization of the processing process

In optical systems, the adjustment of the positions of optical elements such as lenses and mirrors is a crucial factor that influences the performance of the device. Even slight misalignments of the optical axis or changes in the focal position can lead to a decrease in image quality and a deterioration in measurement accuracy. The L-836 is a linear stage that achieves high-precision positioning while maintaining a compact design. With its precision ball screw drive and high-precision linear guides, it enables fine adjustments of optical elements and stable positioning in optical assembly processes. It caters to various optical positioning applications, including optical devices, inspection equipment, and research purposes. 【Application Scenarios】 - Laser processing - Optical assembly - Testing and inspection 【Benefits of Implementation】 - Improved optical performance through high-precision positioning - Enhanced work efficiency - Stabilization of product quality

In the field of laser processing, precise control of the focal position greatly influences processing quality. Particularly in fine processing and high-precision marking, even slight focal variations in the Z-axis can affect processing width and energy density. The V-308 Voice Coil PIFOC is a Z-axis focus drive with a minimum resolution of 10 nm and a maximum travel range of 7 mm. Its direct drive system enables smooth and fast response, supporting precise focus control for laser processing heads and optical systems. Additionally, it can accommodate heavy optical modules with a gravity compensation function of up to 1 kg. 【Application Scenarios】 - Focus control for laser marking devices - Z-axis positioning for laser fine processing equipment - Focus correction for galvanometer scanner optical systems - Laser processing systems for research and development 【Benefits of Implementation】 - Stabilization of processing quality through improved focus control accuracy - Optimization of processing processes due to high-speed response - Stable optical system control through weight compensation function - Enhanced reproducibility in fine processing

The V-308 is a Z-axis focus stage that combines voice coil direct drive and cross roller guides. With a minimum increment of 10 nm and an adjustable stroke of 7 mm, it allows for optimization of the focal position of optical systems at the nanometer level. It provides high reliability for multiphoton and deep tissue imaging using large-diameter lenses or long working distance lenses. The high rigidity structure of the cross roller guide and the 10 nm resolution encoder ensure smooth nanopositioning across the entire 7 mm range. For more details, please download the PDF or contact us.

In the semiconductor manufacturing field, with the advancement of miniaturization, high-precision position control in the Z-axis direction during inspection, measurement, and exposure processes is becoming increasingly important. Even slight variations in focal position can impact inspection accuracy and process stability. The V-308 Voice Coil PIFOC is a Z-axis focus drive with a minimum resolution of 10 nm and a maximum travel range of 7 mm. Its gravity compensation feature supports stable positioning even for heavy optical systems and objective lenses, with a capacity of up to 1 kg. The direct drive system provides smooth and fast responsiveness along with high reproducibility, supporting precise focus control in semiconductor manufacturing equipment. 【Application Scenarios】 - Autofocus control for wafer inspection equipment - Z-axis positioning for optical measurement devices - Focus correction for mask inspection equipment - Fine pattern inspection processes 【Benefits of Implementation】 - Improved inspection accuracy through nano-level focus control - Stable holding of optical systems due to weight compensation features - Enhanced inspection throughput due to fast response - Improved process stability

In the field of optical microscopy, precise focus adjustment is essential for clearly capturing the fine structures of the observation target. Particularly in high-magnification observations and multiphoton/deep tissue imaging, optimizing the focal position at the nanoscale greatly influences the quality of the observation. If the precision of focus adjustment is low, the observed image may become blurred, making accurate data acquisition difficult. The V-308 optimizes the focal position of the optical system at the nanoscale with a minimum increment of 10 nm and an adjustable stroke of 7 mm, providing clear observation images. 【Usage Scenarios】 - Observation of fine structures with optical microscopes - Multiphoton and deep tissue imaging - Use of large-diameter lenses and long working distance lenses 【Benefits of Implementation】 - Achieving clear observation images through accurate focus adjustment at the nanoscale - Improved reliability of observation data - Enhanced experimental efficiency

In the field of biotechnology, particularly in microscopic observation and deep tissue imaging, it is important to position the target area with high precision along the Z-axis and optimize the focus. The V-308 Voice Coil PIFOC is a high-precision focus stage that allows for fine adjustments of the objective lens or sample position in minimum steps of 10 nm. With an adjustment range of up to 7 mm and high-rigidity guides, it provides stable nano-positioning even under various observation conditions, including long working distance lenses. Additionally, it features built-in weight compensation for loads of up to 1 kg, accommodating heavy optical systems such as objective lenses and adapters. 【Application Scenes】 - Focus adjustment using high-magnification microscopes - Z-direction scanning for multiphoton fluorescence and deep tissue imaging - High-speed autofocus in automated microscope systems 【Benefits of Implementation】 - Acquisition of high-resolution images through nano-level focus control - Improved stability and reproducibility due to high-rigidity structure - Reduction of the impact of objective lens weight through gravity compensation

In laser microfabrication, even slight positional deviations of the workpiece significantly affect processing quality, necessitating high-precision and stable positioning. This is particularly important for microfabrication of semiconductor materials, glass, and films, where precise position control at the nanometer level is crucial. The V-D07 high-load linear motor stage achieves high-precision positioning at the nanometer level and high-speed operation through a high-precision linear encoder and direct drive linear motor. As a high-precision stage for laser microfabrication equipment, it supports a stable processing process. 【Application Scenarios】 - Precise positioning of laser microfabrication equipment - Laser processing of semiconductors and electronic components - Laser processing of glass and films - Alignment adjustment of optical components 【Benefits of Implementation】 - Enables precise positioning at the nanometer level - Smooth operation due to frictionless drive - Stable operation in high-load environments

High-precision linear stage for industrial automation. The V-D07 high-load linear motor stage is a high-performance platform ideal for industrial automation, laser processing, and precision inspection equipment. With direct drive using iron core linear motors, it achieves frictionless high-speed and high-acceleration operation. It boasts a maximum travel speed of 3000 mm/s and a load capacity of 1000 N, enabling positioning in nanometer units thanks to a high-precision linear encoder. It offers a new option for the manufacturing industry that demands precise operation in high-load environments.

The V-P01 is an XY stage that boasts high precision and high stability driven by a linear motor. It can handle loads of up to 100N and achieves high-speed and high-acceleration movement. With a position accuracy of ±1µm and a minimum incremental motion of 0.1µm, it is suitable for AOI automatic optical inspection and scanning applications.

In microscopy and medical/life sciences, it is important to precisely position the observation target and acquire image data in a stable state. To observe fine structures, stability and reproducibility of positioning are required. If the positioning accuracy is low, the focus on the observation target may shift, potentially hindering accurate diagnosis or research. The V-P01 high-precision XY stage achieves high-precision positioning and smooth operation through linear motor direct drive. It supports sample positioning and automatic scanning in microscopy, contributing to the efficiency of high-precision imaging and automatic analysis. [Usage Scenarios] - Precise positioning of samples in microscopy - Automatic scanning of cell and tissue samples - Digital microscopes and automatic imaging devices - Automatic optical inspection devices (AOI) [Benefits of Implementation] - Improved observation accuracy through high-precision positioning - Reduced observation and inspection time through high-speed scanning - High reproducibility of data acquisition due to stable operation *For details, please refer to the catalog.

In optical systems, high-precision positioning and stable operation are crucial. Especially in the alignment of optical components such as lenses and mirrors, even slight positional deviations can affect measurement results and image quality. The V-817 is a linear stage that combines direct drive via a linear motor with a high-precision incremental encoder. Its low-friction, smooth motion and high-speed response enable precise positioning and optical axis alignment of optical components with high accuracy. Additionally, it supports high loads of up to 600 N and achieves stable positioning through a highly rigid structure. It assists in high-precision adjustment tasks in optical devices and precision measurement systems. [Usage Scenarios] - Position adjustment of lenses and mirrors - Assembly of optical systems - Precision measurement [Benefits of Implementation] - Improved adjustment accuracy through high-precision positioning - Enhanced work efficiency due to stable operation - Dust suppression through non-contact drive

The V-817, which combines the PI Mag(R) linear motor and direct encoder, achieves non-contact drive to reduce dust generation and ensures long-term stability. It supports a maximum load of 600 N and achieves positioning repeatability at the 2 µm level. There are four types of travel lengths available: 204, 407, 610, and 813 mm, and it can be quickly systematized with a wide range of accessories, including drag chains and M6 mounting plates with dimensions of 75 to 150 mm square. It supports a wide range of industrial applications, including assembly of sensors and cameras, precision inspection and measurement, wafer processing and inspection, and laser processing. *For more details, please download the PDF or contact us.

In the field of electronic component assembly, improving productivity and stabilizing quality are crucial. Particularly in component transport on assembly lines, a balance between high-speed operation and high-precision positioning is required. Limitations in transport speed and positional deviations due to vibrations can affect assembly accuracy and production efficiency. The V-855 is a high-speed linear stage that employs direct drive using a linear motor. With a maximum speed of 4,000 mm/s (4 m/s) and a high-precision linear encoder, it achieves both high-speed transport and high-precision positioning simultaneously. Additionally, it supports a long stroke of up to 800 mm and high loads (up to 600 N), making it suitable for high-speed transport applications in electronic component assembly and inspection equipment. 【Usage Scenarios】 - High-speed assembly lines - Component pick and place - Inspection equipment 【Benefits of Implementation】 - Increased productivity - Stabilized quality - Reduced defect rates

In experimental research and development, high precision positioning and stable operation are required. Particularly in experiments such as observation of fine structures, precision machining, and material evaluation, positioning accuracy significantly affects measurement results and the reproducibility of experiments. The V-855 is a high-speed linear stage equipped with direct drive via linear motors and high-precision linear encoders. With a minimum incremental motion of 0.1 µm and a maximum speed of 4,000 mm/s (4 m/s), it achieves both precise positioning and high-speed transport. Additionally, with a maximum stroke of 800 mm, it accommodates a wide range of experimental applications in research and development equipment, such as measuring and scanning large samples. 【Usage Scenarios】 - Precision measurement - Fine machining - Optical experiments - Material testing 【Benefits of Implementation】 - Improved reproducibility of experiments - Enhanced measurement accuracy - Increased work efficiency - Reduced experimental time

In the field of measurement, high precision positioning and stable operation are required. Particularly in the inspection of precision parts, non-contact measurement, and positioning in micro-machining processes, stages that achieve both high resolution and high-speed operation are essential. The V-855 is a high-speed linear stage equipped with direct drive via linear motors and high-precision linear encoders. With a minimum incremental motion of 0.1 µm and a maximum speed of 4,000 mm/s (4 m/s), it enables fast and precise measurement positioning. Additionally, it supports a maximum stroke of 800 mm and high loads (up to 600 N), making it suitable for measurement devices involving large workpieces and high-speed scanning measurements. 【Application Scenarios】 - Measurement of precision parts - Inspection in semiconductor manufacturing - Non-contact measurement systems - Positioning for research and development equipment 【Benefits of Implementation】 - Improved measurement accuracy through high-resolution positioning - Reduced measurement time due to high-speed operation - Capability to measure large workpieces due to long stroke

The V-855, equipped with a magnetic direct drive, combines a cross roller guide that supports 600N with an ironless three-phase linear motor, achieving vibration-free and smooth high-speed transport. You can choose from three stroke lengths of 200 / 400 / 800 mm, and the absolute encoder model improves operational efficiency by eliminating the need for origin setting. *For more details, please download the PDF or contact us.*

The V-738 is a PIMag high-precision XY stage featuring a large opening of 150x150mm, equipped with a non-iron three-phase linear motor. The travel range is 102 mm x 102 mm (4 inches). The speed is 500 mm/s. The reference limit switch is optical. 【Features】 ■ Travel range: 102 mm x 102 mm (4 inches) ■ Large opening of 150x150mm ■ Unidirectional repeatability: 0.1μm ■ Speed: 500 mm/s ■ Three-phase linear motor ■ High-resolution incremental linear encoder *For more details, please refer to the PDF document or feel free to contact us.

In the field of research and experimentation, precise positioning and rotation control are crucial elements that influence the accuracy and reproducibility of experiments. Conventional rotary stages often lack the necessary precision and speed, which can affect experimental results. The Direct Drive High-Precision Rotary Stage V-62x series achieves excellent rotational accuracy and minimal tilt error, enabling advanced alignment and rotation control. 【Application Scenarios】 - Adjustment of optical systems - Semiconductor manufacturing equipment - Experiments in the biomedical field 【Benefits of Implementation】 - Improved experimental accuracy - Highly reproducible experimental results - Utilization across a wide range of fields

In measurements, testing, and inspections, accurate precision is required. Reducing errors and precise positioning are essential. The Direct Drive High-Precision Rotary Stage V-62x series supports accurate calibration work with less than 1µm of eccentricity and flatness. 【Application Scenarios】 - Optical measurement and inspection - Precision inspection of semiconductors and electronic components - Calibration of sensors and measuring instruments 【Benefits of Implementation】 - Reduction of measurement errors and improvement of reproducibility - High-precision and stable angular positioning - Enhanced measurement reliability through long-term stable operation

The Direct Drive High-Precision Rotary Stage V-62x is a frictionless torque motor-driven stage equipped with a high-resolution encoder. It achieves excellent rotational accuracy (eccentricity and flatness <1 µm) and minimal tilt error (±20 µrad), making it ideal for applications that require advanced alignment and rotational control. The platform diameter ranges from 85 mm to 210 mm and supports installation in any orientation. It can be utilized in a wide range of fields, including optics, semiconductors, and biomedical applications.

In the semiconductor manufacturing industry, precise positioning of wafers and masks is a crucial factor that affects product quality and yield. Particularly with advancements in microfabrication technology, there is a demand for higher precision and stability. Low positioning accuracy can lead to processing defects and a decline in device performance. The Direct Drive High-Precision Rotary Stage V-62x series achieves excellent rotational accuracy and minimal tilt error, enabling advanced alignment and rotation control. 【Application Scenarios】 - Wafer probing - Mask alignment - Laser processing - Inspection equipment 【Benefits of Implementation】 - Improved yield through high-precision positioning - Increased productivity through high-speed, high-precision operation - Compatibility with a wide range of fields

In the field of electronic device assembly, the precise placement and assembly of electronic components significantly influence the quality and reliability of products. This is especially true for electronic devices that are becoming smaller and more densely packed, where high-precision positioning is essential. Misalignment can lead to circuit shorts or disconnections, potentially causing defects. The multi-axis motion system X-417 is an integrated motion platform based on a high-load linear stage XY positioning system. It allows for the selection of either a servo motor + ball screw stage or a linear motor stage, enabling flexible system configurations such as the addition of a Z-axis depending on the application. Furthermore, the ACS-based G-901 controller integrates motion control, I/O, and safety functions. The EtherCAT(R) connection facilitates smooth collaboration with the device PLC. 【Application Scenarios】 - Assembly of electronic components - Placement of components on circuit boards - Electronic component inspection equipment 【Benefits of Implementation】 - Improved assembly quality through high-precision positioning - Collaboration with device PLC via EtherCAT(R) connection - Increased design flexibility of devices through a flexible axis configuration

In optical equipment adjustment work, high-precision positioning and stable operation are required. Particularly in the alignment of optical components such as lenses and mirrors, even slight positional deviations can lead to misalignment of the optical axis or focus errors, which can significantly impact the final performance of the device. The multi-axis motion system X-417 is an integrated motion platform based on a high-load linear stage XY positioning system. It allows for the selection of either a servo motor + ball screw stage or a linear motor stage, and flexible configurations such as the addition of a Z-axis can be made according to application needs. With high-precision positioning performance and stable operation, it supports the precise adjustment of optical components and the assembly process of optical systems. 【Application Scenarios】 - Position adjustment of lenses and mirrors - Assembly of optical systems - Precision inspection 【Benefits of Implementation】 - Quality improvement through high-precision positioning - Reduction of work time - Increased yield

■Performance 1: Servo motor and ball screw stage configuration ■Performance 2: High precision, servo motor and ball screw drive stage configuration ■Performance 3: High speed and high precision, linear motor stage configuration The Z-axis is supported with a type that includes a holding brake. The ACS-based G-901 controller integrates motion, I/O, and safety functions, completing the EtherCAT(R) connection with the device PLC immediately. Ideal for laser processing, ultra-short pulse laser processing, testing and precision inspection, and electronic device manufacturing. *For more details, please download the PDF or contact us.

In experimental research and development, high-precision positioning and stable motion control are required. Particularly in experiments that require fine adjustments and high repeatability, the performance of the motion system significantly impacts the experimental results and reproducibility. The multi-axis motion system X-417 is an integrated motion platform based on a high-load linear stage XY positioning system, allowing for flexible selection of axis configurations according to application needs. It can be equipped with either a servo motor + ball screw stage or a linear motor stage, and it supports flexible system configurations such as the addition of a Z-axis. With high-precision positioning performance and stable control, it supports the construction of experimental devices and testing systems in research and development. 【Application Scenarios】 - Laser processing experiments - Ultrafast pulse laser processing - Testing and evaluation devices - Precision inspection - Research on electronic device manufacturing processes 【Benefits of Implementation】 - Improved reproducibility of experiments through high-precision positioning - Increased design flexibility of devices due to flexible axis configurations - Easier system integration with EtherCAT(R) compatible controllers - Enhanced safety with Z-axis holding brake support

In the optical industry, adjustment work requires precise positioning. In particular, the positioning of lenses and mirrors is a crucial factor that affects the performance of optical systems. Even minor misalignments can lead to a decrease in image quality and a deterioration in measurement accuracy. The M-11x series linear stage achieves high-precision positioning despite its compact size, streamlining the adjustment work of optical systems. 【Usage Scenarios】 - Position adjustment of lenses and mirrors - Fiber alignment - Precise positioning of optical components 【Benefits of Implementation】 - Improved optical performance through high-precision positioning - Reduced working time - Increased efficiency of adjustment work

In experimental research and development, precise positioning is essential. In particular, when fine adjustments are required or setups in limited spaces are necessary, compact and high-precision linear stages are needed. The M-11x type linear stage achieves high precision and a variety of axis configurations while being compact, contributing to the efficiency and accuracy of research and development. There is also a type suitable for vacuum (10-6 hPa). 【Usage Scenarios】 - Optical experiments - Microscope observations - Precision measurements - Microfabrication 【Benefits of Implementation】 - Reduction in experimental setup time - Improvement in experimental accuracy - Space-saving - Adaptability to various experiments

【Linear Stage Using DC Motors and Stepper Motors】 ■Travel Range: 5–25mm ■Minimum Movement: 0.2µm ■Load Capacity: 30N ■Size: 60×62×20mm～ ■Can be set up on XY or XYZ axes, and compatible with vacuum (10^-6hPa) 【Compact Linear Stage, Multi-purpose】 ■A compact-sized linear stage with belt drive that is stacked ■Opening diameter is 10 mm ■XY setup can be directly mounted without an adapter plate 【Position Measurement】 ■Another type equipped with a DC gear motor: features a rotary encoder on the motor shaft ■Non-contact Hall effect reference point switch and limit switch 【Drive】 ■2-phase stepper motor or closed-loop DC gear motor ■Lead screw or ball screw with backlash compensation *For more details, please download the PDF or contact us.

The L-306 is a Z-stage that achieves high-precision positioning despite its compact design. It features a return drive structure using belt gears, resulting in a compact size (installation area of 63×63mm). It is easy to combine with an XY stage. The drive system employs either a 2-phase stepping motor or a closed-loop DC motor, allowing configurations tailored to specific applications and control systems. Additionally, it uses cross roller guides, providing high rigidity, reduced friction due to low preloading, and smooth operation. Furthermore, it boasts high guiding accuracy and load-bearing performance. The forced-holding rolling element cage prevents cage creep.

In optical devices, misalignment of lenses and sensors significantly affects optical performance. Particularly in optical axis adjustment and focus control, stable positioning at the sub-micron level is required. The L-310 is a high-precision Z stage that employs ball screw drive and cross roller guides. In addition to high guide precision and rigidity, high-precision position measurement using an incremental encoder enables precise Z-axis position control in optical equipment. 【Application Scenarios】 - Position adjustment of optical lenses - Optical alignment devices - Sensor position adjustment - Microscope focus control - Position adjustment of laser optical systems 【Benefits of Implementation】 - Improved optical performance through high-precision Z-axis positioning - Enhanced measurement accuracy due to stable operation - Increased work efficiency through smooth position adjustment - Improved yield due to enhanced stability of the equipment

In experimental research and development, positioning accuracy at the nano to micron level affects the reliability and reproducibility of experimental results. Particularly in fields such as microscopic observation, optical experiments, and material evaluation, stable precision positioning in the Z direction is essential. The L-310 is a high-precision Z stage that employs ball screw drive and cross roller guides. In addition to high guide precision and rigidity, it achieves stable Z-axis position control for research and development applications through high-precision position measurement using an incremental encoder. 【Application Scenes】 - Microscopic observation devices - Precision measurement devices - Material testing devices - Optical experiment devices - Experimental devices for research and development 【Benefits of Implementation】 - Improved experimental accuracy through high-precision Z-axis positioning - Enhanced reproducibility of experimental data due to stable operation - Easier fine adjustments due to smooth operation - High reliability for research applications You can check the detailed product specifications in the catalog. If you have any questions, please feel free to contact us.

In the semiconductor inspection process, precise positional control at the nano level is required to accurately detect minute defects in wafers and chips. In particular, stable positioning in the Z direction significantly affects inspection accuracy, especially in focus adjustments for inspection cameras and sensors, as well as in controlling the height position of the wafer. The L-310 is a high-precision Z stage that employs ball screw drive and cross roller guides. Its high guide precision and rigidity enable stable Z-direction positioning in semiconductor inspection equipment. 【Application Scenarios】 - Wafer inspection equipment - Semiconductor chip inspection equipment - Image processing inspection equipment - Focus adjustment for inspection cameras - Probe height adjustment 【Benefits of Implementation】 - Improved inspection accuracy through high-precision Z-axis position control - Enhanced reliability of inspection data due to stable operation - Long operating times supported by high duty cycle - Improved yield through enhanced defect detection accuracy

In precision measurement and analysis devices, even slight positional shifts in the Z direction can significantly impact measurement accuracy and reproducibility. This is especially true for measurements of fine structures and nanoscale analyses, where a high-precision and stable positioning mechanism is essential. The L-310 is a high-precision Z stage that employs ball screw drive and cross roller guides. It achieves high guide accuracy and rigidity, enabling stable Z-direction positioning in precision measurement devices and research applications. 【Usage Scenarios】 - Precision measurement instruments - Inspection devices - Research and development 【Benefits of Implementation】 - Improved measurement accuracy through high-precision positioning - Increased reliability due to stable operation - Enhanced work efficiency through smooth operation For detailed product specifications, please refer to the catalog. If you have any questions, please feel free to contact us.

The "L-310" is a product that achieves high guide accuracy and rigidity through a ball screw and cross roller guide. It uses a stress-relieving aluminum base that enables high stability. Additionally, it is equipped with a vacuum-compatible version of a non-contact limit switch and a reference point switch, with the reference point switch featuring orientation sensing located at the center of the travel range. 【Features】 ■ Achieves high guide accuracy and rigidity ■ Uses a stress-relieving aluminum base ■ Realizes smooth operation and low friction for long life ■ High-precision position measurement with an incremental encoder ■ Small incremental motion and low-speed motion *For more details, please refer to the PDF materials or feel free to contact us.

In the semiconductor manufacturing industry, high precision and stability are required for the positioning of wafers and masks. Particularly in fine processing and inspection processes, even slight misalignment in positioning can significantly affect product quality. The V-817 provides high-precision positioning and long-term stability, contributing to yield improvement. 【Application Scenarios】 - Wafer processing - Precision inspection - Laser processing 【Benefits of Implementation】 - Positioning reproducibility at the 2 µm level - Dust reduction through non-contact drive - Achievement of long-term stability

In the semiconductor industry, wafer inspection requires the detection of minute defects with high precision. The accuracy of the inspection is a crucial factor that influences product quality and yield. Especially as wafers become larger and more densely packed, faster and more accurate positioning becomes essential. The V-P01 achieves high-precision positioning and high-speed scanning through linear motor drive, contributing to the efficiency of wafer inspection. 【Usage Scenarios】 - Automated Optical Inspection (AOI) of wafers - Precision scanning of wafer surfaces - Positioning of fine patterns 【Benefits of Implementation】 - Reduction in inspection time - Improvement in inspection accuracy - Enhancement of yield

In the laser processing industry, precise cutting is required. In particular, the positioning accuracy and movement speed of the laser head are crucial for reducing material waste and efficiently manufacturing high-quality products. A stage with low positioning accuracy can lead to a decline in the quality of the cutting surface and worsen yield. Additionally, slow movement speeds can decrease productivity and lead to increased costs. The V-P01 achieves high-precision positioning and high-speed movement through linear motor drive, addressing the challenges in the cutting process of laser processing. 【Usage Scenarios】 - Laser cutting - Laser marking - Laser engraving 【Benefits of Implementation】 - Improved product quality through high-precision cutting - Increased productivity through high-speed movement - Reduction of material waste, contributing to cost savings

In the optical industry, lens adjustment requires high precision in positioning and stability. To maximize the performance of lenses, micron-level fine-tuning is essential. Misalignment can cause image distortion and a decrease in resolution, directly affecting product quality. The V-P01 addresses these challenges through linear motor drive. 【Application Scenes】 - Lens polishing and assembly processes - Optical measuring instruments - Inspection devices 【Benefits of Implementation】 - Quality improvement through high-precision positioning - Increased work efficiency due to high speed and acceleration - Improved yield through stable operation

In the calibration work of the measurement equipment industry, high-precision positioning is essential. Accurate calibration of measuring instruments requires a stage that can precisely control minute movements. A stage with low positional accuracy can lead to errors in calibration results, potentially affecting product quality. The V-P01, driven by a linear motor, achieves a positional accuracy of ±1µm and a minimum incremental motion of 0.1µm, contributing to improved accuracy in calibration work. 【Usage Scenarios】 - Calibration of precision measuring instruments - Calibration of sensors - Positioning of inspection equipment 【Benefits of Implementation】 - Increased efficiency in calibration work - Improved calibration accuracy - Stabilization of product quality

In experimental research and development, precise positioning and stable operation are essential. Particularly when observing fine structures or performing precise machining, a stage with high positional accuracy is required. A stage with low positional accuracy may compromise the reproducibility of experimental results or fail to provide accurate data. The V-P01 achieves high-precision positioning and stable operation through linear motor drive, enhancing the quality of experiments in research and development. 【Application Scenes】 - Microscopic observation - Precision machining - AOI inspection - Scanning 【Effects of Implementation】 - Improved experimental accuracy through high-precision positioning - Increased experimental efficiency due to high speed and acceleration - Assurance of reproducibility through stable operation