[For semiconductor inspection equipment] Maximum load 10kg - Z stage L-310
Precision Z Stage L-310
For Z-axis positioning in wafer inspection and chip inspection. Precision Z-stage utilizing high-rigidity cross roller guides.
In the semiconductor inspection process, precise positional control at the nano level is required to accurately detect minute defects in wafers and chips. In particular, stable positioning in the Z direction significantly affects inspection accuracy, especially in focus adjustments for inspection cameras and sensors, as well as in controlling the height position of the wafer. The L-310 is a high-precision Z stage that employs ball screw drive and cross roller guides. Its high guide precision and rigidity enable stable Z-direction positioning in semiconductor inspection equipment. 【Application Scenarios】 - Wafer inspection equipment - Semiconductor chip inspection equipment - Image processing inspection equipment - Focus adjustment for inspection cameras - Probe height adjustment 【Benefits of Implementation】 - Improved inspection accuracy through high-precision Z-axis position control - Enhanced reliability of inspection data due to stable operation - Long operating times supported by high duty cycle - Improved yield through enhanced defect detection accuracy
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basic information
【Features】 - Stroke: 26 mm - Maximum load: 10 kg - High rigidity structure with cross roller guide - Ball screw drive with no backlash - Compatible with DC / BLDC / stepping motors - Compatible with high-resolution encoders 【Our Strengths】 Based on over 50 years of experience from our headquarters in Germany and 30 years of experience from our Japanese subsidiary, we provide piezo stages and actuators adopted by research institutions and equipment manufacturers worldwide, utilizing precision control technology. With a rich lineup and technical expertise, we propose optimal solutions to meet our customers' needs.
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【Applications】 ■Industry ■Precision positioning in research fields ■High duty cycle *For more details, please refer to the PDF document or feel free to contact us.
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The German headquarters, with over 50 years of experience and 30 years as a Japanese corporation, presents new solutions from PI, a company specializing in precision positioning products. We offer the world's number one piezo stages and actuators, as well as hexapod positioning products. Additionally, we are enhancing our lineup of linear motor-driven products and high-precision air bearing stages. In positioning, attention to the foundation is also crucial, and we provide granite bases, enabling us to propose composite systems as well. Please take a look at our diverse lineup that provides cutting-edge technology to production sites around the world, advanced equipment, and various fields of cutting-edge research.
