High Rigidity and High Precision Z Stage for Semiconductor Inspection V-Z03
V-Z03 High Load Capacity High Precision Z Stage
Improving the quality and efficiency of semiconductor inspection with high-speed, high-precision Z-axis control.
In the semiconductor field, high precision and stability are required for the positioning of wafers and masks. Especially in inspection processes and microfabrication, even slight positional deviations can lead to measurement errors and reduced yield, significantly impacting product quality. The V-Z03 adopts a direct drive system using a voice coil motor, achieving high-speed response and high-precision Z-axis control. Furthermore, with a high-rigidity cross roller guide and a non-contact linear encoder, it ensures stable positioning without backlash and high reproducibility. It is also optimal for precise positioning of heavy objects, supporting loads of up to 150 N and featuring a pneumatic counterbalance. 【Application Scenarios】 - Semiconductor inspection equipment - Wafer inspection and measurement equipment - Precision measurement instruments 【Benefits of Implementation】 - Improved measurement accuracy through high-precision positioning - Reduced takt time due to high-speed response - Stable operation due to high-rigidity guides - Expanded applications due to high load capacity - Enhanced safety through self-locking functionality
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basic information
【Features】 - High-precision Z-axis voice coil motor stage - Capable of fine movements with a minimum of 0.035µm - Supports a maximum load of 150N - Equipped with a self-locking function - Optical linear encoder 【Our Strengths】 Based on over 50 years of experience from our headquarters in Germany and 30 years of experience from our Japanese subsidiary, we provide piezo stages and actuators adopted by research institutions and equipment manufacturers worldwide, leveraging our precision control technology. With a rich lineup and technical expertise, we propose optimal solutions tailored to our customers' needs.
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Applications/Examples of results
Precision positioning in industrial and research fields, semiconductor inspection applications *For more details, please refer to the catalog or feel free to contact us.
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Company information
The German headquarters, with over 50 years of experience and 30 years as a Japanese corporation, presents new solutions from PI, a company specializing in precision positioning products. We offer the world's number one piezo stages and actuators, as well as hexapod positioning products. Additionally, we are enhancing our lineup of linear motor-driven products and high-precision air bearing stages. In positioning, attention to the foundation is also crucial, and we provide granite bases, enabling us to propose composite systems as well. Please take a look at our diverse lineup that provides cutting-edge technology to production sites around the world, advanced equipment, and various fields of cutting-edge research.
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