[Z Stage Special Feature] High-Precision Z Stage Suitable for Semiconductor Manufacturing and Inspection Equipment
We offer a diverse lineup of mechanisms, sizes, and strokes to meet customer needs. We also accommodate modifications and custom orders.
This is a feature on the Z stage of Kozu Seiki's precision positioning stages, which are active in various production sites such as semiconductor manufacturing equipment. We introduce the upright Z stage and three types of horizontal Z stages. Each stage includes information on table size and model type, as well as essential specifications for selecting a Z stage, such as stroke, overall height, and load capacity. Examples of performance values are also provided. Custom case studies are included as well. This material serves as a helpful resource for selection. Performance values for the Z stage are also available. *For more details, please refer to the PDF document or feel free to contact us.
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basic information
Table size: Standard lineup from 40mm×40mm to 160mm×160mm. Load capacity: Standard lineup up to 50kgf. Custom options are available for table sizes, load capacities, and strokes that exceed the standard lineup. Please feel free to contact us.
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Applications/Examples of results
For more details, please refer to the PDF document or feel free to contact us.
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We offer a full range of positioning solutions required for nano-level high-precision positioning, image processing alignment, semiconductor inspection, optical device assembly, and automotive camera production.