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  6. Ultra-High Precision Alignment Stage 'RST Aligner'

Ultra-High Precision Alignment Stage 'RST Aligner'

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last updated:Jul 19, 2022

神津精機
神津精機
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Achieving high tracking accuracy of 0.1μm ± 20nm! It beautifully engraves steps at the sub-micron level.

The "RST Aligner" is a super high-precision alignment stage with a drive unit arranged in a balanced equilateral triangle. This axis configuration enables high-precision micro-drives essential for alignment. The necessary calculations for control are provided free of charge. It consolidates the cutting-edge technology cultivated in the Mont Blanc series. Even at high resolution settings, it follows with excellent sensitivity. 【Features】 ■ Balanced equilateral triangle arrangement ■ Custom-designed drive unit ■ Large diameter transmission hole ■ Customizable table size ■ Z mechanism can be added ■ Custom support available *For more details, please refer to the PDF document or feel free to contact us.

    Other inspection equipment and devices
2021-11-12_15h54_50.png

Ultra-High Precision Alignment Stage 'RST Aligner'

2021-11-12_15h54_50.png
2021-11-12_15h54_50.png
  • Related Link - https://www.kohzu.co.jp/products/positioning-stage…

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【Other Features】 - Due to the structural design, it does not use bearings that impose restrictions on the size of the through holes, allowing for the creation of large-diameter through holes. - By modularizing the drive unit, the table size and shape can be freely designed according to the mounted workpiece. - We can also propose the addition of a Z mechanism, which is required for applications such as bonding. - Customization options are available for stroke changes, high load specifications, changes in appearance color, and other specifications. *For more details, please refer to the PDF document or feel free to contact us.

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【Applications】 ■ Wafer bonding equipment ■ Exposure equipment ■ Electrical inspection equipment for various substrates ■ Submicron alignment of various types *For more details, please refer to the PDF document or feel free to contact us.

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Ultra-High Precision Alignment Stage 'RST Aligner'

Ultra-High Precision Alignment Stage 'RST Aligner'

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神津精機

神津精機

Optical Instruments

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We offer a full range of positioning solutions required for nano-level high-precision positioning, image processing alignment, semiconductor inspection, optical device assembly, and automotive camera production.

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